Paul Franzen

Person

West Linn, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for RF compensation in plasma assisted atomic layer deposition
- Patent number 9,624,578
- Issue date Apr 18, 2017
- Lam Research Corporation
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for monitoring thickness of a conductive layer
- Patent number 9,007,059
- Issue date Apr 14, 2015
- Novellus Systems, Inc.
- Sudeep Kumar Lahiri
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and apparatuses for determining thickness of a conductive l...
- Patent number 8,106,651
- Issue date Jan 31, 2012
- Novellus Systems, Inc.
- Sudeep Kumar Lahiri
- B24 - GRINDING POLISHING
Information Patent Grant
Platen assembly and work piece carrier head employing flexible circ...
- Patent number 7,887,392
- Issue date Feb 15, 2011
- Novellus Systems, Inc.
- Paul M. Franzen
- B24 - GRINDING POLISHING
Information Patent Grant
High throughput servo load cup with integrated wet chemistry delivery
- Patent number 7,811,153
- Issue date Oct 12, 2010
- Novellus Systems, Inc.
- Rich Blank
- B24 - GRINDING POLISHING
Information Patent Grant
Method for monitoring edge exclusion during chemical mechanical pla...
- Patent number 7,428,470
- Issue date Sep 23, 2008
- Novellus Systems, Inc.
- Brian Brown
- B24 - GRINDING POLISHING
Information Patent Grant
Methods for monitoring a chemical mechanical planarization process...
- Patent number 7,264,537
- Issue date Sep 4, 2007
- Novellus Systems, Inc.
- Thomas Laursen
- B24 - GRINDING POLISHING
Information Patent Grant
Methods for controlling the pressures of adjustable pressure zones...
- Patent number 7,115,017
- Issue date Oct 3, 2006
- Novellus Systems, Inc.
- Thomas Laursen
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
THERMAL IMAGING FOR ANALYSIS OF DEVICE FABRICATION TOOLS
- Publication number 20240410760
- Publication date Dec 12, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGE ANALYSIS OF PLASMA CONDITIONS
- Publication number 20240234112
- Publication date Jul 11, 2024
- LAM RESEARCH CORPORATION
- Michal Danek
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR RF COMPENSATION IN PLASMA ASSISTED ATOMIC...
- Publication number 20160090650
- Publication date Mar 31, 2016
- LAM RESEARCH CORPORATION
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUSES FOR DETERMINING THICKNESS OF A CONDUCTIVE L...
- Publication number 20120129277
- Publication date May 24, 2012
- Novellus Systems, Inc.
- Sudeep Kumar Lahiri
- B24 - GRINDING POLISHING
Information Patent Application
METHODS AND APPARATUSES FOR DETERMINING THICKNESS OF A CONDUCTIVE L...
- Publication number 20090263918
- Publication date Oct 22, 2009
- Novellus Systems, Inc.
- Sudeep Kumar Lahiri
- B24 - GRINDING POLISHING
Information Patent Application
PLATEN ASSEMBLY AND WORK PIECE CARRIER HEAD EMPLOYING FLEXIBLE CIRC...
- Publication number 20080305717
- Publication date Dec 11, 2008
- Novellus Systems, Inc.
- Paul M. Franzen
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR MONITORING EDGE EXCLUSION DURING CHEMICAL MECHANICAL PLA...
- Publication number 20080200099
- Publication date Aug 21, 2008
- Novellus Systems, Inc.
- Brian Brown
- B24 - GRINDING POLISHING

Paul Franzen

Person

Patents Grantslast 30 patents

Method for RF compensation in plasma assisted atomic layer deposition

Methods for monitoring thickness of a conductive layer

Methods and apparatuses for determining thickness of a conductive l...

Platen assembly and work piece carrier head employing flexible circ...

High throughput servo load cup with integrated wet chemistry delivery

Method for monitoring edge exclusion during chemical mechanical pla...

Methods for monitoring a chemical mechanical planarization process...

Methods for controlling the pressures of adjustable pressure zones...

Patents Applicationslast 30 patents

THERMAL IMAGING FOR ANALYSIS OF DEVICE FABRICATION TOOLS

IMAGE ANALYSIS OF PLASMA CONDITIONS

METHOD AND APPARATUS FOR RF COMPENSATION IN PLASMA ASSISTED ATOMIC...

METHODS AND APPARATUSES FOR DETERMINING THICKNESS OF A CONDUCTIVE L...

METHODS AND APPARATUSES FOR DETERMINING THICKNESS OF A CONDUCTIVE L...

PLATEN ASSEMBLY AND WORK PIECE CARRIER HEAD EMPLOYING FLEXIBLE CIRC...

METHOD FOR MONITORING EDGE EXCLUSION DURING CHEMICAL MECHANICAL PLA...