Membership
Tour
Register
Log in
Paul GRAEUPNER
Follow
Person
Aalen, DE
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Projection exposure methods and systems
Patent number
9,885,958
Issue date
Feb 6, 2018
Carl Zeiss SMT GmbH
Paul Graeupner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for adjusting an illumination setting
Patent number
9,690,203
Issue date
Jun 27, 2017
Carl Zeiss SMT GmbH
Joerg Zimmermann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure methods and systems
Patent number
8,917,379
Issue date
Dec 23, 2014
Carl Zeiss SMT GmbH
Paul Graeupner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,711,330
Issue date
Apr 29, 2014
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection system with compensation of intensity variations and com...
Patent number
8,605,257
Issue date
Dec 10, 2013
Carl Zeiss SMT GmbH
Patrick Scheible
G02 - OPTICS
Information
Patent Grant
Illumination system for illuminating a mask in a microlithographic...
Patent number
8,416,390
Issue date
Apr 9, 2013
Carl Zeiss SMT GmbH
Markus Deguenther
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for correcting optical proximity effects
Patent number
8,405,907
Issue date
Mar 26, 2013
Carl Zeiss SMT GmbH
Paul Graeupner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for improving an optical imaging property of a projection ob...
Patent number
8,237,915
Issue date
Aug 7, 2012
Carl Zeiss SMT GmbH
Paul Graeupner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for correcting optical proximity effects
Patent number
8,027,091
Issue date
Sep 27, 2011
Carl Zeiss SMT GmbH
Paul Graeupner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,961,293
Issue date
Jun 14, 2011
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure method and projection exposure apparatus for mi...
Patent number
7,800,732
Issue date
Sep 21, 2010
Carl Zeiss SMT AG
Joerg Zimmermann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Immersion lithography objective
Patent number
7,649,702
Issue date
Jan 19, 2010
Carl Zeiss SMT AG
Bernhard Gellrich
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of optimizing imaging performance
Patent number
7,570,345
Issue date
Aug 4, 2009
Carl Zeiss SMT AG
Gerd Reisinger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,352,435
Issue date
Apr 1, 2008
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection objective, especially for microlithography, and method f...
Patent number
7,310,187
Issue date
Dec 18, 2007
Carl Zeiss SMT AG
Alexander Epple
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of optimizing imaging performance
Patent number
7,233,386
Issue date
Jun 19, 2007
Carl Zeiss SMT AG
Gerd Reisinger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for improving an optical imaging property of a projection ob...
Patent number
7,227,616
Issue date
Jun 5, 2007
Carl Zeiss SMT AG
Paul Graeupner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for determining wavefront aberrations
Patent number
7,209,241
Issue date
Apr 24, 2007
Carl Zeiss SMT AG
Wolfgang Emer
G01 - MEASURING TESTING
Information
Patent Grant
Projection objective, especially for microlithography, and method f...
Patent number
7,209,292
Issue date
Apr 24, 2007
Carl Zeiss SMT AG
Alexander Epple
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for determining wavefront aberrations
Patent number
7,019,846
Issue date
Mar 28, 2006
Carl Zeiss SMT AG
Wolfgang Emer
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
PROJECTION EXPOSURE METHODS AND SYSTEMS
Publication number
20180164691
Publication date
Jun 14, 2018
Carl Zeiss SMT GMBH
Paul GRAEUPNER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION EXPOSURE METHODS AND SYSTEMS
Publication number
20150160565
Publication date
Jun 11, 2015
Carl Zeiss SMT GMBH
Paul GRAEUPNER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR ADJUSTING AN ILLUMINATION SETTING
Publication number
20150153652
Publication date
Jun 4, 2015
Carl Zeiss SMT GMBH
Joerg Zimmermann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR IMPROVING AN OPTICAL IMAGING PROPERTY OF A PROJECTION OB...
Publication number
20130114056
Publication date
May 9, 2013
Carl Zeiss SMT GMBH
Paul GRAEUPNER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR CORRECTING OPTICAL PROXIMITY EFFECTS
Publication number
20120013985
Publication date
Jan 19, 2012
Carl Zeiss SMT GMBH
Paul GRAEUPNER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110211181
Publication date
Sep 1, 2011
ASML NETHERLANDS B.V.
Bob STREEFKERK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS FOR MI...
Publication number
20100157266
Publication date
Jun 24, 2010
Carl Zeiss SMT AG
Joerg Zimmermann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...
Publication number
20100060873
Publication date
Mar 11, 2010
Carl Zeiss SMT AG
Markus Deguenther
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION EXPOSURE METHODS AND SYSTEMS
Publication number
20090280437
Publication date
Nov 12, 2009
Carl Zeiss SMT AG
Paul Graeupner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR IMPROVING AN OPTICAL IMAGING PROPERTY OF A PROJECTION OB...
Publication number
20090002661
Publication date
Jan 1, 2009
Carl Zeiss SMT AG
Paul Graeupner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMMERSION LITHOGRAPHY OBJECTIVE
Publication number
20080212211
Publication date
Sep 4, 2008
Carl Zeiss SMT AG
Bernhard Gellrich
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20080170215
Publication date
Jul 17, 2008
ASML NETHERLANDS B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection System with Compensation of Intensity Variations and Com...
Publication number
20080094599
Publication date
Apr 24, 2008
Carl Zeiss SMT AG
Patrick Scheible
G02 - OPTICS
Information
Patent Application
Method For Structuring A Substrate Using Multiple Exposure
Publication number
20080036982
Publication date
Feb 14, 2008
Carl Zeiss SMT AG
Ulrich Wegmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR CORRECTING OPTICAL PROXIMITY EFFECTS
Publication number
20080032207
Publication date
Feb 7, 2008
Carl Zeiss SMT AG
Paul Graeupner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of optimizing imaging performance
Publication number
20080007706
Publication date
Jan 10, 2008
Carl Zeiss SMT AG
Gerd Reisinger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for improving an Optical Imaging Property of a Projection Ob...
Publication number
20070195299
Publication date
Aug 23, 2007
Carl Zeiss SMT AG
Paul Graeupner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection objective, especially for microlithography, and method f...
Publication number
20070188881
Publication date
Aug 16, 2007
Carl Zeiss SMT AG
Alexander Epple
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for determining wavefront aberrations
Publication number
20060164655
Publication date
Jul 27, 2006
Carl Zeiss SMT AG
Wolfgang Emer
G02 - OPTICS
Information
Patent Application
Method for improving an optical imaging property of a projection ob...
Publication number
20050264780
Publication date
Dec 1, 2005
Carl Zeiss SMT AG
Paul Graeupner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of optimizing imaging performance
Publication number
20050237506
Publication date
Oct 27, 2005
Carl Zeiss SMT AG
Gerd Reisinger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050174550
Publication date
Aug 11, 2005
ASML NETHERLANDS B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection objective, especially for microlithography, and method f...
Publication number
20040109237
Publication date
Jun 10, 2004
Carl Zeiss SMT AG
Alexander Epple
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for determining wavefront aberrations
Publication number
20040032579
Publication date
Feb 19, 2004
Carl Zeiss SMT AG
Wolfgang Emer
G02 - OPTICS