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Paul R. Unruh
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Oro Valley, AZ, US
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Patents Grants
last 30 patents
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Patent Grant
Measurement of object deformation with optical profiler
Patent number
7,283,250
Issue date
Oct 16, 2007
Veeco Instruments, Inc.
Joanna Schmit
G01 - MEASURING TESTING
Information
Patent Grant
Film thickness and boundary characterization by interferometric pro...
Patent number
7,119,909
Issue date
Oct 10, 2006
Veeco Instruments, Inc.
Paul R. Unruh
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Method and Apparatus of Analyzing Sample Surface Data
Publication number
20120265487
Publication date
Oct 18, 2012
Bruker Nano, Inc.
Emilio Yanine
G01 - MEASURING TESTING
Information
Patent Application
Film thickness and boundary characterization by interferometric pro...
Publication number
20050280829
Publication date
Dec 22, 2005
Paul R. Unruh
G01 - MEASURING TESTING
Information
Patent Application
Measurement of object deformation with optical profiler
Publication number
20050157306
Publication date
Jul 21, 2005
Joanna Schmit
G01 - MEASURING TESTING