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Paulo Eduardo Lima
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Grenoble, FR
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last 30 patents
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Plasma sources
Patent number
8,400,063
Issue date
Mar 19, 2013
Aviza Technology Limited
Gary Proudfoot
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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PLASMA SOURCES
Publication number
20100108905
Publication date
May 6, 2010
AVIZA TECHNOLOGY LIMITED
Gary Proudfoot
H01 - BASIC ELECTRIC ELEMENTS