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Pekka Soininen

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  • Espoo, FI
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    ATOMIC LAYER DEPOSITION REACTOR ARRANGEMENT AND A METHOD FOR OPERAT...
    • Publication number 20240043998
    • Publication date Feb 8, 2024
    • BENEQ OY
    • Jonas ANDERSSON
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VACUUM CHAMBER AND ARRANGEMENT FOR ATOMIC LAYER DEPOSITION
    • Publication number 20240026535
    • Publication date Jan 25, 2024
    • BENEQ OY
    • Johannes WESSLIN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    LOADING DEVICE, ARRANGEMENT AND METHOD FOR LOADING A REACTION CHAMBER
    • Publication number 20240026536
    • Publication date Jan 25, 2024
    • BENEQ OY
    • Johannes WESSLIN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS FEEDING CUP AND A GAS MANIFOLD ASSEMBLY
    • Publication number 20240018651
    • Publication date Jan 18, 2024
    • BENEQ OY
    • Pekka SOININEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ATOMIC LAYER DEPOSITION APPARATUS
    • Publication number 20240018652
    • Publication date Jan 18, 2024
    • BENEQ OY
    • Johannes WESSLIN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    AN ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD
    • Publication number 20230407474
    • Publication date Dec 21, 2023
    • BENEQ OY
    • Mika Jauhiainen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    AN ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD
    • Publication number 20230392256
    • Publication date Dec 7, 2023
    • BENEQ OY
    • Mika Jauhiainen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    AN ATOMIC LAYER DEPOSITION APPARATUS
    • Publication number 20230374658
    • Publication date Nov 23, 2023
    • BENEQ OY
    • Pekka SOININEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS AND METHOD FOR ATOMIC LAYER DEPOSITION (ALD)
    • Publication number 20220275512
    • Publication date Sep 1, 2022
    • BENEQ OY
    • Matti MALILA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    AN ATOMIC LAYER DEPOSITION APPARATUS
    • Publication number 20220259733
    • Publication date Aug 18, 2022
    • BENEQ OY
    • Hulda AMINOFF
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PRECURSOR SOURCE ARRANGEMENT AND ATOMIC LAYER DEPOSITION APPARATUS
    • Publication number 20220243328
    • Publication date Aug 4, 2022
    • BENEQ OY
    • Pekka SOININEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PRECURSOR SOURCE ARRANGEMENT AND ATOMIC LAYER DEPOSITION APPARATUS
    • Publication number 20220243320
    • Publication date Aug 4, 2022
    • BENEQ OY
    • Hulda AMINOFF
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PRECURSOR SUPPLY CHAMBER
    • Publication number 20220220614
    • Publication date Jul 14, 2022
    • BENEQ OY
    • Johannes WESSLIN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ATOMIC LAYER DEPOSITION APPARATUS
    • Publication number 20220205098
    • Publication date Jun 30, 2022
    • BENEQ OY
    • Pekka SOININEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    AN ATOMIC LAYER DEPOSITION APPARATUS
    • Publication number 20220205097
    • Publication date Jun 30, 2022
    • BENEQ OY
    • Ville MIIKKULAINEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PRECURSOR SUPPLY CABINET
    • Publication number 20220146051
    • Publication date May 12, 2022
    • BENEQ OY
    • Pekka SOININEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    NOZZLE HEAD
    • Publication number 20210214847
    • Publication date Jul 15, 2021
    • BENEQ OY
    • Pekka Soininen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS AND METHOD
    • Publication number 20210164100
    • Publication date Jun 3, 2021
    • BENEQ OY
    • Pekka SOININEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA ETCH-RESISTANT FILM AND A METHOD FOR ITS FABRICATION
    • Publication number 20210115555
    • Publication date Apr 22, 2021
    • BENEQ OY
    • Pekka J. SOININEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    NOZZLE HEAD AND APPARATUS
    • Publication number 20210115561
    • Publication date Apr 22, 2021
    • BENEQ OY
    • Pekka SOININEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MATERIALS COMPRISING MATRIX MATERIAL DOPED WITH METAL AND METHODS F...
    • Publication number 20210108138
    • Publication date Apr 15, 2021
    • BENEQ OY
    • Saoussen Merdes
    • C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
  • Information Patent Application

    NOZZLE HEAD AND APPARATUS
    • Publication number 20210025057
    • Publication date Jan 28, 2021
    • BENEQ OY
    • Pekka SOININEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    NOZZLE AND NOZZLE HEAD
    • Publication number 20200385863
    • Publication date Dec 10, 2020
    • BENEQ OY
    • Pekka Soininen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    A PLASMA ETCH-RESISTANT FILM AND A METHOD FOR ITS FABRICATION
    • Publication number 20200080197
    • Publication date Mar 12, 2020
    • BENEQ OY
    • Pekka J. SOININEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF COATING A SUBSTRATE AND AN APPARATUS
    • Publication number 20190186011
    • Publication date Jun 20, 2019
    • BENEQ OY
    • Mikko SÖDERLUND
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS, METHOD AND REACTION CHAMBER
    • Publication number 20190127850
    • Publication date May 2, 2019
    • BENEQ OY
    • Mikko Soderlund
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    AN APPARATUS FOR ATOMIC LAYER DEPOSITION
    • Publication number 20190032212
    • Publication date Jan 31, 2019
    • BENEQ OY
    • Pekka SOININEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    A COATING PRECURSOR NOZZLE AND A NOZZLE HEAD
    • Publication number 20180347044
    • Publication date Dec 6, 2018
    • BENEQ OY
    • Pekka T. SOININEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS FOR PROCESSING A SURFACE OF SUBSTRATE AND METHOD OPERATIN...
    • Publication number 20180258536
    • Publication date Sep 13, 2018
    • BENEQ OY
    • Leif Keto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS FOR PROCESSING SUBSTRATE
    • Publication number 20180251896
    • Publication date Sep 6, 2018
    • BENEQ OY
    • Mika Jauhiainen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...