Pengyi Zhang

Person

Tigard, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Selective deposition of etch-stop layer for enhanced patterning
- Patent number 11,869,770
- Issue date Jan 9, 2024
- Lam Research Corporation
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of etch-stop layer for enhanced patterning
- Patent number 11,094,542
- Issue date Aug 17, 2021
- Lam Research Corporation
- Nagraj Shankar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead with air-gapped plenums and overhead isolation gas distr...
- Patent number 10,745,806
- Issue date Aug 18, 2020
- Lam Research Corporation
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pre-treatment method to improve selectivity in a selective depositi...
- Patent number 10,643,889
- Issue date May 5, 2020
- Lam Rasearch Corporation
- Dennis Hausmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective deposition of etch-stop layer for enhanced patterning
- Patent number 10,566,194
- Issue date Feb 18, 2020
- Lam Research Corporation
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead with air-gapped plenums and overhead isolation gas distr...
- Patent number 10,472,716
- Issue date Nov 12, 2019
- Lam Research Corporation
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SELECTIVE DEPOSITION OF ETCH-STOP LAYER FOR ENHANCED PATTERNING
- Publication number 20210358753
- Publication date Nov 18, 2021
- LAM RESEARCH CORPORATION
- Nagraj Shankar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE DEPOSITION OF ETCH-STOP LAYER FOR ENHANCED PATTERNING
- Publication number 20200168466
- Publication date May 28, 2020
- LAM RESEARCH CORPORATION
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTR...
- Publication number 20200063261
- Publication date Feb 27, 2020
- LAM RESEARCH CORPORATION
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRE-TREATMENT METHOD TO IMPROVE SELECTIVITY IN A SELECTIVE DEPOSITI...
- Publication number 20200043776
- Publication date Feb 6, 2020
- LAM RESEARCH CORPORATION
- Dennis HAUSMANN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTR...
- Publication number 20190352777
- Publication date Nov 21, 2019
- LAM RESEARCH CORPORATION
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF ETCH-STOP LAYER FOR ENHANCED PATTERNING
- Publication number 20190341256
- Publication date Nov 7, 2019
- LAM RESEARCH CORPORATION
- Nagraj Shankar
- H01 - BASIC ELECTRIC ELEMENTS

Pengyi Zhang

Person

Patents Grantslast 30 patents

Selective deposition of etch-stop layer for enhanced patterning

Selective deposition of etch-stop layer for enhanced patterning

Showerhead with air-gapped plenums and overhead isolation gas distr...

Pre-treatment method to improve selectivity in a selective depositi...

Selective deposition of etch-stop layer for enhanced patterning

Showerhead with air-gapped plenums and overhead isolation gas distr...

Patents Applicationslast 30 patents

SELECTIVE DEPOSITION OF ETCH-STOP LAYER FOR ENHANCED PATTERNING

SELECTIVE DEPOSITION OF ETCH-STOP LAYER FOR ENHANCED PATTERNING

SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTR...

PRE-TREATMENT METHOD TO IMPROVE SELECTIVITY IN A SELECTIVE DEPOSITI...

SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTR...

SELECTIVE DEPOSITION OF ETCH-STOP LAYER FOR ENHANCED PATTERNING