Peter C. Smith

Person

  • Burlingame, CA, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Electrostatic chuck

    • Patent number 5,600,530
    • Issue date Feb 4, 1997
    • The Morgan Crucible Company p.l.c.
    • Peter C. Smith
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR