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Peter Cirigliano

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  • Sunnyvale, CA, US
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    CRITICAL DIMENSION REDUCTION AND ROUGHNESS CONTROL
    • Publication number 20120309201
    • Publication date Dec 6, 2012
    • LAM RESEARCH CORPORATION
    • Sangheon LEE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ADJUSTABLE CONFINEMENT RING ASSEMBLY
    • Publication number 20120043021
    • Publication date Feb 23, 2012
    • Lam Research Corporation
    • Peter Cirigliano
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CRITICAL DIMENSION REDUCTION AND ROUGHNESS CONTROL
    • Publication number 20100148317
    • Publication date Jun 17, 2010
    • LAM RESEARCH CORPORATION
    • Sangheon LEE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SIDEWALL FORMING PROCESSES
    • Publication number 20100068885
    • Publication date Mar 18, 2010
    • LAM RESEARCH CORPORATION
    • Peter CIRIGLIANO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ORGANIC ARC ETCH SELECTIVE FOR IMMERSION PHOTORESIST
    • Publication number 20090311871
    • Publication date Dec 17, 2009
    • LAM RESEARCH CORPORATION
    • Helen H. Zhu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCH WITH STRIATION CONTROL
    • Publication number 20090121324
    • Publication date May 14, 2009
    • LAM RESEARCH CORPORATION
    • S. M. Reza Sadjadi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CONFINEMENT RING DRIVE
    • Publication number 20080149595
    • Publication date Jun 26, 2008
    • Peter Cirigliano
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Infinitely selective photoresist mask etch
    • Publication number 20070193973
    • Publication date Aug 23, 2007
    • Lam Research Corporation
    • Ji Soo Kim
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Vertical profile fixing
    • Publication number 20070075038
    • Publication date Apr 5, 2007
    • Lam Research Corporation
    • S.M. Reza Sadjadi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Critical dimension reduction and roughness control
    • Publication number 20060266478
    • Publication date Nov 30, 2006
    • Lam Research Corporation
    • Sangheon Lee
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Etch with striation control
    • Publication number 20060194439
    • Publication date Aug 31, 2006
    • Lam Research Corporation
    • S.M. Reza Sadjadi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Confinement ring drive
    • Publication number 20060162657
    • Publication date Jul 27, 2006
    • Lam Research Corporation
    • Peter Cirigliano
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method for stripping photoresist from etched wafer
    • Publication number 20060024968
    • Publication date Feb 2, 2006
    • Lam Research Corporation
    • Eric A. Hudson
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Trench etch process for low-k dielectrics
    • Publication number 20050009324
    • Publication date Jan 13, 2005
    • LAM RESEARCH CORPORATION
    • SiYi Li
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method for plasma stripping using periodic modulation of gas chemis...
    • Publication number 20040224520
    • Publication date Nov 11, 2004
    • Lam Research Corporation
    • Seokmin Yun
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TRENCH ETCH PROCESS FOR LOW-K DIELECTRICS
    • Publication number 20040038540
    • Publication date Feb 26, 2004
    • LAM RESEARCH CORPORATION
    • SiYi Li
    • H01 - BASIC ELECTRIC ELEMENTS