Peter R. Kirlin

Person

Brookfield, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Source reagent compositions and method for forming metal films on a...
- Patent number 8,299,286
- Issue date Oct 30, 2012
- Advanced Technology Materials, Inc.
- Robin A. Gardiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Source reagent compositions and method for forming metal films on a...
- Patent number 7,323,581
- Issue date Jan 29, 2008
- Advanced Technology Materials, Inc.
- Robin A. Gardiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-assisted dry etching of noble metal-based materials
- Patent number 6,846,424
- Issue date Jan 25, 2005
- Advanced Technology Materials, Inc.
- Thomas H. Baum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Isotropic dry cleaning process for noble metal integrated circuit s...
- Patent number 6,709,610
- Issue date Mar 23, 2004
- Advanced Technology Materials, Inc.
- Peter C. Van Buskirk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diffusion barriers between noble metal electrodes and metallization...
- Patent number 6,320,213
- Issue date Nov 20, 2001
- Advanced Technology Materials, Inc.
- Peter S. Kirlin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Isotropic dry cleaning process for noble metal integrated circuit s...
- Patent number 6,254,792
- Issue date Jul 3, 2001
- Advanced Technology Materials, Inc.
- Peter C. Van Buskirk
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus and process for manufacturing semiconductor devices, prod...
- Patent number 6,204,180
- Issue date Mar 20, 2001
- Advanced Technology Materials, Inc.
- Glenn M. Tom
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Platinum source compositions for chemical vapor deposition of platinum
- Patent number 6,162,712
- Issue date Dec 19, 2000
- Advanced Technology Materials, Inc.
- Thomas H. Baum
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Sorbent-based gas storage and delivery system for dispensing of hig...
- Patent number 6,132,492
- Issue date Oct 17, 2000
- Advanced Technology Materials, Inc.
- Steven J. Hultquist
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Metal complex source reagents for chemical vapor deposition
- Patent number 6,126,996
- Issue date Oct 3, 2000
- Advanced Technology Materials, Inc.
- Peter S. Kirlin
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Method of forming metal films on a substrate by chemical vapor depo...
- Patent number 6,110,529
- Issue date Aug 29, 2000
- Robin A. Gardiner
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Ferroelectric capacitor and integrated circuit device comprising same
- Patent number 6,072,689
- Issue date Jun 6, 2000
- Advanced Technology Materials, Inc.
- Peter S. Kirlin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming sidewall capacitance structure
- Patent number 6,033,919
- Issue date Mar 7, 2000
- Texas Instruments Incorporated
- Bruce Gnade
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sorbent-based fluid storage and dispensing vessel with replaceable...
- Patent number 6,019,823
- Issue date Feb 1, 2000
- Advanced Technology Materials, Inc.
- Michael A. Tischler
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Chemical mechanical polishing of FeRAM capacitors
- Patent number 5,976,928
- Issue date Nov 2, 1999
- Advanced Technology Materials, Inc.
- Peter S. Kirlin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bulk storage and dispensing system for fluids
- Patent number 5,961,697
- Issue date Oct 5, 1999
- Advanced Technology Materials, Inc.
- James V. McManus
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Method of fabricating a ferrolelectric capacitor with a graded barr...
- Patent number 5,923,970
- Issue date Jul 13, 1999
- Advanced Technology Materials, Inc.
- Peter S. Kirlin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Growth of BaSrTiO.sub.3 using polyamine-based precursors
- Patent number 5,919,522
- Issue date Jul 6, 1999
- Advanced Technology Materials, Inc.
- Thomas H. Baum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal complex source reagents for chemical vapor deposition
- Patent number 5,840,897
- Issue date Nov 24, 1998
- Advanced Technology Materials, Inc.
- Peter S. Kirlin
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Precursor compositions for chemical vapor deposition, and ligand ex...
- Patent number 5,820,664
- Issue date Oct 13, 1998
- Advanced Technology Materials, Inc.
- Robin A. Gardiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Platinum source compositions for chemical vapor deposition of platinum
- Patent number 5,783,716
- Issue date Jul 21, 1998
- Advanced Technology Materials, Inc.
- Thomas H. Baum
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Source reagent liquid delivery apparatus, and chemical vapor deposi...
- Patent number 5,711,816
- Issue date Jan 27, 1998
- Advanced Technolgy Materials, Inc.
- Peter S. Kirlin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method for refractory materials
- Patent number 5,705,443
- Issue date Jan 6, 1998
- Advanced Technology Materials, Inc.
- Gregory Stauf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tantalum and niobium reagents useful in chemical vapor deposition p...
- Patent number 5,679,815
- Issue date Oct 21, 1997
- Advanced Technology Materials, Inc.
- Peter S. Kirlin
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Chemical vapor deposition of tantalum- or niobium-containing coatings
- Patent number 5,677,002
- Issue date Oct 14, 1997
- Advanced Technology Materials
- Peter S. Kirlin
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
High-dielectric-constant material electrodes comprising thin platin...
- Patent number 5,581,436
- Issue date Dec 3, 1996
- Texas Instruments Incorporated
- Scott R. Summerfelt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-dielectric-constant material electrodes comprising thin platin...
- Patent number 5,576,928
- Issue date Nov 19, 1996
- Texas Instruments Incorporated
- Scott R. Summerfelt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-dielectric-constant material electrodes comprising thin platin...
- Patent number 5,566,045
- Issue date Oct 15, 1996
- Texas Instruments, Inc.
- Scott R. Summerfelt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for flash vaporization delivery of reagents
- Patent number 5,536,323
- Issue date Jul 16, 1996
- Advanced Technology Materials, Inc.
- Peter S. Kirlin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal complex source reagents for MOCVD
- Patent number 5,453,494
- Issue date Sep 26, 1995
- Advanced Technology Materials, Inc.
- Peter S. Kirlin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SOURCE REAGENT COMPOSITIONS AND METHOD FOR FORMING METAL FILMS ON A...
- Publication number 20110171382
- Publication date Jul 14, 2011
- Advanced Technology Materials, Inc.
- Robin A. Gardiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Isotropic dry cleaning process for noble metal integrated circuit s...
- Publication number 20020011463
- Publication date Jan 31, 2002
- Advanced Technology Materials, Inc.
- Peter C. Van Buskirk
- C07 - ORGANIC CHEMISTRY
Information Patent Application
Plasma-assisted dry etching of noble metal-based materials
- Publication number 20010024679
- Publication date Sep 27, 2001
- Advanced Technology Materials Inc.
- Thomas H. Baum
- C07 - ORGANIC CHEMISTRY

Peter R. Kirlin

Person

Patents Grantslast 30 patents

Source reagent compositions and method for forming metal films on a...

Source reagent compositions and method for forming metal films on a...

Plasma-assisted dry etching of noble metal-based materials

Isotropic dry cleaning process for noble metal integrated circuit s...

Diffusion barriers between noble metal electrodes and metallization...

Isotropic dry cleaning process for noble metal integrated circuit s...

Apparatus and process for manufacturing semiconductor devices, prod...

Platinum source compositions for chemical vapor deposition of platinum

Sorbent-based gas storage and delivery system for dispensing of hig...

Metal complex source reagents for chemical vapor deposition

Method of forming metal films on a substrate by chemical vapor depo...

Ferroelectric capacitor and integrated circuit device comprising same

Method of forming sidewall capacitance structure

Sorbent-based fluid storage and dispensing vessel with replaceable...

Chemical mechanical polishing of FeRAM capacitors

Bulk storage and dispensing system for fluids

Method of fabricating a ferrolelectric capacitor with a graded barr...

Growth of BaSrTiO.sub.3 using polyamine-based precursors

Metal complex source reagents for chemical vapor deposition

Precursor compositions for chemical vapor deposition, and ligand ex...

Platinum source compositions for chemical vapor deposition of platinum

Source reagent liquid delivery apparatus, and chemical vapor deposi...

Etching method for refractory materials

Tantalum and niobium reagents useful in chemical vapor deposition p...

Chemical vapor deposition of tantalum- or niobium-containing coatings

High-dielectric-constant material electrodes comprising thin platin...

High-dielectric-constant material electrodes comprising thin platin...

High-dielectric-constant material electrodes comprising thin platin...

Apparatus for flash vaporization delivery of reagents

Metal complex source reagents for MOCVD

Patents Applicationslast 30 patents

SOURCE REAGENT COMPOSITIONS AND METHOD FOR FORMING METAL FILMS ON A...

Isotropic dry cleaning process for noble metal integrated circuit s...

Plasma-assisted dry etching of noble metal-based materials