Petra Spies

Person

Mainz, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for examining a beam of charged particles
- Patent number 11,961,705
- Issue date Apr 16, 2024
- Carl Zeiss SMT GmbH
- Daniel Rhinow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing a substrate with a focused part...
- Patent number 9,721,754
- Issue date Aug 1, 2017
- Carl Zeiss SMT GmbH
- Tristan Bret
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for electron beam induced etching
- Patent number 9,023,666
- Issue date May 5, 2015
- Carl Zeiss SMS GmbH
- Nicole Auth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for electron beam induced etching of layers contaminated wit...
- Patent number 8,632,687
- Issue date Jan 21, 2014
- Carl Zeiss SMS GmbH
- Nicole Auth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for removing a material from a sample
- Patent number 8,623,230
- Issue date Jan 7, 2014
- Carl Zeiss SMS GmbH
- Nicole Auth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for electron beam induced deposition of conductive material
- Patent number 8,318,593
- Issue date Nov 27, 2012
- Carl Zeiss SMS GmbH
- Nicole Auth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for high-resolution processing of thin layers using electron...
- Patent number 7,786,403
- Issue date Aug 31, 2010
- Nawo Tec GmbH
- Hans Koops
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR ETCHING A LITHOGRAPHY MASK
- Publication number 20230185180
- Publication date Jun 15, 2023
- Carl Zeiss SMT GMBH
- Fan Tu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR EXAMINING A BEAM OF CHARGED PARTICLES
- Publication number 20210110996
- Publication date Apr 15, 2021
- Carl Zeiss SMT GMBH
- Daniel Rhinow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROTECTING A SUBSTRATE DURING PROCESSING B...
- Publication number 20140255831
- Publication date Sep 11, 2014
- Thorsten Hofmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE WITH A FOCUSED PART...
- Publication number 20120273458
- Publication date Nov 1, 2012
- Tristan Bret
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR ELECTRON BEAM INDUCED ETCHING
- Publication number 20110183444
- Publication date Jul 28, 2011
- CARL ZEISS SMS GMBH
- Nicole Auth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ELECTRON BEAM INDUCED DEPOSITION OF CONDUCTIVE MATERIAL
- Publication number 20110183517
- Publication date Jul 28, 2011
- CARL ZEISS SMS GMBH
- Nicole Auth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR ELECTRON BEAM INDUCED ETCHING OF LAYERS CONTAMINATED WIT...
- Publication number 20110183523
- Publication date Jul 28, 2011
- CARL ZEISS SMS GMBH
- Nicole Auth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR REMOVING A MATERIAL FROM A SAMPLE
- Publication number 20100282596
- Publication date Nov 11, 2010
- NAWOTEC GMBH
- Nicole Auth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for high-resolution processing of thin layers using electron...
- Publication number 20050087514
- Publication date Apr 28, 2005
- Hans Koops
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Petra Spies

Person

Patents Grantslast 30 patents

Method and apparatus for examining a beam of charged particles

Method and apparatus for processing a substrate with a focused part...

Method for electron beam induced etching

Method for electron beam induced etching of layers contaminated wit...

Methods and systems for removing a material from a sample

Method for electron beam induced deposition of conductive material

Method for high-resolution processing of thin layers using electron...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR ETCHING A LITHOGRAPHY MASK

METHOD AND APPARATUS FOR EXAMINING A BEAM OF CHARGED PARTICLES

METHOD AND APPARATUS FOR PROTECTING A SUBSTRATE DURING PROCESSING B...

METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE WITH A FOCUSED PART...

METHOD FOR ELECTRON BEAM INDUCED ETCHING

METHOD FOR ELECTRON BEAM INDUCED DEPOSITION OF CONDUCTIVE MATERIAL

METHOD FOR ELECTRON BEAM INDUCED ETCHING OF LAYERS CONTAMINATED WIT...

METHODS AND SYSTEMS FOR REMOVING A MATERIAL FROM A SAMPLE

Method for high-resolution processing of thin layers using electron...