Philip A. Kraus

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Symmetric plasma source to generate pie-shaped treatment
- Patent number 12,142,458
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monolithic modular microwave source with integrated temperature con...
- Patent number 12,144,090
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- James Carducci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
PEALD nitride films
- Patent number 12,119,221
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Smart camera substrate
- Patent number 12,114,083
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Upendra Ummethala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma enhanced CVD with periodic high voltage bias
- Patent number 12,094,707
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Kelvin Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modular microwave source with multiple metal housings
- Patent number 12,033,835
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Philip Allan Kraus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single process volume to perform high-pressure and low-pressure pro...
- Patent number 12,012,652
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Kelvin Chan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensors and system for in-situ edge ring erosion monitor
- Patent number 12,009,236
- Issue date Jun 11, 2024
- Applied Materials, Inc.
- Yaoling Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular high-frequency source
- Patent number 12,002,654
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitive sensor for monitoring gas concentration
- Patent number 11,959,868
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Xiaopu Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming silicon nitride films using microwave plasma
- Patent number 11,955,331
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hot showerhead
- Patent number 11,946,140
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monolithic modular microwave source with integrated process gas dis...
- Patent number 11,881,384
- Issue date Jan 23, 2024
- Applied Materials, Inc.
- James Carducci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
MEMS resonator sensor substrate for plasma, temperature, stress, or...
- Patent number 11,874,189
- Issue date Jan 16, 2024
- Applied Materials, Inc.
- Chuang-Chia Lin
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
PEALD titanium nitride with direct microwave plasma
- Patent number 11,823,870
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective oxidation and simplified pre-clean
- Patent number 11,776,805
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Bencherki Mebarki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Smart camera substrate
- Patent number 11,736,818
- Issue date Aug 22, 2023
- Applied Materials, Inc.
- Upendra Ummethala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Creating ion energy distribution functions (IEDF)
- Patent number 11,728,124
- Issue date Aug 15, 2023
- Applied Materials, Inc.
- Leonid Dorf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular microwave source with local lorentz force
- Patent number 11,721,532
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Philip Allan Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pore formation in a substrate
- Patent number 11,691,872
- Issue date Jul 4, 2023
- Applied Materials, Inc.
- Philip Allan Kraus
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Modular microwave source with embedded ground surface
- Patent number 11,670,489
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Joseph F. AuBuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PEALD nitride films
- Patent number 11,626,281
- Issue date Apr 11, 2023
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diagnostic disc with a high vacuum and temperature tolerant power s...
- Patent number 11,589,474
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Phillip A. Criminale
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Capacitive sensor for chamber condition monitoring
- Patent number 11,581,206
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Yaoling Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monolithic modular microwave source with integrated temperature con...
- Patent number 11,564,292
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- James Carducci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Directional selective junction clean with field polymer protections
- Patent number 11,562,909
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Yu Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonant process monitor
- Patent number 11,551,905
- Issue date Jan 10, 2023
- Intel Corporation
- Yaoling Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal repeatability and in-situ showerhead temperature monitoring
- Patent number 11,508,558
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Timothy Joseph Franklin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular high-frequency source with integrated gas distribution
- Patent number 11,501,955
- Issue date Nov 15, 2022
- Applied Materials, Inc.
- Hanh Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal break for high-frequency antennae
- Patent number 11,488,796
- Issue date Nov 1, 2022
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS OF SELECTIVELY ETCHING SILICON NITRIDE
- Publication number 20240420962
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Doreen Wei Ying Yong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PLASMA APPLICATOR WITH REPLACEABLE DIELECTRIC PLATE
- Publication number 20240379331
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SMART CAMERA SUBSTRATE
- Publication number 20240365013
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Upendra Ummethala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSORS AND SYSTEM FOR IN-SITU EDGE RING EROSION MONITOR
- Publication number 20240321610
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Yaoling PAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR HIGH-FREQUENCY SOURCE
- Publication number 20240282554
- Publication date Aug 22, 2024
- Applied Materials, Inc.
- Thai Cheng CHUA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAPACITIVE SENSOR FOR MONITORING GAS CONCENTRATION
- Publication number 20240219337
- Publication date Jul 4, 2024
- Applied Materials, Inc.
- Xiaopu Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED PROCESS GAS DIS...
- Publication number 20240186118
- Publication date Jun 6, 2024
- Applied Materials, Inc.
- JAMES CARDUCCI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR MICROWAVE SOURCE WITH INTEGRATED OPTICAL SENSORS
- Publication number 20240153795
- Publication date May 9, 2024
- Applied Materials, Inc.
- Adam Fischbach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ISOTROPIC SILICON NITRIDE REMOVAL
- Publication number 20240120210
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Mikhail Korolik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS RESONATOR SENSOR SUBSTRATE FOR PLASMA, TEMPERATURE, STRESS, OR...
- Publication number 20240102876
- Publication date Mar 28, 2024
- Applied Materials, Inc.
- Chuang-Chia Lin
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
BACKSIDE DEPOSITION FOR WAFER BOW MANAGEMENT
- Publication number 20240096605
- Publication date Mar 21, 2024
- Applied Materials, Inc.
- Arun Kumar Kotrappa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLOSED-LOOP CONTROL OF PLASMA SOURCE VIA FEEDBACK FROM LASER ABSORP...
- Publication number 20230411129
- Publication date Dec 21, 2023
- Applied Materials, Inc.
- Abdullah Zafar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTION CELL FOR SPECIES SENSING
- Publication number 20230411130
- Publication date Dec 21, 2023
- Applied Materials, Inc.
- Abdullah Zafar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA CHAMBER WITH GAS CROSS-FLOW, MICROWAVE RESONATORS AND A ROTA...
- Publication number 20230395356
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Anantha Subramani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Creating Ion Energy Distribution Functions (IEDF)
- Publication number 20230352264
- Publication date Nov 2, 2023
- Applied Materials, Inc.
- LEONID DORF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SMART CAMERA SUBSTRATE
- Publication number 20230345137
- Publication date Oct 26, 2023
- Applied Materials, Inc.
- Upendra Ummethala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEALD TITANIUM NITRIDE WITH DIRECT MICROWAVE PLASMA
- Publication number 20230253186
- Publication date Aug 10, 2023
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEALD Nitride Films
- Publication number 20230230830
- Publication date Jul 20, 2023
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIAGNOSTIC DISC WITH A HIGH VACUUM AND TEMPERATURE TOLERANT POWER S...
- Publication number 20230199992
- Publication date Jun 22, 2023
- Applied Materials, Inc.
- Phillip A. Criminale
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED TEMPERATURE CON...
- Publication number 20230135935
- Publication date May 4, 2023
- Applied Materials, Inc.
- James Carducci
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LOW TEMPERATURE SELECTIVE ETCHING OF SILICON NITRIDE USING MICROWAV...
- Publication number 20230109912
- Publication date Apr 13, 2023
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONOLITHIC MODULAR HIGH-FREQUENCY PLASMA SOURCE
- Publication number 20230026546
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS RESONATOR SENSOR SUBSTRATE FOR PLASMA, TEMPERATURE, STRESS, OR...
- Publication number 20230003598
- Publication date Jan 5, 2023
- Applied Materials, Inc.
- Chuang-Chia Lin
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Apparatus For Single Chamber Deposition And Etch
- Publication number 20220389571
- Publication date Dec 8, 2022
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR MICROWAVE PLASMA SOURCE
- Publication number 20220344131
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- Philip Allan KRAUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIRECTIONAL SELECTIVE JUNCTION CLEAN WITH FIELD POLYMER PROTECTIONS
- Publication number 20220336223
- Publication date Oct 20, 2022
- Applied Materials, Inc.
- Yu Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220328285
- Publication date Oct 13, 2022
- Abdullah ZAFAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE MODULAR HIGH-FREQUENCY SOURCE
- Publication number 20220319812
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Hanh NGUYEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOT SHOWERHEAD
- Publication number 20220307131
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SMART CAMERA SUBSTRATE
- Publication number 20220272278
- Publication date Aug 25, 2022
- Applied Materials, Inc.
- Upendra Ummethala
- H01 - BASIC ELECTRIC ELEMENTS

Philip A. Kraus

Person

Patents Grantslast 30 patents

Symmetric plasma source to generate pie-shaped treatment

Monolithic modular microwave source with integrated temperature con...

PEALD nitride films

Smart camera substrate

Plasma enhanced CVD with periodic high voltage bias

Modular microwave source with multiple metal housings

Single process volume to perform high-pressure and low-pressure pro...

Sensors and system for in-situ edge ring erosion monitor

Modular high-frequency source

Capacitive sensor for monitoring gas concentration

Method of forming silicon nitride films using microwave plasma

Hot showerhead

Monolithic modular microwave source with integrated process gas dis...

MEMS resonator sensor substrate for plasma, temperature, stress, or...

PEALD titanium nitride with direct microwave plasma

Selective oxidation and simplified pre-clean

Smart camera substrate

Creating ion energy distribution functions (IEDF)

Modular microwave source with local lorentz force

Pore formation in a substrate

Modular microwave source with embedded ground surface

PEALD nitride films

Diagnostic disc with a high vacuum and temperature tolerant power s...

Capacitive sensor for chamber condition monitoring

Monolithic modular microwave source with integrated temperature con...

Directional selective junction clean with field polymer protections

Resonant process monitor

Thermal repeatability and in-situ showerhead temperature monitoring

Modular high-frequency source with integrated gas distribution

Thermal break for high-frequency antennae

Patents Applicationslast 30 patents

METHODS OF SELECTIVELY ETCHING SILICON NITRIDE

MICROWAVE PLASMA APPLICATOR WITH REPLACEABLE DIELECTRIC PLATE

SMART CAMERA SUBSTRATE

SENSORS AND SYSTEM FOR IN-SITU EDGE RING EROSION MONITOR

MODULAR HIGH-FREQUENCY SOURCE

CAPACITIVE SENSOR FOR MONITORING GAS CONCENTRATION

MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED PROCESS GAS DIS...

MODULAR MICROWAVE SOURCE WITH INTEGRATED OPTICAL SENSORS

ISOTROPIC SILICON NITRIDE REMOVAL

MEMS RESONATOR SENSOR SUBSTRATE FOR PLASMA, TEMPERATURE, STRESS, OR...

BACKSIDE DEPOSITION FOR WAFER BOW MANAGEMENT

CLOSED-LOOP CONTROL OF PLASMA SOURCE VIA FEEDBACK FROM LASER ABSORP...

REACTION CELL FOR SPECIES SENSING

PLASMA CHAMBER WITH GAS CROSS-FLOW, MICROWAVE RESONATORS AND A ROTA...

Creating Ion Energy Distribution Functions (IEDF)

SMART CAMERA SUBSTRATE

PEALD TITANIUM NITRIDE WITH DIRECT MICROWAVE PLASMA

PEALD Nitride Films

DIAGNOSTIC DISC WITH A HIGH VACUUM AND TEMPERATURE TOLERANT POWER S...

MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED TEMPERATURE CON...

LOW TEMPERATURE SELECTIVE ETCHING OF SILICON NITRIDE USING MICROWAV...

MONOLITHIC MODULAR HIGH-FREQUENCY PLASMA SOURCE

MEMS RESONATOR SENSOR SUBSTRATE FOR PLASMA, TEMPERATURE, STRESS, OR...

Apparatus For Single Chamber Deposition And Etch

MODULAR MICROWAVE PLASMA SOURCE

DIRECTIONAL SELECTIVE JUNCTION CLEAN WITH FIELD POLYMER PROTECTIONS

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

REMOTE MODULAR HIGH-FREQUENCY SOURCE

HOT SHOWERHEAD

SMART CAMERA SUBSTRATE