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Philip J. Ring
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Beverly, MA, US
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last 30 patents
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Patent Grant
Deposition reduction system for an ion implanter
Patent number
7,629,597
Issue date
Dec 8, 2009
Axcelis Technologies, Inc.
Teng-Chao Tao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam monitoring in an ion implanter using an imaging device
Patent number
7,423,277
Issue date
Sep 9, 2008
Axcelis Technologies, Inc.
Alexander S. Perel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implanter with contaminant collecting surface
Patent number
7,358,508
Issue date
Apr 15, 2008
Axcelis Technologies, Inc.
Philip J. Ring
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ cleaning of beam defining apertures in an ion implanter
Patent number
6,992,311
Issue date
Jan 31, 2006
Axcelis Technologies, Inc.
Philip J. Ring
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Toroidal filament for plasma generation
Patent number
6,204,508
Issue date
Mar 20, 2001
Axcelis Technologies, Inc.
Jiong Chen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Deposition reduction system for an ion implanter
Publication number
20080073576
Publication date
Mar 27, 2008
Axcelis Technologies Inc.
Teng-Chao Tao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion beam monitoring in an ion implanter using an imaging device
Publication number
20080061250
Publication date
Mar 13, 2008
Axcelis Technologies, Inc.
Alexander S. Perel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion implanter with contaminant collecting surface
Publication number
20070102652
Publication date
May 10, 2007
Axcelis Technologies, Inc.
Philip J. Ring
H01 - BASIC ELECTRIC ELEMENTS