Philip Sansone

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Atkinson, NH, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for bilayer photoresist dry development
- Patent number 7,465,673
- Issue date Dec 16, 2008
- Tokyo Electron Limited
- Yoshiki Igarashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for bilayer photoresist dry development
- Publication number 20040185380
- Publication date Sep 23, 2004
- TOKYO ELECTRON LIMITED
- Yoshiki Igarashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY