Phillip Walsh

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
System and method for high intensity small spot optical metrology
- Patent number 7,349,103
- Issue date Mar 25, 2008
- n & k Technology, Inc.
- Mehdi Balooch
- G01 - MEASURING TESTING
Information Patent Grant
Phase shift measurement using transmittance spectra
- Patent number 7,253,909
- Issue date Aug 7, 2007
- n & k Technology, Inc.
- Guoguang Li
- G01 - MEASURING TESTING
Information Patent Grant
Optical determination of pattern feature parameters using a scalar...
- Patent number 7,212,293
- Issue date May 1, 2007
- n & k Technology, Inc.
- Guoguang Li
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for examining features on semi-transparent and...
- Patent number 6,891,628
- Issue date May 10, 2005
- n & k Technology, Inc.
- Guoguang Li
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR EXAMINING FEATURES ON SEMI-TRANSPARENT AND...
- Publication number 20040263850
- Publication date Dec 30, 2004
- Guoguang Li
- G01 - MEASURING TESTING