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Pragna Nannapaneni

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  • San Jose, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Tungsten deposition
    • Patent number 12,077,858
    • Issue date Sep 3, 2024
    • Lam Research Corporation
    • Pragna Nannapaneni
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Rapid flush purging during atomic layer deposition
    • Patent number 12,060,639
    • Issue date Aug 13, 2024
    • Lam Research Corporation
    • Pragna Nannapaneni
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    TUNGSTEN DEPOSITION
    • Publication number 20220364232
    • Publication date Nov 17, 2022
    • LAM RESEARCH CORPORATION
    • Pragna NANNAPANENI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    RAPID FLUSH PURGING DURING ATOMIC LAYER DEPOSITION
    • Publication number 20220186370
    • Publication date Jun 16, 2022
    • LAM RESEARCH CORPORATION
    • Pragna Nannapaneni
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...