Pramit MANNA

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
High pressure oxidation of metal films
- Patent number 12,173,413
- Issue date Dec 24, 2024
- Applied Materials, Inc.
- Amrita B. Mullick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of using dual frequency RF power in a process chamber
- Patent number 12,106,958
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Anup Kumar Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flowable film curing using H2 plasma
- Patent number 12,054,827
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Shishi Jiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High density carbon films for patterning applications
- Patent number 11,842,897
- Issue date Dec 12, 2023
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carbon hard masks for patterning applications and methods related t...
- Patent number 11,784,042
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of using dual frequency RF power in a process chamber
- Patent number 11,721,545
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Anup Kumar Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming hardmasks
- Patent number 11,699,585
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Jui-Yuan Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High bias deposition of high quality gapfill
- Patent number 11,676,858
- Issue date Jun 13, 2023
- Applied Materials, Inc.
- Samuel E. Gottheim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for producing high-density carbon films for hardmasks and o...
- Patent number 11,664,226
- Issue date May 30, 2023
- Applied Materials, Inc.
- Jui-Yuan Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for producing high-density, nitrogen-doped carbon films for...
- Patent number 11,664,214
- Issue date May 30, 2023
- Applied Materials, Inc.
- Jui-Yuan Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multicolor approach to DRAM STI active cut patterning
- Patent number 11,638,374
- Issue date Apr 25, 2023
- Applied Materials, Inc.
- Tejinder Singh
Information Patent Grant
Pulsed plasma (DC/RF) deposition of high quality C films for patter...
- Patent number 11,603,591
- Issue date Mar 14, 2023
- Applied Materials Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD tungsten containing hardmask films and methods of making
- Patent number 11,594,415
- Issue date Feb 28, 2023
- Applied Materials, Inc.
- Susmit Singha Roy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic housing systems
- Patent number 11,587,764
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low deposition rates for flowable PECVD
- Patent number 11,578,409
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Shishi Jiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing chamber
- Patent number 11,560,626
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Timothy Joseph Franklin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tuneable uniformity control utilizing rotational magnetic housing
- Patent number 11,557,466
- Issue date Jan 17, 2023
- Applied Materials, Inc.
- Samuel E. Gottheim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ high power implant to relieve stress of a thin film
- Patent number 11,557,478
- Issue date Jan 17, 2023
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition of flowable silicon-containing films
- Patent number 11,515,149
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Lakmal C. Kalutarage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3D NAND etch
- Patent number 11,515,170
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Shishi Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for gapfill in high aspect ratio structures
- Patent number 11,488,856
- Issue date Nov 1, 2022
- Applied Materials, Inc.
- Pramit Manna
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbon hard masks for patterning applications and methods related t...
- Patent number 11,469,097
- Issue date Oct 11, 2022
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature high-quality dielectric films
- Patent number 11,430,655
- Issue date Aug 30, 2022
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hardmasks and processes for forming hardmasks by plasma-enhanced ch...
- Patent number 11,421,324
- Issue date Aug 23, 2022
- Applied Materials, Inc.
- Jui-Yuan Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diamond-like carbon film
- Patent number 11,332,376
- Issue date May 17, 2022
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multicolor approach to DRAM STI active cut patterning
- Patent number 11,335,690
- Issue date May 17, 2022
- Applied Materials, Inc.
- Tejinder Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modulating film properties by optimizing plasma coupling materials
- Patent number 11,270,905
- Issue date Mar 8, 2022
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bottom-up growth of silicon oxide and silicon nitride using sequent...
- Patent number 11,236,418
- Issue date Feb 1, 2022
- Applied Materials, Inc.
- Rui Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film deposition using enhanced diffusion process
- Patent number 11,227,797
- Issue date Jan 18, 2022
- Applied Materials, Inc.
- Shishi Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for manufacturing semiconductor structures us...
- Patent number 11,177,128
- Issue date Nov 16, 2021
- Applied Materials, Inc.
- Pramit Manna
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HIGH DENSITY CARBON FILMS FOR PATTERNING APPLICATIONS
- Publication number 20240087894
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF USING DUAL FREQUENCY RF POWER IN A PROCESS CHAMBER
- Publication number 20230343586
- Publication date Oct 26, 2023
- Applied Materials, Inc.
- Anup Kumar SINGH
- B08 - CLEANING
Information Patent Application
METHODS OF FORMING THERMALLY STABLE CARBON FILM
- Publication number 20230335402
- Publication date Oct 19, 2023
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PULSED PLASMA (DC/RF) DEPOSITION OF HIGH QUALITY C FILMS FOR PATTER...
- Publication number 20230220551
- Publication date Jul 13, 2023
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC HOUSING SYSTEMS
- Publication number 20230154726
- Publication date May 18, 2023
- Applied Materials, Inc.
- Srinivas GANDIKOTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNEABLE UNIFORMITY CONTROL UTILIZING ROTATIONAL MAGNETIC HOUSING
- Publication number 20230139431
- Publication date May 4, 2023
- Applied Materials, Inc.
- Samuel E. GOTTHEIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS, APPARATUS, AND SYSTEMS FOR MAINTAINING FILM MODULUS WITHIN...
- Publication number 20230022359
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- Jui-Yuan HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARBON HARD MASKS FOR PATTERNING APPLICATIONS AND METHODS RELATED T...
- Publication number 20230021761
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multicolor Approach To DRAM STI Active Cut Patterning
- Publication number 20220238531
- Publication date Jul 28, 2022
- Applied Materials, Inc.
- Tejinder Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HARDMASKS AND PROCESSES FOR FORMING HARDMASKS BY PLASMA ENHANCED CH...
- Publication number 20220119953
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Jui-Yuan HSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING HARDMASKS
- Publication number 20220122835
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Jui-Yuan HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF USING DUAL FREQUENCY RF POWER IN A PROCESS CHAMBER
- Publication number 20220102141
- Publication date Mar 31, 2022
- Applied Materials, Inc.
- Anup Kumar SINGH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU HIGH POWER IMPLANT TO RELIEVE STRESS OF A THIN FILM
- Publication number 20220037154
- Publication date Feb 3, 2022
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR PRODUCING HIGH-DENSITY DOPED-CARBON FILMS FOR HARDMASK...
- Publication number 20210407801
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR PRODUCING HIGH-DENSITY CARBON FILMS FOR HARDMASKS AND O...
- Publication number 20210407802
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Jui-Yuan HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Pressure Oxidation of Metal Films
- Publication number 20210404046
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Amrita B. Mullick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR PRODUCING HIGH-DENSITY, NITROGEN-DOPED CARBON FILMS FOR...
- Publication number 20210407791
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Jui-Yuan HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Bias Deposition of High Quality Gapfill
- Publication number 20210327752
- Publication date Oct 21, 2021
- Applied Materials, Inc.
- Samuel E. Gottheim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONFORMAL HERMETIC FILM DEPOSITION BY CVD
- Publication number 20210210339
- Publication date Jul 8, 2021
- Applied Materials, Inc.
- Pramit MANNA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multicolor Approach To DRAM STI Active Cut Patterning
- Publication number 20210134807
- Publication date May 6, 2021
- Applied Materials, Inc.
- Tejinder Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D NAND Etch
- Publication number 20210118691
- Publication date Apr 22, 2021
- Applied Materials, Inc.
- Shishi Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNEABLE UNIFORMITY CONTROL UTILIZING ROTATIONAL MAGNETIC HOUSING
- Publication number 20210050189
- Publication date Feb 18, 2021
- Applied Materials, Inc.
- Samuel E. GOTTHEIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low Temperature High-Quality Dielectric Films
- Publication number 20210043450
- Publication date Feb 11, 2021
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PULSED PLASMA (DC/RF) DEPOSITION OF HIGH QUALITY C FILMS FOR PATTER...
- Publication number 20210040618
- Publication date Feb 11, 2021
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARBON HARD MASKS FOR PATTERNING APPLICATIONS AND METHODS RELATED T...
- Publication number 20210043449
- Publication date Feb 11, 2021
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods For Gapfill In High Aspect Ratio Structures
- Publication number 20210028055
- Publication date Jan 28, 2021
- Applied Materials, Inc.
- Pramit Manna
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOWABLE FILM CURING USING H2 PLASMA
- Publication number 20210025058
- Publication date Jan 28, 2021
- Applied Materials, Inc.
- Shishi JIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of Forming Tungsten Pillars
- Publication number 20210013038
- Publication date Jan 14, 2021
- Applied Materials, Inc.
- Abhijit Basu Mallick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULATING FILM PROPERTIES BY OPTIMIZING PLASMA COUPLING MATERIALS
- Publication number 20210005500
- Publication date Jan 7, 2021
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR MANUFACTURING SEMICONDUCTOR STRUCTURES US...
- Publication number 20200388486
- Publication date Dec 10, 2020
- Applied Materials, Inc.
- Pramit MANNA
- H01 - BASIC ELECTRIC ELEMENTS

Pramit MANNA

Person

Patents Grantslast 30 patents

High pressure oxidation of metal films

Method of using dual frequency RF power in a process chamber

Flowable film curing using H2 plasma

High density carbon films for patterning applications

Carbon hard masks for patterning applications and methods related t...

Method of using dual frequency RF power in a process chamber

Methods of forming hardmasks

High bias deposition of high quality gapfill

Methods for producing high-density carbon films for hardmasks and o...

Methods for producing high-density, nitrogen-doped carbon films for...

Multicolor approach to DRAM STI active cut patterning

Pulsed plasma (DC/RF) deposition of high quality C films for patter...

PECVD tungsten containing hardmask films and methods of making

Magnetic housing systems

Low deposition rates for flowable PECVD

Substrate processing chamber

Tuneable uniformity control utilizing rotational magnetic housing

In-situ high power implant to relieve stress of a thin film

Deposition of flowable silicon-containing films

3D NAND etch

Methods for gapfill in high aspect ratio structures

Carbon hard masks for patterning applications and methods related t...

Low temperature high-quality dielectric films

Hardmasks and processes for forming hardmasks by plasma-enhanced ch...

Diamond-like carbon film

Multicolor approach to DRAM STI active cut patterning

Modulating film properties by optimizing plasma coupling materials

Bottom-up growth of silicon oxide and silicon nitride using sequent...

Film deposition using enhanced diffusion process

Apparatus and methods for manufacturing semiconductor structures us...

Patents Applicationslast 30 patents

HIGH DENSITY CARBON FILMS FOR PATTERNING APPLICATIONS

METHOD OF USING DUAL FREQUENCY RF POWER IN A PROCESS CHAMBER

METHODS OF FORMING THERMALLY STABLE CARBON FILM

PULSED PLASMA (DC/RF) DEPOSITION OF HIGH QUALITY C FILMS FOR PATTER...

MAGNETIC HOUSING SYSTEMS

TUNEABLE UNIFORMITY CONTROL UTILIZING ROTATIONAL MAGNETIC HOUSING

METHODS, APPARATUS, AND SYSTEMS FOR MAINTAINING FILM MODULUS WITHIN...

CARBON HARD MASKS FOR PATTERNING APPLICATIONS AND METHODS RELATED T...

Multicolor Approach To DRAM STI Active Cut Patterning

HARDMASKS AND PROCESSES FOR FORMING HARDMASKS BY PLASMA ENHANCED CH...

METHODS OF FORMING HARDMASKS

METHOD OF USING DUAL FREQUENCY RF POWER IN A PROCESS CHAMBER

IN-SITU HIGH POWER IMPLANT TO RELIEVE STRESS OF A THIN FILM

METHODS FOR PRODUCING HIGH-DENSITY DOPED-CARBON FILMS FOR HARDMASK...

METHODS FOR PRODUCING HIGH-DENSITY CARBON FILMS FOR HARDMASKS AND O...

High Pressure Oxidation of Metal Films

METHODS FOR PRODUCING HIGH-DENSITY, NITROGEN-DOPED CARBON FILMS FOR...

High Bias Deposition of High Quality Gapfill

CONFORMAL HERMETIC FILM DEPOSITION BY CVD

Multicolor Approach To DRAM STI Active Cut Patterning

3D NAND Etch

TUNEABLE UNIFORMITY CONTROL UTILIZING ROTATIONAL MAGNETIC HOUSING

Low Temperature High-Quality Dielectric Films

PULSED PLASMA (DC/RF) DEPOSITION OF HIGH QUALITY C FILMS FOR PATTER...

CARBON HARD MASKS FOR PATTERNING APPLICATIONS AND METHODS RELATED T...

Methods For Gapfill In High Aspect Ratio Structures

FLOWABLE FILM CURING USING H2 PLASMA

Methods of Forming Tungsten Pillars

MODULATING FILM PROPERTIES BY OPTIMIZING PLASMA COUPLING MATERIALS

APPARATUS AND METHODS FOR MANUFACTURING SEMICONDUCTOR STRUCTURES US...