Prashant Kumar KULSHRESHTHA

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Dual RF for controllable film deposition
- Patent number 12,191,115
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma-enhanced chemical vapor deposition of carbon hard-mask
- Patent number 12,136,549
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Byung Seok Kwon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Highly etch selective amorphous carbon film
- Patent number 12,112,949
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Rajesh Prasad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chucking process
- Patent number 12,100,609
- Issue date Sep 24, 2024
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reduced hydrogen deposition processes
- Patent number 12,027,366
- Issue date Jul 2, 2024
- Applied Materials, Inc.
- Xiaoquan Min
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Highly etch selective amorphous carbon film
- Patent number 12,014,927
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Rajesh Prasad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal for substrate processing chambers
- Patent number 12,000,048
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heated pedestal design for improved heat transfer and temperature u...
- Patent number 11,830,706
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reduced defect deposition processes
- Patent number 11,821,082
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Xiaoquan Min
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Faceplate having blocked center hole
- Patent number 11,814,716
- Issue date Nov 14, 2023
- Applied Materials, Inc.
- Fang Ruan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Faceplate with edge flow control
- Patent number 11,810,764
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for minimizing substrate backside damage
- Patent number 11,756,819
- Issue date Sep 12, 2023
- Applied Materials, Inc.
- Liangfa Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra-high modulus and etch selectivity boron-carbon hardmask films
- Patent number 11,728,168
- Issue date Aug 15, 2023
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck design with improved chucking and arcing perfor...
- Patent number 11,682,574
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Abdul Aziz Khaja
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clean processes for boron carbon film deposition
- Patent number 11,613,808
- Issue date Mar 28, 2023
- Applied Materials, Inc.
- Jiheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Targeted heat control systems
- Patent number 11,600,470
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal for substrate processing chambers
- Patent number 11,584,994
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of reducing chamber residues
- Patent number 11,560,623
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Liangfa Hu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Highly etch selective amorphous carbon film
- Patent number 11,469,107
- Issue date Oct 11, 2022
- Applied Materials, Inc.
- Rajesh Prasad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing systems and methods to control process drift
- Patent number 11,430,641
- Issue date Aug 30, 2022
- Applied Materials, Inc.
- Vivien Chua
- B08 - CLEANING
Information Patent Grant
Nitrogen-doped carbon hardmask films
- Patent number 11,322,352
- Issue date May 3, 2022
- Applied Materials, Inc.
- Xiaoquan Min
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Loadlock integrated bevel etcher system
- Patent number 11,031,262
- Issue date Jun 8, 2021
- Applied Materials, Inc.
- Saptarshi Basu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra-high modulus and etch selectivity boron carbon hardmask films
- Patent number 10,971,364
- Issue date Apr 6, 2021
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of metal silicide layers on substrates and chamber compo...
- Patent number 10,950,445
- Issue date Mar 16, 2021
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Graded in-situ charge trapping layers to enable electrostatic chuck...
- Patent number 10,930,475
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective deposition of hardmask
- Patent number 10,923,334
- Issue date Feb 16, 2021
- Applied Materials, Inc.
- Satya Thokachichu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of metal silicide layers on substrates and chamber compo...
- Patent number 10,734,232
- Issue date Aug 4, 2020
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning process for removing boron-carbon residuals in processing...
- Patent number 10,679,830
- Issue date Jun 9, 2020
- Applied Materials, Inc.
- Feng Bi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Loadlock integrated bevel etcher system
- Patent number 10,636,684
- Issue date Apr 28, 2020
- Applied Materials, Inc.
- Saptarshi Basu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thick tungsten hardmask films deposition on high compressive/tensil...
- Patent number 10,504,727
- Issue date Dec 10, 2019
- Applied Materials, Inc.
- Jiarui Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
THROTTLE VALVE AND FORELINE CLEANING USING A MICROWAVE SOURCE
- Publication number 20230390811
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Khokan Chandra Paul
- B08 - CLEANING
Information Patent Application
METHODS AND APPARATUS FOR MINIMIZING SUBSTRATE BACKSIDE DAMAGE
- Publication number 20230386883
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Liangfa HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRA-HIGH MODULUS AND ETCH SELECTIVITY BORON-CARBON HARDMASK FILMS
- Publication number 20230317455
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Prashant Kumar KULSHRESHTHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK DESIGN WITH IMPROVED CHUCKING AND ARCING PERFOR...
- Publication number 20230298922
- Publication date Sep 21, 2023
- Applied Materials, Inc.
- Abdul Aziz KHAJA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEDESTAL FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20230203659
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Sarah Michelle BOBEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF REDUCING CHAMBER RESIDUES
- Publication number 20230151487
- Publication date May 18, 2023
- Applied Materials, Inc.
- Liangfa HU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGHLY ETCH SELECTIVE AMORPHOUS CARBON FILM
- Publication number 20230041963
- Publication date Feb 9, 2023
- Applied Materials, Inc.
- Rajesh PRASAD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGHLY ETCH SELECTIVE AMORPHOUS CARBON FILM
- Publication number 20230029929
- Publication date Feb 2, 2023
- Applied Materials, Inc.
- Rajesh PRASAD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEAN PROCESSES FOR BORON CARBON FILM DEPOSITION
- Publication number 20220127722
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Jiheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FACEPLATE WITH EDGE FLOW CONTROL
- Publication number 20210335574
- Publication date Oct 28, 2021
- Applied Materials, Inc.
- Fang Ruan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NITROGEN-DOPED CARBON HARDMASK FILMS
- Publication number 20210327713
- Publication date Oct 21, 2021
- Applied Materials, Inc.
- Xiaoquan MIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRA-HIGH MODULUS AND ETCH SELECTIVITY BORON-CARBON HARDMASK FILMS
- Publication number 20210225650
- Publication date Jul 22, 2021
- Applied Materials, Inc.
- Prashant Kumar KULSHRESHTHA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGETED HEAT CONTROL SYSTEMS
- Publication number 20210202218
- Publication date Jul 1, 2021
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FACEPLATE HAVING BLOCKED CENTER HOLE
- Publication number 20210156028
- Publication date May 27, 2021
- Applied Materials, Inc.
- Fang Ruan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL RF FOR CONTROLLABLE FILM DEPOSITION
- Publication number 20210159048
- Publication date May 27, 2021
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REDUCED HYDROGEN DEPOSITION PROCESSES
- Publication number 20210143010
- Publication date May 13, 2021
- Applied Materials, Inc.
- Xiaoquan Min
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCED DEFECT DEPOSITION PROCESSES
- Publication number 20210130949
- Publication date May 6, 2021
- Applied Materials, Inc.
- Xiaoquan Min
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF FORMATION OF A METAL HARDMASK IN DEVICE FABR...
- Publication number 20210082696
- Publication date Mar 18, 2021
- Applied Materials, Inc.
- Xiaoquan MIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON HARD-MASK
- Publication number 20210043455
- Publication date Feb 11, 2021
- Applied Materials, Inc.
- Byung Seok KWON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK FOR DAMAGE-FREE SUBSTRATE PROCESSING
- Publication number 20210025056
- Publication date Jan 28, 2021
- Applied Materials, Inc.
- Prashant Kumar KULSHRESHTHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RESOLVING SPONTANEOUS ARCING DURING THICK FILM DEPOSITION OF HIGH T...
- Publication number 20210017645
- Publication date Jan 21, 2021
- Applied Materials, Inc.
- Lu XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR MINIMIZING SUBSTRATE BACKSIDE DAMAGE
- Publication number 20200365441
- Publication date Nov 19, 2020
- Applied Materials, Inc.
- Liangfa HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF REDUCING CHAMBER RESIDUES
- Publication number 20200362457
- Publication date Nov 19, 2020
- Applied Materials, Inc.
- Liangfa HU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGHLY ETCH SELECTIVE AMORPHOUS CARBON FILM
- Publication number 20200357640
- Publication date Nov 12, 2020
- Applied Materials, Inc.
- Rajesh PRASAD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF METAL SILICIDE LAYERS ON SUBSTRATES AND CHAMBER COMPO...
- Publication number 20200357643
- Publication date Nov 12, 2020
- Applied Materials, Inc.
- Prashant Kumar KULSHRESHTHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCKING PROCESS
- Publication number 20200328063
- Publication date Oct 15, 2020
- Applied Materials, Inc.
- Sarah Michelle BOBEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA DENSIFICATION WITHIN A PROCESSING CHAMBER
- Publication number 20200328066
- Publication date Oct 15, 2020
- Applied Materials, Inc.
- Byung Seok KWON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING A SUBSTRATE
- Publication number 20200266064
- Publication date Aug 20, 2020
- Applied Materials, Inc.
- Rajaram NARAYANAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING PROCESS CHAMBER
- Publication number 20200255940
- Publication date Aug 13, 2020
- Applied Materials, Inc.
- Byung Seok KWON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND TOOL FOR ELECTROSTATIC CHUCKING
- Publication number 20200249263
- Publication date Aug 6, 2020
- Applied Materials, Inc.
- Lu XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Prashant Kumar KULSHRESHTHA

Person

Patents Grantslast 30 patents

Dual RF for controllable film deposition

Plasma-enhanced chemical vapor deposition of carbon hard-mask

Highly etch selective amorphous carbon film

Electrostatic chucking process

Reduced hydrogen deposition processes

Highly etch selective amorphous carbon film

Pedestal for substrate processing chambers

Heated pedestal design for improved heat transfer and temperature u...

Reduced defect deposition processes

Faceplate having blocked center hole

Faceplate with edge flow control

Methods and apparatus for minimizing substrate backside damage

Ultra-high modulus and etch selectivity boron-carbon hardmask films

Electrostatic chuck design with improved chucking and arcing perfor...

Clean processes for boron carbon film deposition

Targeted heat control systems

Pedestal for substrate processing chambers

Methods of reducing chamber residues

Highly etch selective amorphous carbon film

Processing systems and methods to control process drift

Nitrogen-doped carbon hardmask films

Loadlock integrated bevel etcher system

Ultra-high modulus and etch selectivity boron carbon hardmask films

Deposition of metal silicide layers on substrates and chamber compo...

Graded in-situ charge trapping layers to enable electrostatic chuck...

Selective deposition of hardmask

Deposition of metal silicide layers on substrates and chamber compo...

Cleaning process for removing boron-carbon residuals in processing...

Loadlock integrated bevel etcher system

Thick tungsten hardmask films deposition on high compressive/tensil...

Patents Applicationslast 30 patents

THROTTLE VALVE AND FORELINE CLEANING USING A MICROWAVE SOURCE

METHODS AND APPARATUS FOR MINIMIZING SUBSTRATE BACKSIDE DAMAGE

ULTRA-HIGH MODULUS AND ETCH SELECTIVITY BORON-CARBON HARDMASK FILMS

ELECTROSTATIC CHUCK DESIGN WITH IMPROVED CHUCKING AND ARCING PERFOR...

PEDESTAL FOR SUBSTRATE PROCESSING CHAMBERS

METHODS OF REDUCING CHAMBER RESIDUES

HIGHLY ETCH SELECTIVE AMORPHOUS CARBON FILM

HIGHLY ETCH SELECTIVE AMORPHOUS CARBON FILM

CLEAN PROCESSES FOR BORON CARBON FILM DEPOSITION

FACEPLATE WITH EDGE FLOW CONTROL

NITROGEN-DOPED CARBON HARDMASK FILMS

ULTRA-HIGH MODULUS AND ETCH SELECTIVITY BORON-CARBON HARDMASK FILMS

TARGETED HEAT CONTROL SYSTEMS

FACEPLATE HAVING BLOCKED CENTER HOLE

DUAL RF FOR CONTROLLABLE FILM DEPOSITION

REDUCED HYDROGEN DEPOSITION PROCESSES

REDUCED DEFECT DEPOSITION PROCESSES

SYSTEMS AND METHODS OF FORMATION OF A METAL HARDMASK IN DEVICE FABR...

PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON HARD-MASK

ELECTROSTATIC CHUCK FOR DAMAGE-FREE SUBSTRATE PROCESSING

RESOLVING SPONTANEOUS ARCING DURING THICK FILM DEPOSITION OF HIGH T...

METHODS AND APPARATUS FOR MINIMIZING SUBSTRATE BACKSIDE DAMAGE

METHODS OF REDUCING CHAMBER RESIDUES

HIGHLY ETCH SELECTIVE AMORPHOUS CARBON FILM

DEPOSITION OF METAL SILICIDE LAYERS ON SUBSTRATES AND CHAMBER COMPO...

ELECTROSTATIC CHUCKING PROCESS

PLASMA DENSIFICATION WITHIN A PROCESSING CHAMBER

METHOD OF PROCESSING A SUBSTRATE

METHOD FOR CLEANING PROCESS CHAMBER

METHOD AND TOOL FOR ELECTROSTATIC CHUCKING