ELECTROSTATIC CHUCK DESIGN WITH IMPROVED CHUCKING AND ARCING PERFORMANCE

Abstract

Aspects of the present disclosure relate to one or more implementations of a substrate support for a processing chamber. In one implementation, a substrate support includes a body having a center, and a support surface on the body configured to at least partially support a substrate. The substrate support includes a first angled wall that extends upward and radially outward from the support surface, and a first upper surface disposed above the support surface. The substrate support also includes a second angled wall that extends upward and radially outward from the first upper surface, the first upper surface extending between the first angled wall and the second angled wall. The substrate support also includes a second upper surface extending from the second angled wall. The second upper surface is disposed above the first upper surface.

Description

Claims

1. A substrate support, comprising: a body having a center;a support surface configured to at least partially support a substrate;a first angled wall that extends upward and radially outward at a first angle relative to the support surface, the first angle less than 90 degrees;a first upper surface disposed above the support surface;a second angled wall that begins at a location above the support surface, and extends upward and radially outward relative to the first upper surface, wherein the first upper surface is disposed between the first angled wall and the second angled wall; anda second upper surface disposed outwardly of the second angled wall, the second upper surface being disposed above the first upper surface.

2. The substrate support of claim 1, wherein the support surface, the first angled wall, the first upper surface, the second angled wall, and the second upper surface are integrally formed with the body.

3. The substrate support of claim 1, wherein the first upper surface and the second upper surface are parallel to the support surface.

4. The substrate support of claim 1, wherein the first angled wall begins at a first distance from the center of the body, the second angled wall begins at a second distance from the center of the body, and a difference between the second distance and the first distance defines a step width of the first angled wall and the first upper surface.

5. The substrate support of claim 4, wherein: the first distance is within a range of 5.5 inches to 6.15 inches;the second distance is within a range of 6.0 inches to 7.0 inches; andthe step width is 1.5 inches or less.

6. The substrate support of claim 4, wherein a ratio of the step width relative to the first distance is 0.3 or less.

7. The substrate support of claim 1, wherein the second angled wall extends upward and radially outward at a second angle relative to the support surface, wherein the second angle is smaller than the first angle.

8. The substrate support of claim 7, wherein the first angle is 30 degrees or larger, and the second angle is within a range of 5 degrees to 60 degrees.

9. The substrate support of claim 1, further comprising: a lower ledge extending from the center to a first lip;a second lip disposed radially outward of the first lip, and separated from the first lip by a channel, wherein the support surface is on the second lip; anda second support surface on the first lip.

10. The substrate support of claim 1, wherein: the first angled wall extends upward and radially outward from the support surface;the second angled wall extends upward and radially outward from the first upper surface;the first upper surface extends between the first angled wall and the second angled wall; andthe second upper surface extends from the second angled wall.

11. A substrate support, comprising: a body having a center;a pocket in the body including a support surface raised above a lower ledge and configured to at least partially support a substrate, wherein a sidewall of the pocket includes a first angled wall that extends upward and radially outward at a first angle relative to the support surface, the first angle less than 90 degrees;a first upper surface disposed above the support surface;a second angled wall that begins at a location above the support surface, and extends upward and radially outward relative to the first upper surface, wherein the first upper surface is disposed between the first angled wall and the second angled wall; anda second upper surface disposed outwardly of the second angled wall, the second upper surface being disposed above the first upper surface.

12. The substrate support of claim 11, wherein a first radius transitions the support surface to the first angled wall.

13. The substrate support of claim 12, wherein: a second radius transitions the first angled wall to the first upper surface;a third radius transitions the first upper surface to the second angled wall;a fourth radius transitions the second angled wall to the second upper surface; andthe second upper surface extends from the fourth radius to an outer periphery of the body.

14. The substrate support of claim 11, wherein: the first angled wall is disposed at a first distance from the center of the body;the second angled wall is disposed at a second distance from the center of the body; anda ratio of the second distance relative to the first distance is within a range of 1.0 to 1.3.

15. A substrate support, comprising: a body having a center;a support surface configured to at least partially support a substrate;a first angled wall that extends upward and radially outward at a first angle relative to the support surface, the first angle less than 90 degrees;a first radius that transitions the first angled wall to a first upper surface disposed above the support surface;a second angled wall that extends upward and radially outward relative to the first upper surface, the first upper surface being disposed between the first radius and the second angled wall; anda second upper surface disposed outwardly of the second angled wall, the second upper surface being disposed above the first upper surface.

16. The substrate support of claim 15, wherein the support surface, the first angled wall, the first radius, the first upper surface, the second angled wall, and the second upper surface are integrally formed with the body.

17. The substrate support of claim 15, further comprising at least one of: a second radius that transitions the support surface to the first angled wall;a third radius that transitions the second angled wall to the second upper surface; ora fourth radius that transitions the first upper surface to the second angled wall.

18. The substrate support of claim 15, wherein the first radius is within a range of 0.010 inches to 0.020 inches.

19. The substrate support of claim 15, wherein the first upper surface is a distance above the support surface, and the distance is within a range of 0.005 inches to 0.050 inches.

20. The substrate support of claim 15, wherein the second upper surface is a distance above the support surface, and the distance is within a range of 0.050 inches to 0.500 inches.