Pratik Mankidy

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Showerhead faceplates with angled gas distribution passages for sem...
- Patent number 12,139,791
- Issue date Nov 12, 2024
- Lam Research Corporation
- Pratik Mankidy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Edge-clamped and mechanically fastened inner electrode of showerhea...
- Patent number 10,262,834
- Issue date Apr 16, 2019
- Lam Research Corporation
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge-clamped and mechanically fastened inner electrode of showerhea...
- Patent number 9,245,716
- Issue date Jan 26, 2016
- Lam Research Corporation
- Anthony de la Llera
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Showerhead electrode
- Patent number 8,573,152
- Issue date Nov 5, 2013
- Lam Research Corporation
- Anthony de la Llera
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Cam-locked showerhead electrode and assembly
- Patent number 8,470,127
- Issue date Jun 25, 2013
- Lam Research Corporation
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clamped monolithic showerhead electrode
- Patent number 8,419,959
- Issue date Apr 16, 2013
- Lam Research Corporation
- Gregory R. Bettencourt
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WAFER EDGE TILT AND ETCH RATE UNIFORMITY
- Publication number 20250149306
- Publication date May 8, 2025
- LAM RESEARCH CORPORATION
- Pratik Mankidy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPROVED THERMAL AND ELECTRICAL INTERFACE BETWEEN PARTS IN AN ETCH...
- Publication number 20250054778
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Anthony DE LA LLERA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD FACEPLATES WITH ANGLED GAS DISTRIBUTION PASSAGES FOR SEM...
- Publication number 20250043425
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Pratik Mankidy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXTREME EDGE FEATURE PROFILE TILT CONTROL BY ALTERING INPUT VOLTAGE...
- Publication number 20240420929
- Publication date Dec 19, 2024
- LAM RESEARCH CORPORATION
- Rajesh Dorai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
C-shroud Modification For Plasma Uniformity Without Impacting Mecha...
- Publication number 20240014015
- Publication date Jan 11, 2024
- LAM RESEARCH CORPORATION
- Pratik Mankidy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD FACEPLATES WITH ANGLED GAS DISTRIBUTION PASSAGES FOR SEM...
- Publication number 20230243034
- Publication date Aug 3, 2023
- LAM RESEARCH CORPORATION
- Pratik Mankidy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING AND PLASMA UNIFORMITY CONTROL USING MAGNETICS
- Publication number 20230071249
- Publication date Mar 9, 2023
- LAM RESEARCH CORPORATION
- Scott Briggs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABILITY OF EDGE PLASMA DENSITY FOR TILT CONTROL
- Publication number 20230063007
- Publication date Mar 2, 2023
- LAM RESEARCH CORPORATION
- John Holland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TAPERED UPPER ELECTRODE FOR UNIFORMITY CONTROL IN PLASMA PROCESSING
- Publication number 20190244793
- Publication date Aug 8, 2019
- LAM RESEARCH CORPORATION
- Zhigang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EDGE-CLAMPED AND MECHANICALLY FASTENED INNER ELECTRODE OF SHOWERHEA...
- Publication number 20160086776
- Publication date Mar 24, 2016
- LAM RESEARCH CORPORATION
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAM-LOCKED SHOWERHEAD ELECTRODE AND ASSEMBLY
- Publication number 20120175062
- Publication date Jul 12, 2012
- LAM RESEARCH CORPORATION
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD ELECTRODE
- Publication number 20120055632
- Publication date Mar 8, 2012
- LAM RESEARCH CORPORATION
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH AN ANGLED SIDEWALL
- Publication number 20110126852
- Publication date Jun 2, 2011
- LAM RESEARCH CORPORATION
- Rajinder Dhindsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EDGE-CLAMPED AND MECHANICALLY FASTENED INNER ELECTRODE OF SHOWERHEA...
- Publication number 20110083809
- Publication date Apr 14, 2011
- LAM RESEARCH CORPORATION
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE
- Publication number 20110070740
- Publication date Mar 24, 2011
- LAM RESEARCH CORPORATION
- Gregory R. Bettencourt
- H01 - BASIC ELECTRIC ELEMENTS

Pratik Mankidy

Person

Patents Grantslast 30 patents

Showerhead faceplates with angled gas distribution passages for sem...

Edge-clamped and mechanically fastened inner electrode of showerhea...

Edge-clamped and mechanically fastened inner electrode of showerhea...

Showerhead electrode

Cam-locked showerhead electrode and assembly

Clamped monolithic showerhead electrode

Patents Applicationslast 30 patents

WAFER EDGE TILT AND ETCH RATE UNIFORMITY

IMPROVED THERMAL AND ELECTRICAL INTERFACE BETWEEN PARTS IN AN ETCH...

SHOWERHEAD FACEPLATES WITH ANGLED GAS DISTRIBUTION PASSAGES FOR SEM...

EXTREME EDGE FEATURE PROFILE TILT CONTROL BY ALTERING INPUT VOLTAGE...

C-shroud Modification For Plasma Uniformity Without Impacting Mecha...

SHOWERHEAD FACEPLATES WITH ANGLED GAS DISTRIBUTION PASSAGES FOR SEM...

ETCHING AND PLASMA UNIFORMITY CONTROL USING MAGNETICS

TUNABILITY OF EDGE PLASMA DENSITY FOR TILT CONTROL

TAPERED UPPER ELECTRODE FOR UNIFORMITY CONTROL IN PLASMA PROCESSING

EDGE-CLAMPED AND MECHANICALLY FASTENED INNER ELECTRODE OF SHOWERHEA...

CAM-LOCKED SHOWERHEAD ELECTRODE AND ASSEMBLY

SHOWERHEAD ELECTRODE

ELECTROSTATIC CHUCK WITH AN ANGLED SIDEWALL

EDGE-CLAMPED AND MECHANICALLY FASTENED INNER ELECTRODE OF SHOWERHEA...

CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE