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Pratik Mankidy
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Edge-clamped and mechanically fastened inner electrode of showerhea...
Patent number
10,262,834
Issue date
Apr 16, 2019
Lam Research Corporation
Anthony de la Llera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Edge-clamped and mechanically fastened inner electrode of showerhea...
Patent number
9,245,716
Issue date
Jan 26, 2016
Lam Research Corporation
Anthony de la Llera
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Showerhead electrode
Patent number
8,573,152
Issue date
Nov 5, 2013
Lam Research Corporation
Anthony de la Llera
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Cam-locked showerhead electrode and assembly
Patent number
8,470,127
Issue date
Jun 25, 2013
Lam Research Corporation
Anthony de la Llera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Clamped monolithic showerhead electrode
Patent number
8,419,959
Issue date
Apr 16, 2013
Lam Research Corporation
Gregory R. Bettencourt
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
C-shroud Modification For Plasma Uniformity Without Impacting Mecha...
Publication number
20240014015
Publication date
Jan 11, 2024
LAM RESEARCH CORPORATION
Pratik Mankidy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SHOWERHEAD FACEPLATES WITH ANGLED GAS DISTRIBUTION PASSAGES FOR SEM...
Publication number
20230243034
Publication date
Aug 3, 2023
LAM RESEARCH CORPORATION
Pratik Mankidy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ETCHING AND PLASMA UNIFORMITY CONTROL USING MAGNETICS
Publication number
20230071249
Publication date
Mar 9, 2023
LAM RESEARCH CORPORATION
Scott Briggs
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TUNABILITY OF EDGE PLASMA DENSITY FOR TILT CONTROL
Publication number
20230063007
Publication date
Mar 2, 2023
LAM RESEARCH CORPORATION
John Holland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TAPERED UPPER ELECTRODE FOR UNIFORMITY CONTROL IN PLASMA PROCESSING
Publication number
20190244793
Publication date
Aug 8, 2019
LAM RESEARCH CORPORATION
Zhigang Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EDGE-CLAMPED AND MECHANICALLY FASTENED INNER ELECTRODE OF SHOWERHEA...
Publication number
20160086776
Publication date
Mar 24, 2016
LAM RESEARCH CORPORATION
Anthony de la Llera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CAM-LOCKED SHOWERHEAD ELECTRODE AND ASSEMBLY
Publication number
20120175062
Publication date
Jul 12, 2012
LAM RESEARCH CORPORATION
Anthony de la Llera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SHOWERHEAD ELECTRODE
Publication number
20120055632
Publication date
Mar 8, 2012
LAM RESEARCH CORPORATION
Anthony de la Llera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK WITH AN ANGLED SIDEWALL
Publication number
20110126852
Publication date
Jun 2, 2011
LAM RESEARCH CORPORATION
Rajinder Dhindsa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EDGE-CLAMPED AND MECHANICALLY FASTENED INNER ELECTRODE OF SHOWERHEA...
Publication number
20110083809
Publication date
Apr 14, 2011
LAM RESEARCH CORPORATION
Anthony de la Llera
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE
Publication number
20110070740
Publication date
Mar 24, 2011
LAM RESEARCH CORPORATION
Gregory R. Bettencourt
H01 - BASIC ELECTRIC ELEMENTS