Pu Fang Chen

Person

Taipei, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and methods for effective impurity gettering
- Patent number 12,046,614
- Issue date Jul 23, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yueh-Chuan Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabrication method of metal-free SOI wafer
- Patent number 12,040,221
- Issue date Jul 16, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Hung Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and method for manufacturing the same
- Patent number 11,508,670
- Issue date Nov 22, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Pu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabrication method of metal-free SOI wafer
- Patent number 11,232,974
- Issue date Jan 25, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Hung Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and method for embedded gettering in a silicon on insulat...
- Patent number 11,211,259
- Issue date Dec 28, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Pu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and method for manufacturing the same
- Patent number 10,714,433
- Issue date Jul 14, 2020
- Taiwan Semiconductor Manufacturing Company Ltd.
- Pu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer supporting structure and method for forming the same
- Patent number 10,190,235
- Issue date Jan 29, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- An-Li Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate and manufacturing method of the same
- Patent number 10,170,312
- Issue date Jan 1, 2019
- Taiwan Semiconductor Manufacturing Company Ltd.
- Pu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 10,157,819
- Issue date Dec 18, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Pu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer strength by control of uniformity of edge bulk micro defects
- Patent number 10,141,413
- Issue date Nov 27, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- I-Che Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and method
- Patent number 9,945,048
- Issue date Apr 17, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sen-Hong Syue
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor device having a through-silicon via and manufacturing...
- Patent number 9,899,297
- Issue date Feb 20, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Pu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for qualifying a semiconductor wafer for subsequent processing
- Patent number 9,064,823
- Issue date Jun 23, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- I-Che Huang
- C30 - CRYSTAL GROWTH
Information Patent Grant
Wafer alignment system and method
- Patent number 8,932,945
- Issue date Jan 13, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sen-Hong Syue
- G11 - INFORMATION STORAGE
Information Patent Grant
Dopant implantation method using multi-step implants
- Patent number 8,008,158
- Issue date Aug 30, 2011
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tse-En Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming field effect transistors and EPI-substrate
- Patent number 7,713,852
- Issue date May 11, 2010
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Pu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Preventing dosage drift with duplicate dose integrators
- Patent number 7,518,129
- Issue date Apr 14, 2009
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jih-Hwa Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for improved gate oxide uniformity with reduci...
- Patent number 6,806,144
- Issue date Oct 19, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- Pu-Fan Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for measuring thickness of a thin oxide layer
- Patent number 6,646,752
- Issue date Nov 11, 2003
- Taiwan Semiconductor Manufacturing Co. Ltd
- Pu Fang Chen
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
FABRICATION METHOD OF METAL-FREE SOI WAFER
- Publication number 20240347377
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Hung Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACANCY-RICH SILICON FOR USE WITH A GALLIUM NITRIDE EPITAXIAL LAYER
- Publication number 20240141553
- Publication date May 2, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Pu-Fang CHEN
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARATUS AND METHODS FOR EFFECTIVE IMPURITY GETTERING
- Publication number 20220367538
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Yueh-Chuan LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FABRICATION METHOD OF METAL-FREE SOI WAFER
- Publication number 20220139769
- Publication date May 5, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Hung Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Structure and Method for Embedded Gettering in a Silicon On Insulat...
- Publication number 20220122849
- Publication date Apr 21, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Pu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR EFFECTIVE IMPURITY GETTERING
- Publication number 20220059582
- Publication date Feb 24, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Yueh-Chuan LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20200303324
- Publication date Sep 24, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- PU-FANG CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FABRICATION METHOD OF METAL-FREE SOI WAFER
- Publication number 20200176306
- Publication date Jun 4, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Yu-Hung Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20190355670
- Publication date Nov 21, 2019
- Taiwan Semiconductor Manufacturing company Ltd.
- PU-FANG CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Structure and Method for Embedded Gettering in a Silicon On Insulat...
- Publication number 20190326128
- Publication date Oct 24, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Pu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE AND MANUFACTURING METHOD OF THE SAME
- Publication number 20180308697
- Publication date Oct 25, 2018
- Taiwan Semiconductor Manufacturing company Ltd.
- PU-FANG CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20180096914
- Publication date Apr 5, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Pu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER STRENGTH BY CONTROL OF UNIFORMITY OF EDGE BULK MICRO DEFECTS
- Publication number 20150357421
- Publication date Dec 10, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- I-Che Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer Supporting Structure and Method for Forming the Same
- Publication number 20140349466
- Publication date Nov 27, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- An-Li Ho
- C30 - CRYSTAL GROWTH
Information Patent Application
Wafer Strength by Control of Uniformity of Edge Bulk Micro Defects
- Publication number 20140273291
- Publication date Sep 18, 2014
- Taiwan Semiconductor Manufacturing Co., LTD
- I-Che Huang
- C30 - CRYSTAL GROWTH
Information Patent Application
Wafer Alignment System and Method
- Publication number 20140011348
- Publication date Jan 9, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sen-Hong Syue
- G11 - INFORMATION STORAGE
Information Patent Application
Semiconductor Structure and Method
- Publication number 20130337631
- Publication date Dec 19, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sen-Hong Syue
- C30 - CRYSTAL GROWTH
Information Patent Application
DOPANT IMPLANTATION METHOD AND INTEGRATED CIRCUITS FORMED THEREBY
- Publication number 20100009506
- Publication date Jan 14, 2010
- Taiwan Semiconductor Manufacturing Co., LTD
- Tse-En Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING FIELD EFFECT TRANSISTORS AND EPI-SUBSTRATE
- Publication number 20080311716
- Publication date Dec 18, 2008
- Taiwan Semiconductor Manufacturing Co., LTD
- Pu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer carrier
- Publication number 20080041758
- Publication date Feb 21, 2008
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Fei Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Preventing dosage drift with duplicate dose integrators
- Publication number 20070257210
- Publication date Nov 8, 2007
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jih-Hwa Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for implementing poly pre-doping in deep sub-micron process
- Publication number 20050118802
- Publication date Jun 2, 2005
- Chang-Sheng Tsao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for improved gate oxide uniformity with reduci...
- Publication number 20040031440
- Publication date Feb 19, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Pu-Fan Chen
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD AND APPARATUS FOR MEASURING THICKNESS OF A THIN OXIDE LAYER
- Publication number 20030160972
- Publication date Aug 28, 2003
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Pu Fang Chen
- G01 - MEASURING TESTING

Pu Fang Chen

Person

Patents Grantslast 30 patents

Apparatus and methods for effective impurity gettering

Fabrication method of metal-free SOI wafer

Semiconductor structure and method for manufacturing the same

Fabrication method of metal-free SOI wafer

Structure and method for embedded gettering in a silicon on insulat...

Semiconductor structure and method for manufacturing the same

Wafer supporting structure and method for forming the same

Semiconductor substrate and manufacturing method of the same

Semiconductor device and manufacturing method thereof

Wafer strength by control of uniformity of edge bulk micro defects

Semiconductor structure and method

Semiconductor device having a through-silicon via and manufacturing...

Method for qualifying a semiconductor wafer for subsequent processing

Wafer alignment system and method

Dopant implantation method using multi-step implants

Methods for forming field effect transistors and EPI-substrate

Preventing dosage drift with duplicate dose integrators

Method and apparatus for improved gate oxide uniformity with reduci...

Method and apparatus for measuring thickness of a thin oxide layer

Patents Applicationslast 30 patents

FABRICATION METHOD OF METAL-FREE SOI WAFER

VACANCY-RICH SILICON FOR USE WITH A GALLIUM NITRIDE EPITAXIAL LAYER

APPARATUS AND METHODS FOR EFFECTIVE IMPURITY GETTERING

FABRICATION METHOD OF METAL-FREE SOI WAFER

Structure and Method for Embedded Gettering in a Silicon On Insulat...

APPARATUS AND METHODS FOR EFFECTIVE IMPURITY GETTERING

SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

FABRICATION METHOD OF METAL-FREE SOI WAFER

SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

Structure and Method for Embedded Gettering in a Silicon On Insulat...

SEMICONDUCTOR SUBSTRATE AND MANUFACTURING METHOD OF THE SAME

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

WAFER STRENGTH BY CONTROL OF UNIFORMITY OF EDGE BULK MICRO DEFECTS

Wafer Supporting Structure and Method for Forming the Same

Wafer Strength by Control of Uniformity of Edge Bulk Micro Defects

Wafer Alignment System and Method

Semiconductor Structure and Method

DOPANT IMPLANTATION METHOD AND INTEGRATED CIRCUITS FORMED THEREBY

METHODS FOR FORMING FIELD EFFECT TRANSISTORS AND EPI-SUBSTRATE

Wafer carrier

Preventing dosage drift with duplicate dose integrators

Method for implementing poly pre-doping in deep sub-micron process

Method and apparatus for improved gate oxide uniformity with reduci...

METHOD AND APPARATUS FOR MEASURING THICKNESS OF A THIN OXIDE LAYER