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Purushottam Kumar
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Hillsboro, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Dynamic precursor dosing for atomic layer deposition
Patent number
11,970,772
Issue date
Apr 30, 2024
Lam Research Corporation
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for modulating film uniformity
Patent number
11,913,113
Issue date
Feb 27, 2024
Lam Research Corporation
Pulkit Agarwal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of atomic layer deposition
Patent number
11,670,503
Issue date
Jun 6, 2023
Lam Research Corporation
Jun Qian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of improving deposition induced CD imbalance using spatially...
Patent number
11,651,963
Issue date
May 16, 2023
Lam Research Corporation
Ishtak Karim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultrathin atomic layer deposition film accuracy thickness control
Patent number
11,646,198
Issue date
May 9, 2023
Lam Research Corporation
Jun Qian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-cycle ALD process for film uniformity and thickness profile m...
Patent number
11,479,856
Issue date
Oct 25, 2022
Lam Research Corporation
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Surface modified depth controlled deposition for plasma based depos...
Patent number
11,373,862
Issue date
Jun 28, 2022
Lam Research Corporation
Joseph Abel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Controller for controlling core critical dimension variation using...
Patent number
11,322,416
Issue date
May 3, 2022
Lam Research Corporation
Pulkit Agarwal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dielectric gapfill using atomic layer deposition (ALD), inhibitor p...
Patent number
11,293,098
Issue date
Apr 5, 2022
Lam Research Corporation
Joseph Abel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for flow monitoring in a precursor vapor supply...
Patent number
11,255,017
Issue date
Feb 22, 2022
Lam Research Corporation
Jun Qian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dynamic precursor dosing for atomic layer deposition
Patent number
11,180,850
Issue date
Nov 23, 2021
Lam Research Corporation
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ultrathin atomic layer deposition film accuracy thickness control
Patent number
11,101,129
Issue date
Aug 24, 2021
Lam Research Corporation
Jun Qian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Symmetric precursor delivery
Patent number
11,021,792
Issue date
Jun 1, 2021
Lam Research Corporation
Eli Jeon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of improving deposition induced CD imbalance using spatially...
Patent number
10,978,302
Issue date
Apr 13, 2021
Lam Research Corporation
Ishtak Karim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Compensating chamber and process effects to improve critical dimens...
Patent number
10,847,352
Issue date
Nov 24, 2020
Lam Research Corporation
Pulkit Agarwal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer etch, reactive precursors and energetic sources for pa...
Patent number
10,832,909
Issue date
Nov 10, 2020
Lam Research Corporation
Adrien LaVoie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Surface modified depth controlled deposition for plasma based depos...
Patent number
10,727,046
Issue date
Jul 28, 2020
Lam Research Corporation
Joseph Abel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for controlling core critical dimension variation using flas...
Patent number
10,727,143
Issue date
Jul 28, 2020
Lam Research Corporation
Pulkit Agarwal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective atomic layer deposition with post-dose treatment
Patent number
10,679,848
Issue date
Jun 9, 2020
Lam Research Corporation
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Conical wafer centering and holding device for semiconductor proces...
Patent number
10,655,224
Issue date
May 19, 2020
Lam Research Corporation
Pulkit Agarwal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dielectric gapfill of high aspect ratio features utilizing a sacrif...
Patent number
10,658,172
Issue date
May 19, 2020
Lam Research Corporation
Joseph R. Abel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method monitoring chamber drift
Patent number
10,636,686
Issue date
Apr 28, 2020
Lam Research Corporation
Joseph Abel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultrathin atomic layer deposition film accuracy thickness control
Patent number
10,566,187
Issue date
Feb 18, 2020
Lam Research Corporation
Jun Qian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hardware and process for film uniformity improvement
Patent number
10,526,700
Issue date
Jan 7, 2020
Lam Research Corporation
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-cycle ALD process for film uniformity and thickness profile m...
Patent number
10,526,701
Issue date
Jan 7, 2020
Lam Research Corporation
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer clean for removal of photoresist patterning scum
Patent number
10,494,715
Issue date
Dec 3, 2019
Lam Research Corporation
Pulkit Agarwal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatuses for increasing reactor processing batch size
Patent number
10,431,451
Issue date
Oct 1, 2019
Lam Research Corporation
Pulkit Agarwal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatuses for showerhead backside parasitic plasma su...
Patent number
10,407,773
Issue date
Sep 10, 2019
Lam Research Corporation
Adrien LaVoie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Systems and methods for flow monitoring in a precursor vapor supply...
Patent number
10,351,953
Issue date
Jul 16, 2019
Lam Research Corporation
Jun Qian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dielectric gapfill of high aspect ratio features utilizing a sacrif...
Patent number
10,269,559
Issue date
Apr 23, 2019
Lam Research Corporation
Joseph Abel
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR MODULATING FILM UNIFORMITY
Publication number
20240183034
Publication date
Jun 6, 2024
LAM RESEARCH CORPORATION
Pulkit Agarwal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL
Publication number
20230298884
Publication date
Sep 21, 2023
LAM RESEARCH CORPORATION
Jun Qian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS FEED SYSTEM FOR SURFACE MODIFIED DEPTH CONTROLLED DEPOSITION FO...
Publication number
20220301866
Publication date
Sep 22, 2022
LAM RESEARCH CORPORATION
Joseph Abel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DYNAMIC PROCESS CONTROL IN SEMICONDUCTOR MANUFACTURING
Publication number
20220293442
Publication date
Sep 15, 2022
LAM RESEARCH CORPORATION
Purushottam Kumar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IN-SITU CONTROL OF FILM PROPERTIES DURING ATOMIC LAYER DEPOSITION
Publication number
20220238325
Publication date
Jul 28, 2022
LAM RESEARCH CORPORATION
Douglas Walter Agnew
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIELECTRIC GAPFILL USING ATOMIC LAYER DEPOSITION (ALD), INHIBITOR P...
Publication number
20220205096
Publication date
Jun 30, 2022
LAM RESEARCH CORPORATION
Joseph ABEL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS FOR CLEANING PLASMA CHAMBERS
Publication number
20220181128
Publication date
Jun 9, 2022
LAM RESEARCH CORPORATION
Adrien LAVOIE
B08 - CLEANING
Information
Patent Application
METHOD FOR PROVIDING DOPED SILICON
Publication number
20220165563
Publication date
May 26, 2022
LAM RESEARCH CORPORATION
Purushottam KUMAR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VARIABLE CYCLE AND TIME RF ACTIVATION METHOD FOR FILM THICKNESS MAT...
Publication number
20220154336
Publication date
May 19, 2022
LAM RESEARCH CORPORATION
Ishtak Karim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION
Publication number
20220033967
Publication date
Feb 3, 2022
LAM RESEARCH CORPORATION
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOW-K ALD GAP-FILL METHODS AND MATERIAL
Publication number
20220037146
Publication date
Feb 3, 2022
LAM RESEARCH CORPORATION
Joseph R. Abel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MODIFYING HYDROPHOBICITY OF A WAFER SURFACE USING AN ORGANOSILICON...
Publication number
20210384029
Publication date
Dec 9, 2021
LAM RESEARCH CORPORATION
Jeremy D. Fields
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL
Publication number
20210343520
Publication date
Nov 4, 2021
LAM RESEARCH CORPORATION
Jun Qian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYMMETRIC PRECURSOR DELIVERY
Publication number
20210238743
Publication date
Aug 5, 2021
LAM RESEARCH CORPORATION
Eli Jeon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF IMPROVING DEPOSITION INDUCED CD IMBALANCE USING SPATIALLY...
Publication number
20210202250
Publication date
Jul 1, 2021
LAM RESEARCH CORPORATION
Ishtak KARIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR FLOW MONITORING IN A PRECURSOR VAPOR SUPPLY...
Publication number
20200407849
Publication date
Dec 31, 2020
LAM RESEARCH CORPORATION
Jun Qian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SURFACE MODIFIED DEPTH CONTROLLED DEPOSITION FOR PLASMA BASED DEPOS...
Publication number
20200357636
Publication date
Nov 12, 2020
LAM RESEARCH CORPORATION
Joseph Abel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Controller for Controlling Core Critical Dimension Variation Using...
Publication number
20200350219
Publication date
Nov 5, 2020
LAM RESEARCH CORPORATION
Pulkit Agarwal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL
Publication number
20200152446
Publication date
May 14, 2020
LAM RESEARCH CORPORATION
Jun Qian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTI-CYCLE ALD PROCESS FOR FILM UNIFORMITY AND THICKNESS PROFILE M...
Publication number
20200087786
Publication date
Mar 19, 2020
LAM RESEARCH CORPORATION
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR MODULATING FILM UNIFORMITY
Publication number
20200063259
Publication date
Feb 27, 2020
LAM RESEARCH CORPORATION
Pulkit Agarwal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYMMETRIC PRECURSOR DELIVERY
Publication number
20200056288
Publication date
Feb 20, 2020
LAM RESEARCH CORPORATION
Eli Jeon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COMPENSATING CHAMBER AND PROCESS EFFECTS TO IMPROVE CRITICAL DIMENS...
Publication number
20200043709
Publication date
Feb 6, 2020
LAM RESEARCH CORPORATION
Pulkit Agarwal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for Controlling Core Critical Dimension Variation Using Flas...
Publication number
20200035572
Publication date
Jan 30, 2020
LAM RESEARCH CORPORATION
Pulkit Agarwal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIELECTRIC GAPFILL USING ATOMIC LAYER DEPOSITION (ALD), INHIBITOR P...
Publication number
20200017967
Publication date
Jan 16, 2020
LAM RESEARCH CORPORATION
Joseph ABEL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SURFACE MODIFIED DEPTH CONTROLLED DEPOSITION FOR PLASMA BASED DEPOS...
Publication number
20200013616
Publication date
Jan 9, 2020
LAM RESEARCH CORPORATION
Joseph Abel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL
Publication number
20190378710
Publication date
Dec 12, 2019
LAM RESEARCH CORPORATION
Jun Qian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROVIDING A PLASMA ATOMIC LAYER DEPOSITION
Publication number
20190345608
Publication date
Nov 14, 2019
LAM RESEARCH CORPORATION
Pulkit Agarwal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD MONITORING CHAMBER DRIFT
Publication number
20190267268
Publication date
Aug 29, 2019
LAM RESEARCH CORPORATION
Joseph ABEL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIELECTRIC GAPFILL OF HIGH ASPECT RATIO FEATURES UTILIZING A SACRIF...
Publication number
20190206677
Publication date
Jul 4, 2019
LAM RESEARCH CORPORATION
Joseph R. Abel
H01 - BASIC ELECTRIC ELEMENTS