TREA

Qing SHE

Follow

Person

  • Beijing, CN
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Semiconductor processing apparatus
    • Patent number 12,278,123
    • Issue date Apr 15, 2025
    • BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
    • Jingfeng Wei
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Magnetron drive mechanism, magnetron assembly and reaction chamber
    • Patent number 11,282,682
    • Issue date Mar 22, 2022
    • BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
    • Qing She
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Precleaning chamber and plasma processing apparatus
    • Patent number 10,622,224
    • Issue date Apr 14, 2020
    • BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
    • Qing She
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Reaction chamber and semi-conductor processing device
    • Patent number 9,978,570
    • Issue date May 22, 2018
    • BEIJING NAURA MICROELECTRONICS EQUIPMENT
    • Yanzhao Zhang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents