Qing SHE

Person

Beijing, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Magnetron drive mechanism, magnetron assembly and reaction chamber
- Patent number 11,282,682
- Issue date Mar 22, 2022
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Qing She
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precleaning chamber and plasma processing apparatus
- Patent number 10,622,224
- Issue date Apr 14, 2020
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Qing She
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction chamber and semi-conductor processing device
- Patent number 9,978,570
- Issue date May 22, 2018
- BEIJING NAURA MICROELECTRONICS EQUIPMENT
- Yanzhao Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AN...
- Publication number 20240371672
- Publication date Nov 7, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yongfei WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20230162998
- Publication date May 25, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jingfeng WEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETRON DRIVE MECHANISM, MAGNETRON ASSEMBLY AND REACTION CHAMBER
- Publication number 20200203135
- Publication date Jun 25, 2020
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Qing SHE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECLEANING CHAMBER AND PLASMA PROCESSING APPARATUS
- Publication number 20170330769
- Publication date Nov 16, 2017
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Qing SHE
- B08 - CLEANING
Information Patent Application
REACTION CHAMBER AND SEMI-CONDUCTOR PROCESSING DEVICE
- Publication number 20170154758
- Publication date Jun 1, 2017
- Beijing NMC Co., Ltd.
- Yanzhao ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRE-CLEANING CHAMBER AND A SEMICONDUCTOR PROCESSING APPARATUS CONTA...
- Publication number 20160148789
- Publication date May 26, 2016
- BEIJING NMC CO., LTD
- PENG CHEN
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Magnetron drive mechanism, magnetron assembly and reaction chamber

Precleaning chamber and plasma processing apparatus

Reaction chamber and semi-conductor processing device

Patents Applicationslast 30 patents

SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AN...

SEMICONDUCTOR PROCESSING APPARATUS

MAGNETRON DRIVE MECHANISM, MAGNETRON ASSEMBLY AND REACTION CHAMBER

PRECLEANING CHAMBER AND PLASMA PROCESSING APPARATUS

REACTION CHAMBER AND SEMI-CONDUCTOR PROCESSING DEVICE

PRE-CLEANING CHAMBER AND A SEMICONDUCTOR PROCESSING APPARATUS CONTA...