Membership
Tour
Register
Log in
Qinghua Zhong
Follow
Person
Fremont, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Determination of semiconductor chamber operating parameters for the...
Patent number
9,466,466
Issue date
Oct 11, 2016
Lam Research Corporation
Qinghua Zhong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Residue free systems and methods for isotropically etching silicon...
Patent number
9,385,003
Issue date
Jul 5, 2016
Lam Research Corporation
Ming-Shu Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Profile and CD uniformity control by plasma oxidation treatment
Patent number
8,671,878
Issue date
Mar 18, 2014
Lam Research Corporation
Qinghua Zhong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Line end shortening reduction during etch
Patent number
8,668,805
Issue date
Mar 11, 2014
Lam Research Corporation
Gowri Kota
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Silicon nitride dry trim without top pulldown
Patent number
8,431,461
Issue date
Apr 30, 2013
Lam Research Corporation
Qinghua Zhong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Profile and CD uniformity control by plasma oxidation treatment
Patent number
8,298,949
Issue date
Oct 30, 2012
Lam Research Corporation
Qinghua Zhong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Line end shortening reduction during etch
Patent number
7,491,343
Issue date
Feb 17, 2009
Lam Research Corporation
Yoko Yamaguchi Adams
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Line end shortening reduction during etch
Patent number
7,407,597
Issue date
Aug 5, 2008
Lam Research Corporation
Gowri Kota
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
IN-SITU METAL RESIDUE CLEAN
Publication number
20140179106
Publication date
Jun 26, 2014
LAM RESEARCH CORPORATION
Qinghua ZHONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCH WITH MIXED MODE PULSING
Publication number
20140051256
Publication date
Feb 20, 2014
LAM RESEARCH CORPORATION
Qinghua ZHONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR FORMING FEATURES WITH PLASMA PRE-ETCH TREA...
Publication number
20130267097
Publication date
Oct 10, 2013
LAM RESEARCH CORPORATION
Ratndeep SRIVASTAVA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROFILE AND CD UNIFORMITY CONTROL BY PLASMA OXIDATION TREATMENT
Publication number
20130025785
Publication date
Jan 31, 2013
LAM RESEARCH CORPORATION
Qinghua Zhong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROFILE AND CD UNIFORMITY CONTROL BY PLASMA OXIDATION TREATMENT
Publication number
20100173496
Publication date
Jul 8, 2010
LAM RESEARCH CORPORATION
Qinghua Zhong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LINE END SHORTENING REDUCTION DURING ETCH
Publication number
20080268211
Publication date
Oct 30, 2008
LAM RESEARCH CORPORATION
Gowri Kota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LINE END SHORTENING REDUCTION DURING ETCH
Publication number
20080087639
Publication date
Apr 17, 2008
Lam Research Corporation
Yoko Yamaguchi Adams
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Line end shortening reduction during etch
Publication number
20080087637
Publication date
Apr 17, 2008
LAM RESEARCH CORPORATION
Gowri Kota
H01 - BASIC ELECTRIC ELEMENTS