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Plasma ashing process
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Patent number 6,951,823
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Issue date Oct 4, 2005
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Axcelis Technologies, Inc.
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Carlo Waldfried
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma ashing process
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Patent number 6,630,406
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Issue date Oct 7, 2003
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Axcelis Technologies
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Carlo Waldfried
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma ashing process
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Patent number 6,548,416
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Issue date Apr 15, 2003
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Axcelis Technolgoies, Inc.
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Qingyuan Han
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H01 - BASIC ELECTRIC ELEMENTS
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Oxygen free plasma stripping process
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Patent number 6,281,135
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Issue date Aug 28, 2001
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Axcelis Technologies, Inc.
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Qingyuan Han
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY