Quach H. David

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Heated ceramic faceplate
- Patent number 11,434,568
- Issue date Sep 6, 2022
- Applied Materials, Inc.
- Juan Carlos Rocha-Alvarez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for controlling substrate uniformity
- Patent number 10,177,050
- Issue date Jan 8, 2019
- Applied Materials, Inc.
- S. M. Reza Sadjadi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for controlling substrate uniformity
- Patent number 9,412,579
- Issue date Aug 9, 2016
- Applied Materials, Inc.
- S. M. Reza Sadjadi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inducing turbulent flow of a processing ch...
- Patent number 8,910,644
- Issue date Dec 16, 2014
- Applied Materials, Inc.
- Hua Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
HVPE chamber hardware
- Patent number 8,568,529
- Issue date Oct 29, 2013
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 8,550,031
- Issue date Oct 8, 2013
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
HVPE precursor source hardware
- Patent number 8,491,720
- Issue date Jul 23, 2013
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning plate for inducing turbulent flow of a processing chamber...
- Patent number D664170
- Issue date Jul 24, 2012
- Applied Materials, Inc.
- Hua Chung
- D15 - Machines not elsewhere specified
Information Patent Grant
Dome assembly for a deposition chamber
- Patent number D664172
- Issue date Jul 24, 2012
- Applied Materials, Inc.
- Tetsuya Ishikawa
- D15 - Machines not elsewhere specified
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 8,215,262
- Issue date Jul 10, 2012
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods for fabricating group III nitride structures with a cluster...
- Patent number 8,183,132
- Issue date May 22, 2012
- Applied Materials, Inc.
- Sandeep Nijhawan
- C30 - CRYSTAL GROWTH
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 8,181,596
- Issue date May 22, 2012
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 8,146,530
- Issue date Apr 3, 2012
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Lid assembly for a substrate processing chamber
- Patent number D642605
- Issue date Aug 2, 2011
- Applied Materials, Inc.
- Tetsuya Ishikawa
- D15 - Machines not elsewhere specified
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 7,925,377
- Issue date Apr 12, 2011
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 7,743,728
- Issue date Jun 29, 2010
- Applied Materials, Inc.
- Tetsuya Ishikawa
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Integrated thermal unit having a shuttle with two-axis movement
- Patent number 7,741,585
- Issue date Jun 22, 2010
- Sokudo Co., Ltd.
- David H. Quach
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 7,694,647
- Issue date Apr 13, 2010
- Applied Materials, Inc.
- Tetsuya Ishikawa
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Integrated thermal unit having a shuttle with a temperature control...
- Patent number 7,601,934
- Issue date Oct 13, 2009
- Sokudo Co., Ltd.
- David H. Quach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for performing real-time wireless temperature m...
- Patent number 7,460,972
- Issue date Dec 2, 2008
- Sokudo Co., Ltd.
- Sharathchandra Somayaji
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for heating substrates
- Patent number 7,431,585
- Issue date Oct 7, 2008
- Applied Materials, Inc.
- Jun Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Zone control heater plate for track lithography systems
- Patent number 7,427,728
- Issue date Sep 23, 2008
- Sokudo Co., Ltd.
- Martin Jeff Salinas
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for heating substrates
- Patent number 7,381,052
- Issue date Jun 3, 2008
- Applied Materials, Inc.
- Jun Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 7,357,842
- Issue date Apr 15, 2008
- Sokudo Co., Ltd.
- Tetsuya Ishikawa
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Integrated thermal unit having a shuttle with two-axis movement
- Patent number 7,297,906
- Issue date Nov 20, 2007
- Sokudo Co., Ltd.
- David H. Quach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated thermal unit having laterally adjacent bake and chill pl...
- Patent number 7,288,746
- Issue date Oct 30, 2007
- Sokudo Co., Ltd.
- David H. Quach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated thermal unit having a shuttle with a temperature control...
- Patent number 7,282,675
- Issue date Oct 16, 2007
- Sokudo Co., Ltd.
- David H. Quach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bake plate having engageable thermal mass
- Patent number 7,274,005
- Issue date Sep 25, 2007
- Sokudo Co., Ltd.
- David H. Quach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam treatment apparatus
- Patent number 7,049,612
- Issue date May 23, 2006
- Applied Materials
- David H. Quach
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HEATED CERAMIC FACEPLATE
- Publication number 20210363635
- Publication date Nov 25, 2021
- Applied Materials, Inc.
- Juan Carlos ROCHA-ALVAREZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS FOR HIGH RF POWER PROCESS
- Publication number 20200013586
- Publication date Jan 9, 2020
- Applied Materials, Inc.
- Jun MA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING SUBSTRATE UNIFORMITY
- Publication number 20160329256
- Publication date Nov 10, 2016
- Applied Materials, Inc.
- S. M. Reza SADJADI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING SUBSTRATE UNIFORMITY
- Publication number 20130288483
- Publication date Oct 31, 2013
- S.M. Reza Sadjadi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20120320361
- Publication date Dec 20, 2012
- Tetsuya Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY FOR THIN FILM DEPOSITION SYSTEMS
- Publication number 20120234229
- Publication date Sep 20, 2012
- Applied Materials, Inc.
- Tuan Anh NGUYEN
- C30 - CRYSTAL GROWTH
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20120180983
- Publication date Jul 19, 2012
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
PROCESSING SYSTEMS AND APPARATUSES HAVING A SHAFT COVER
- Publication number 20120073503
- Publication date Mar 29, 2012
- Juno Yu-Ting Huang
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD AND APPARATUS FOR INDUCING TURBULENT FLOW OF A PROCESSING CH...
- Publication number 20110308551
- Publication date Dec 22, 2011
- Applied Materials, Inc.
- Hua Chung
- B08 - CLEANING
Information Patent Application
CLUSTER TOOL FOR LEDS
- Publication number 20100261340
- Publication date Oct 14, 2010
- Applied Materials, Inc.
- SANDEEP NIJHAWAN
- C30 - CRYSTAL GROWTH
Information Patent Application
HVPE PRECURSOR SOURCE HARDWARE
- Publication number 20100258052
- Publication date Oct 14, 2010
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C30 - CRYSTAL GROWTH
Information Patent Application
HVPE CHAMBER HARDWARE
- Publication number 20100258049
- Publication date Oct 14, 2010
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C30 - CRYSTAL GROWTH
Information Patent Application
AUTOMATIC SUBSTRATE LOADING STATION
- Publication number 20100111650
- Publication date May 6, 2010
- Applied Materials, Inc.
- DAVID H. QUACH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH PRODUCTIVITY PLASMA PROCESSING CHAMBER
- Publication number 20090068356
- Publication date Mar 12, 2009
- APPLIED MATERIALS, INC.
- MARIO David SILVETTI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20090067956
- Publication date Mar 12, 2009
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20090064928
- Publication date Mar 12, 2009
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20090064929
- Publication date Mar 12, 2009
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
ZONE CONTROL HEATER PLATE FOR TRACK LITHOGRAPHY SYSTEMS
- Publication number 20090032522
- Publication date Feb 5, 2009
- SOKUDO CO., LTD.
- Martin Jeff Salinas
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20080223293
- Publication date Sep 18, 2008
- Sokudo Co,. Ltd.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20080199282
- Publication date Aug 21, 2008
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
ACTIVELY CHILLED SUBSTRATE TRANSPORT MODULE
- Publication number 20080145191
- Publication date Jun 19, 2008
- SOKUDO CO., LTD.
- Martin Jeff Salinas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR PERFORMING REAL-TIME WIRELESS TEMPERATURE M...
- Publication number 20080097714
- Publication date Apr 24, 2008
- SOKUDO CO., LTD.
- Sharathchandra Somayaji
- G01 - MEASURING TESTING
Information Patent Application
INTEGRATED THERMAL UNIT HAVING A SHUTTLE WITH TWO-AXIS MOVEMENT
- Publication number 20080047950
- Publication date Feb 28, 2008
- Sokudo Co., Ltd.
- David H. Quach
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
INTEGRATED THERMAL UNIT HAVING A SHUTTLE WITH A TEMPERATURE CONTROL...
- Publication number 20080023656
- Publication date Jan 31, 2008
- Sokudo Co., Ltd.
- David H. Quach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Zone control heater plate for track lithography systems
- Publication number 20080006619
- Publication date Jan 10, 2008
- Applied Materials, INC.
- Martin Jeff Salinas
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
BAKE PLATE HAVING ENGAGEABLE THERMAL MASS
- Publication number 20070295276
- Publication date Dec 27, 2007
- SOKUDO CO., LTD.
- David H. Quach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Faceplate with rapid temperature change
- Publication number 20070254494
- Publication date Nov 1, 2007
- Applied Materials, Inc.
- Harald Herchen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20060286300
- Publication date Dec 21, 2006
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20060278165
- Publication date Dec 14, 2006
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
Integrated thermal unit having laterally adjacent bake and chill pl...
- Publication number 20060237432
- Publication date Oct 26, 2006
- Applied Materials, Inc.
- David H. Quach
- H01 - BASIC ELECTRIC ELEMENTS

Quach H. David

Person

Patents Grantslast 30 patents

Heated ceramic faceplate

Methods and apparatus for controlling substrate uniformity

Methods and apparatus for controlling substrate uniformity

Method and apparatus for inducing turbulent flow of a processing ch...

HVPE chamber hardware

Cluster tool architecture for processing a substrate

HVPE precursor source hardware

Cleaning plate for inducing turbulent flow of a processing chamber...

Dome assembly for a deposition chamber

Cluster tool architecture for processing a substrate

Methods for fabricating group III nitride structures with a cluster...

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Lid assembly for a substrate processing chamber

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Integrated thermal unit having a shuttle with two-axis movement

Cluster tool architecture for processing a substrate

Integrated thermal unit having a shuttle with a temperature control...

Methods and systems for performing real-time wireless temperature m...

Apparatus and method for heating substrates

Zone control heater plate for track lithography systems

Apparatus and method for heating substrates

Cluster tool architecture for processing a substrate

Integrated thermal unit having a shuttle with two-axis movement

Integrated thermal unit having laterally adjacent bake and chill pl...

Integrated thermal unit having a shuttle with a temperature control...

Bake plate having engageable thermal mass

Electron beam treatment apparatus

Patents Applicationslast 30 patents

HEATED CERAMIC FACEPLATE

SEMICONDUCTOR PROCESSING APPARATUS FOR HIGH RF POWER PROCESS

METHODS AND APPARATUS FOR CONTROLLING SUBSTRATE UNIFORMITY

METHODS AND APPARATUS FOR CONTROLLING SUBSTRATE UNIFORMITY

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

SUBSTRATE SUPPORT ASSEMBLY FOR THIN FILM DEPOSITION SYSTEMS

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

PROCESSING SYSTEMS AND APPARATUSES HAVING A SHAFT COVER

METHOD AND APPARATUS FOR INDUCING TURBULENT FLOW OF A PROCESSING CH...

CLUSTER TOOL FOR LEDS

HVPE PRECURSOR SOURCE HARDWARE

HVPE CHAMBER HARDWARE

AUTOMATIC SUBSTRATE LOADING STATION

HIGH PRODUCTIVITY PLASMA PROCESSING CHAMBER

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

ZONE CONTROL HEATER PLATE FOR TRACK LITHOGRAPHY SYSTEMS

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

ACTIVELY CHILLED SUBSTRATE TRANSPORT MODULE

METHODS AND SYSTEMS FOR PERFORMING REAL-TIME WIRELESS TEMPERATURE M...

INTEGRATED THERMAL UNIT HAVING A SHUTTLE WITH TWO-AXIS MOVEMENT

INTEGRATED THERMAL UNIT HAVING A SHUTTLE WITH A TEMPERATURE CONTROL...

Zone control heater plate for track lithography systems

BAKE PLATE HAVING ENGAGEABLE THERMAL MASS

Faceplate with rapid temperature change

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

Integrated thermal unit having laterally adjacent bake and chill pl...