Qunhua Wang

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Gas confiner assembly for eliminating shadow frame
- Patent number 11,773,489
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Lai Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corner spoiler for improving profile uniformity
- Patent number 10,697,063
- Issue date Jun 30, 2020
- Applied Materials, Inc.
- Lai Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flip edge shadow frame
- Patent number 10,676,817
- Issue date Jun 9, 2020
- Applied Materials, Inc.
- Qunhua Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma uniformity control by gas diffuser hole design
- Patent number 10,312,058
- Issue date Jun 4, 2019
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma uniformity control by gas diffuser hole design
- Patent number 10,262,837
- Issue date Apr 16, 2019
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead support structure for improved gas flow
- Patent number 10,087,524
- Issue date Oct 2, 2018
- Applied Materials, Inc.
- Robin L. Tiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Amorphous silicon thickness uniformity improved by process diluted...
- Patent number 9,818,606
- Issue date Nov 14, 2017
- Applied Materials, Inc.
- Qunhua Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Run-to-run stability of film deposition
- Patent number 9,299,558
- Issue date Mar 29, 2016
- Applied Materials, Inc.
- Lai Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing a silicon containing layer with argon gas di...
- Patent number 9,287,137
- Issue date Mar 15, 2016
- Applied Materials, Inc.
- Qunhua Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma uniformity control by gas diffuser hole design
- Patent number 9,200,368
- Issue date Dec 1, 2015
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-layer amorphous silicon structure with improved poly-silicon...
- Patent number 9,048,099
- Issue date Jun 2, 2015
- Applied Materials, Inc.
- Qunhua Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead support structure for improved gas flow
- Patent number 8,721,791
- Issue date May 13, 2014
- Applied Materials, Inc.
- Robin L. Tiner
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Flow blocker plate
- Patent number D664249
- Issue date Jul 24, 2012
- Applied Materials, Inc.
- Qunhua Wang
- D23 - Environmental heating and cooling
Information Patent Grant
Plasma uniformity control by gas diffuser hole design
- Patent number 8,083,853
- Issue date Dec 27, 2011
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shadow frame with cross beam for semiconductor equipment
- Patent number 8,002,896
- Issue date Aug 23, 2011
- Applied Materials, Inc.
- Sakae Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of controlling the film properties of PECVD-deposited thin f...
- Patent number 7,785,672
- Issue date Aug 31, 2010
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for reducing arcing during plasma processing
- Patent number 7,501,161
- Issue date Mar 10, 2009
- Applied Materials, Inc.
- Li Hou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Controlling the properties and uniformity of a silicon nitride film...
- Patent number 7,125,758
- Issue date Oct 24, 2006
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shadow frame with cross beam for semiconductor equipment
- Patent number 6,960,263
- Issue date Nov 1, 2005
- Applied Materials, Inc.
- Sakae Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA UNIFORMITY CONTROL BY GAS DIFFUSER HOLE DESIGN
- Publication number 20180025890
- Publication date Jan 25, 2018
- Applied Materials, Inc.
- Soo Young CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA UNIFORMITY CONTROL BY GAS DIFFUSER HOLE DESIGN
- Publication number 20160056019
- Publication date Feb 25, 2016
- Applied Materials, Inc.
- Soo Young CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RUN-TO-RUN STABILITY OF FILM DEPOSITION
- Publication number 20150270107
- Publication date Sep 24, 2015
- Applied Materials, Inc.
- Lai ZHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CORNER SPOILER FOR IMPROVING PROFILE UNIFORMITY
- Publication number 20150211120
- Publication date Jul 30, 2015
- Applied Materials, Inc.
- Lai ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS CONFINER ASSEMBLY FOR ELIMINATING SHADOW FRAME
- Publication number 20150211121
- Publication date Jul 30, 2015
- Applied Materials, Inc.
- Lai ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMORPHOUS SILICON THICKNESS UNIFORMITY IMPROVED BY PROCESS DILUTED...
- Publication number 20140357065
- Publication date Dec 4, 2014
- Applied Materials, Inc.
- Qunhua WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-LAYER AMORPHOUS SILICON STRUCTURE WITH IMPROVED POLY-SILICON...
- Publication number 20140335680
- Publication date Nov 13, 2014
- Qunhua WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLIP EDGE SHADOW FRAME
- Publication number 20140251216
- Publication date Sep 11, 2014
- Qunhua WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD SUPPORT STRUCTURE FOR IMPROVED GAS FLOW
- Publication number 20140246521
- Publication date Sep 4, 2014
- Applied Materials, Inc.
- Robin L. TINER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
FLIP EDGE SHADOW FRAME
- Publication number 20130263782
- Publication date Oct 10, 2013
- Applied Materials, Inc.
- QUNHUA WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A SILICON CONTAINING LAYER WITH ARGON GAS DI...
- Publication number 20130087783
- Publication date Apr 11, 2013
- Applied Materials, Inc.
- Qunhua Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MINI BLOCKER PLATE WITH STANDOFF SPACERS
- Publication number 20130004681
- Publication date Jan 3, 2013
- Applied Materials, Inc.
- Alan Tso
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD SUPPORT STRUCTURE FOR IMPROVED GAS FLOW
- Publication number 20120027918
- Publication date Feb 2, 2012
- Applied Materials, Inc.
- Robin L. Tiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECISE TEMPERATURE CONTROL FOR TEOS APPLICATION BY HEAT TRANSFER F...
- Publication number 20120009347
- Publication date Jan 12, 2012
- Applied Materials, Inc.
- Dongsuh Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTAMINATION REDUCING LINER FOR INDUCTIVELY COUPLED CHAMBER
- Publication number 20120009356
- Publication date Jan 12, 2012
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Uniformity Control By Gas Diffuser Hole Design
- Publication number 20110290183
- Publication date Dec 1, 2011
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER IDLE PROCESS FOR IMPROVED REPEATABILITY OF FILMS
- Publication number 20080292811
- Publication date Nov 27, 2008
- YOUNG-JIN CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR DEPOSITION OVER LARGE AREA SUBSTRATES
- Publication number 20080282982
- Publication date Nov 20, 2008
- APPLIED MATERIALS, INC.
- John M. White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DISTRIBUTION UNIFORMITY IMPROVEMENT BY BAFFLE PLATE WITH MULTI-...
- Publication number 20080178807
- Publication date Jul 31, 2008
- Qunhua Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTAMINATION REDUCING LINER FOR INDUCTIVELY COUPLED CHAMBER
- Publication number 20080118663
- Publication date May 22, 2008
- APPLIED MATERIALS, INC.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma uniformity control by gas diffuser hole design
- Publication number 20060236934
- Publication date Oct 26, 2006
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas distribution uniformity improvement by baffle plate with multi-...
- Publication number 20060228490
- Publication date Oct 12, 2006
- APPLIED MATERIALS, INC.
- Qunhua Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sulfur hexafluoride remote plasma source clean
- Publication number 20060090773
- Publication date May 4, 2006
- APPLIED MATERIALS, INC.
- Soo Young Choi
- B08 - CLEANING
Information Patent Application
Shadow frame with cross beam for semiconductor equipment
- Publication number 20060030088
- Publication date Feb 9, 2006
- APPLIED MATERIALS, INC.
- Sakae Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for reducing arcing during plasma processing
- Publication number 20050266174
- Publication date Dec 1, 2005
- Li Hou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma uniformity control by gas diffuser hole design
- Publication number 20050251990
- Publication date Nov 17, 2005
- APPLIED MATERIALS, INC.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of controlling the film properties of PECVD-deposited thin f...
- Publication number 20050255257
- Publication date Nov 17, 2005
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Controlling the properties and uniformity of a silicon nitride film...
- Publication number 20050233595
- Publication date Oct 20, 2005
- APPLIED MATERIALS, INC.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Shadow frame with cross beam for semiconductor equipment
- Publication number 20030200928
- Publication date Oct 30, 2003
- Sakae Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System and method for metal induced crystallization of polycrystall...
- Publication number 20030203123
- Publication date Oct 30, 2003
- APPLIED MATERIALS, INC.
- Quanyaun Shang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Qunhua Wang

Person

Patents Grantslast 30 patents

Gas confiner assembly for eliminating shadow frame

Corner spoiler for improving profile uniformity

Flip edge shadow frame

Plasma uniformity control by gas diffuser hole design

Plasma uniformity control by gas diffuser hole design

Showerhead support structure for improved gas flow

Amorphous silicon thickness uniformity improved by process diluted...

Run-to-run stability of film deposition

Methods for depositing a silicon containing layer with argon gas di...

Plasma uniformity control by gas diffuser hole design

Multi-layer amorphous silicon structure with improved poly-silicon...

Showerhead support structure for improved gas flow

Flow blocker plate

Plasma uniformity control by gas diffuser hole design

Shadow frame with cross beam for semiconductor equipment

Method of controlling the film properties of PECVD-deposited thin f...

Methods and apparatus for reducing arcing during plasma processing

Controlling the properties and uniformity of a silicon nitride film...

Shadow frame with cross beam for semiconductor equipment

Patents Applicationslast 30 patents

PLASMA UNIFORMITY CONTROL BY GAS DIFFUSER HOLE DESIGN

PLASMA UNIFORMITY CONTROL BY GAS DIFFUSER HOLE DESIGN

RUN-TO-RUN STABILITY OF FILM DEPOSITION

CORNER SPOILER FOR IMPROVING PROFILE UNIFORMITY

GAS CONFINER ASSEMBLY FOR ELIMINATING SHADOW FRAME

AMORPHOUS SILICON THICKNESS UNIFORMITY IMPROVED BY PROCESS DILUTED...

MULTI-LAYER AMORPHOUS SILICON STRUCTURE WITH IMPROVED POLY-SILICON...

FLIP EDGE SHADOW FRAME

SHOWERHEAD SUPPORT STRUCTURE FOR IMPROVED GAS FLOW

FLIP EDGE SHADOW FRAME

METHODS FOR DEPOSITING A SILICON CONTAINING LAYER WITH ARGON GAS DI...

MINI BLOCKER PLATE WITH STANDOFF SPACERS

SHOWERHEAD SUPPORT STRUCTURE FOR IMPROVED GAS FLOW

PRECISE TEMPERATURE CONTROL FOR TEOS APPLICATION BY HEAT TRANSFER F...

CONTAMINATION REDUCING LINER FOR INDUCTIVELY COUPLED CHAMBER

Plasma Uniformity Control By Gas Diffuser Hole Design

CHAMBER IDLE PROCESS FOR IMPROVED REPEATABILITY OF FILMS

APPARATUS AND METHOD FOR DEPOSITION OVER LARGE AREA SUBSTRATES

GAS DISTRIBUTION UNIFORMITY IMPROVEMENT BY BAFFLE PLATE WITH MULTI-...

CONTAMINATION REDUCING LINER FOR INDUCTIVELY COUPLED CHAMBER

Plasma uniformity control by gas diffuser hole design

Gas distribution uniformity improvement by baffle plate with multi-...

Sulfur hexafluoride remote plasma source clean

Shadow frame with cross beam for semiconductor equipment

Methods and apparatus for reducing arcing during plasma processing

Plasma uniformity control by gas diffuser hole design

Method of controlling the film properties of PECVD-deposited thin f...

Controlling the properties and uniformity of a silicon nitride film...

Shadow frame with cross beam for semiconductor equipment

System and method for metal induced crystallization of polycrystall...