R. Suryanarayanan Iyer

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-zone resistive heater
- Patent number 9,892,941
- Issue date Feb 13, 2018
- Applied Materials, Inc.
- Anqing Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for treating substrates and films with photoexcitation
- Patent number 7,601,652
- Issue date Oct 13, 2009
- Applied Materials, Inc.
- Kaushal K. Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon nitride film with stress control
- Patent number 7,488,690
- Issue date Feb 10, 2009
- Applied Materials, Inc.
- R. Suryanarayanan Iyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for silicon based dielectric chemical vapor deposition
- Patent number 7,473,655
- Issue date Jan 6, 2009
- Applied Materials, Inc.
- Yaxin Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of fabricating a silicon nitride stack
- Patent number 7,465,669
- Issue date Dec 16, 2008
- Applied Materials, Inc.
- R. Suryanarayanan Iyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for fabricating controlled stress silicon nitride films
- Patent number 7,416,995
- Issue date Aug 26, 2008
- Applied Materials, Inc.
- R. Suryanarayanan Iyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for silicon nitride chemical vapor deposition
- Patent number 7,365,029
- Issue date Apr 29, 2008
- Applied Materials, Inc.
- R. Suryanarayanan Iyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single wafer thermal CVD processes for hemispherical grained silico...
- Patent number 7,341,907
- Issue date Mar 11, 2008
- Applied Materials, Inc.
- Ming Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for fabricating silicon nitride spacer structures
- Patent number 7,294,581
- Issue date Nov 13, 2007
- Applied Materials, Inc.
- R. Suryanarayanan Iyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming silicon comprising films using hexachlorodisila...
- Patent number 6,884,464
- Issue date Apr 26, 2005
- Applied Materials, Inc.
- Lee Luo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ROTATING SUBSTRATE SUPPORT AND METHODS OF USE
- Publication number 20100224130
- Publication date Sep 9, 2010
- Jacob Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-Zone Resistive Heater
- Publication number 20090314762
- Publication date Dec 24, 2009
- Applied Materials, Inc.
- Anqing Cui
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR SILICON BASED DIELECTRIC CHEMICAL VAPOR DEPOSITION
- Publication number 20090111284
- Publication date Apr 30, 2009
- Yaxin Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF POLY-SILICON GRAIN STRUCTURE FORMATION
- Publication number 20080246101
- Publication date Oct 9, 2008
- Applied Materials Inc.
- Ming Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE HEATING METHOD AND APPARATUS
- Publication number 20080197125
- Publication date Aug 21, 2008
- Applied Materials, Inc.
- ANQING CUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR LOW TEMPERATURE AND LOW K SiBN DEPOSITION
- Publication number 20080145536
- Publication date Jun 19, 2008
- APPLIED MATERIALS, INC.
- KANGZHAN ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW THERMAL BUDGET CHEMICAL VAPOR DEPOSITION PROCESSING
- Publication number 20080119059
- Publication date May 22, 2008
- Jacob W. Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-zone resistive heater
- Publication number 20070125762
- Publication date Jun 7, 2007
- APPLIED MATERIALS, INC.
- Anqing Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fabricating controlled stress silicon nitride films
- Publication number 20070111546
- Publication date May 17, 2007
- APPLIED MATERIALS, INC.
- R. Suryanarayanan Iyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of fabricating a silicon nitride stack
- Publication number 20070111538
- Publication date May 17, 2007
- APPLIED MATERIALS, INC.
- R. Suryanarayanan Iyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for fabricating silicon nitride spacer structures
- Publication number 20070087575
- Publication date Apr 19, 2007
- APPLIED MATERIALS, INC.
- R. Suryanarayanan Iyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for the low temperature deposition of doped si...
- Publication number 20070082507
- Publication date Apr 12, 2007
- APPLIED MATERIALS, INC.
- R. Suryanarayanan Iyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for silicon based dielectric chemical vapor deposition
- Publication number 20060286818
- Publication date Dec 21, 2006
- Yaxin Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for silicon based dielectric deposition and clean with photo...
- Publication number 20060286819
- Publication date Dec 21, 2006
- APPLIED MATERIALS, INC.
- Sean M. Seutter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for treating substrates and films with photoexcitation
- Publication number 20060286820
- Publication date Dec 21, 2006
- APPLIED MATERIALS, INC.
- Kaushal K. Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Rotating substrate support and methods of use
- Publication number 20060281310
- Publication date Dec 14, 2006
- APPLIED MATERIALS, INC.
- Jacob Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Single wafer thermal CVD processes for hemispherical grained silico...
- Publication number 20060223333
- Publication date Oct 5, 2006
- Ming Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for the deposition of silicon nitride films
- Publication number 20060102076
- Publication date May 18, 2006
- APPLIED MATERIALS, INC.
- Jacob W. Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Silicon nitride film with stress control
- Publication number 20060009041
- Publication date Jan 12, 2006
- R. Suryanarayanan Iyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for silicon nitride chemical vapor deposition
- Publication number 20050255714
- Publication date Nov 17, 2005
- APPLIED MATERIALS, INC.
- R. Suryanarayanan Iyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thermal chemical vapor deposition of silicon nitride using BTBAS bi...
- Publication number 20050109276
- Publication date May 26, 2005
- APPLIED MATERIALS, INC.
- R. Suryanarayanan Iyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for forming silicon comprising films using hexachlorodisila...
- Publication number 20040086640
- Publication date May 6, 2004
- APPLIED MATERIALS, INC.
- Lee Luo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

R. Suryanarayanan Iyer

Person

Patents Grantslast 30 patents

Multi-zone resistive heater

Method for treating substrates and films with photoexcitation

Silicon nitride film with stress control

Method for silicon based dielectric chemical vapor deposition

Method of fabricating a silicon nitride stack

Method for fabricating controlled stress silicon nitride films

Method for silicon nitride chemical vapor deposition

Single wafer thermal CVD processes for hemispherical grained silico...

Method for fabricating silicon nitride spacer structures

Methods for forming silicon comprising films using hexachlorodisila...

Patents Applicationslast 30 patents

ROTATING SUBSTRATE SUPPORT AND METHODS OF USE

Multi-Zone Resistive Heater

METHOD FOR SILICON BASED DIELECTRIC CHEMICAL VAPOR DEPOSITION

METHOD OF POLY-SILICON GRAIN STRUCTURE FORMATION

SUBSTRATE HEATING METHOD AND APPARATUS

METHOD AND APPARATUS FOR LOW TEMPERATURE AND LOW K SiBN DEPOSITION

LOW THERMAL BUDGET CHEMICAL VAPOR DEPOSITION PROCESSING

Multi-zone resistive heater

Method for fabricating controlled stress silicon nitride films

Method of fabricating a silicon nitride stack

Method for fabricating silicon nitride spacer structures

Method and apparatus for the low temperature deposition of doped si...

Method for silicon based dielectric chemical vapor deposition

Method for silicon based dielectric deposition and clean with photo...

Method for treating substrates and films with photoexcitation

Rotating substrate support and methods of use

Single wafer thermal CVD processes for hemispherical grained silico...

Apparatus and method for the deposition of silicon nitride films

Silicon nitride film with stress control

Method for silicon nitride chemical vapor deposition

Thermal chemical vapor deposition of silicon nitride using BTBAS bi...

Methods for forming silicon comprising films using hexachlorodisila...