Rachel E. Batzer

Person

Beaverton, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Integrated showerhead with improved hole pattern for delivering rad...
- Patent number 12,116,669
- Issue date Oct 15, 2024
- Lam Research Corporation
- Rachel Batzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 12,000,047
- Issue date Jun 4, 2024
- Lam Research Corporation
- Rachel E. Batzer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Minimizing radical recombination using ALD silicon oxide surface co...
- Patent number 11,920,239
- Issue date Mar 5, 2024
- Lam Research Corporation
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer level uniformity control in remote plasma film deposition
- Patent number 11,702,748
- Issue date Jul 18, 2023
- Lam Research Corporation
- Geoffrey Hohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 11,608,559
- Issue date Mar 21, 2023
- Lam Research Corporation
- Rachel Batzer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High density hole pattern dual plenum hole showerhead assembly
- Patent number D948658
- Issue date Apr 12, 2022
- Lam Research Corporation
- Aaron Blake Miller
- D23 - Environmental heating and cooling
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 11,101,164
- Issue date Aug 24, 2021
- Lam Research Corporation
- Rachel Batzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated showerhead with improved hole pattern for delivering rad...
- Patent number 11,015,247
- Issue date May 25, 2021
- Lam Research Corporation
- Rachel Batzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 10,604,841
- Issue date Mar 31, 2020
- Lam Research Corporation
- Rachel Batzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Minimizing radical recombination using ALD silicon oxide surface co...
- Patent number 9,828,672
- Issue date Nov 28, 2017
- Lam Research Corporation
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED SHOWERHEAD WITH IMPROVED HOLE PATTERN FOR DELIVERING RAD...
- Publication number 20250003074
- Publication date Jan 2, 2025
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUSES FOR CLEANING A MULTI-STATION SEMICONDUCTOR PROCESSING C...
- Publication number 20250006514
- Publication date Jan 2, 2025
- LAM RESEARCH CORPORATION
- Harish Kumar Premakumar
- B08 - CLEANING
Information Patent Application
APPARATUSES AND SYSTEMS FOR AMMONIA/CHLORINE CHEMISTRY SEMICONDUCTO...
- Publication number 20240412953
- Publication date Dec 12, 2024
- LAM RESEARCH CORPORATION
- Bradley Taylor Streng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20240318312
- Publication date Sep 26, 2024
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...
- Publication number 20240218509
- Publication date Jul 4, 2024
- LAM RESEARCH CORPORATION
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD WITH INTEGRAL DIVERT FLOW PATH
- Publication number 20230374661
- Publication date Nov 23, 2023
- LAM RESEARCH CORPORATION
- Gopinath BHIMARASETTI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE PLASMA ARCHITECTURE FOR TRUE RADICAL PROCESSING
- Publication number 20230332291
- Publication date Oct 19, 2023
- LAM RESEARCH CORPORATION
- Bhadri VARADARAJAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER LEVEL UNIFORMITY CONTROL IN REMOTE PLASMA FILM DEPOSITION
- Publication number 20230304156
- Publication date Sep 28, 2023
- LAM RESEARCH CORPORATION
- Geoffrey HOHN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INCREASING PLASMA UNIFORMITY IN A RECEPTACLE
- Publication number 20230223238
- Publication date Jul 13, 2023
- LAM RESEARCH CORPORATION
- Tongtong Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20230175134
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PROTECTIVE COATING FOR A SEMICONDUCTOR REACTION CHAMBER
- Publication number 20230038880
- Publication date Feb 9, 2023
- LAM RESEARCH CORPORATION
- Alon Ganany
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTAL SETUP USING CAMERA WAFER
- Publication number 20220282380
- Publication date Sep 8, 2022
- LAM RESEARCH CORPORATION
- Prasanna KULKARNI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INDEPENDENTLY ADJUSTABLE FLOWPATH CONDUCTANCE IN MULTI-STATION SEMI...
- Publication number 20220228263
- Publication date Jul 21, 2022
- LAM RESEARCH CORPORATION
- Michael Philip Roberts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...
- Publication number 20220145459
- Publication date May 12, 2022
- LAM RESEARCH CORPORATION
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20210371982
- Publication date Dec 2, 2021
- LAM RESEARCH CORPORATION
- Rachel BATZER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH IMPROVED HOLE PATTERN FOR DELIVERING RAD...
- Publication number 20210269918
- Publication date Sep 2, 2021
- LAM RESEARCH CORPORATION
- Rachel BATZER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED SHOWERHEAD WITH IMPROVED HOLE PATTERN FOR DELIVERING RAD...
- Publication number 20190177846
- Publication date Jun 13, 2019
- LAM RESEARCH CORPORATION
- Rachel BATZER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER LEVEL UNIFORMITY CONTROL IN REMOTE PLASMA FILM DEPOSITION
- Publication number 20180251893
- Publication date Sep 6, 2018
- LAM RESEARCH CORPORATION
- Geoffrey Hohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20180163305
- Publication date Jun 14, 2018
- LAM RESEARCH CORPORATION
- Rachel Batzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...
- Publication number 20180044791
- Publication date Feb 15, 2018
- LAM RESEARCH CORPORATION
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...
- Publication number 20160281230
- Publication date Sep 29, 2016
- LAM RESEARCH CORPORATION
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-PLENUM SHOWERHEAD WITH TEMPERATURE CONTROL
- Publication number 20140235069
- Publication date Aug 21, 2014
- Patrick G. Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Rachel E. Batzer

Person

Patents Grantslast 30 patents

Integrated showerhead with improved hole pattern for delivering rad...

Integrated showerhead with thermal control for delivering radical a...

Minimizing radical recombination using ALD silicon oxide surface co...

Wafer level uniformity control in remote plasma film deposition

Integrated showerhead with thermal control for delivering radical a...

High density hole pattern dual plenum hole showerhead assembly

Integrated showerhead with thermal control for delivering radical a...

Integrated showerhead with improved hole pattern for delivering rad...

Integrated showerhead with thermal control for delivering radical a...

Minimizing radical recombination using ALD silicon oxide surface co...

Patents Applicationslast 30 patents

INTEGRATED SHOWERHEAD WITH IMPROVED HOLE PATTERN FOR DELIVERING RAD...

APPARATUSES FOR CLEANING A MULTI-STATION SEMICONDUCTOR PROCESSING C...

APPARATUSES AND SYSTEMS FOR AMMONIA/CHLORINE CHEMISTRY SEMICONDUCTO...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...

SHOWERHEAD WITH INTEGRAL DIVERT FLOW PATH

REMOTE PLASMA ARCHITECTURE FOR TRUE RADICAL PROCESSING

WAFER LEVEL UNIFORMITY CONTROL IN REMOTE PLASMA FILM DEPOSITION

INCREASING PLASMA UNIFORMITY IN A RECEPTACLE

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

PROTECTIVE COATING FOR A SEMICONDUCTOR REACTION CHAMBER

PEDESTAL SETUP USING CAMERA WAFER

INDEPENDENTLY ADJUSTABLE FLOWPATH CONDUCTANCE IN MULTI-STATION SEMI...

MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

INTEGRATED SHOWERHEAD WITH IMPROVED HOLE PATTERN FOR DELIVERING RAD...

INTEGRATED SHOWERHEAD WITH IMPROVED HOLE PATTERN FOR DELIVERING RAD...

WAFER LEVEL UNIFORMITY CONTROL IN REMOTE PLASMA FILM DEPOSITION

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...

MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...

MULTI-PLENUM SHOWERHEAD WITH TEMPERATURE CONTROL