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Rafael C. Howell
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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method of determining characteristic of patterning process based on...
Patent number
12,092,963
Issue date
Sep 17, 2024
ASML Netherlands B.V.
Xingyue Peng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Wavefront optimization for tuning scanner based on performance matc...
Patent number
11,977,334
Issue date
May 7, 2024
ASML Netherlands B.V.
Duan-Fu Stephen Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for determining patterning device pattern based on manufactu...
Patent number
11,972,194
Issue date
Apr 30, 2024
ASML Netherlands B.V.
Roshni Biswas
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Methods of determining scattering of radiation by structures of fin...
Patent number
11,789,371
Issue date
Oct 17, 2023
ASML Netherlands B.V.
Yu Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for determining curvilinear patterns for patterning device
Patent number
11,734,490
Issue date
Aug 22, 2023
ASML Netherlands B.V.
Quan Zhang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Methods of tuning process models
Patent number
11,614,690
Issue date
Mar 28, 2023
ASML Netherlands B.V.
Mu Feng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Wavefront optimization for tuning scanner based on performance matc...
Patent number
11,586,114
Issue date
Feb 21, 2023
ASML Netherlands B.V.
Duan-Fu Stephen Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for determining patterning device pattern based on manufactu...
Patent number
11,580,289
Issue date
Feb 14, 2023
ASML Netherlands B.V.
Roshni Biswas
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Simulation of lithography using multiple-sampling of angular distri...
Patent number
11,506,984
Issue date
Nov 22, 2022
ASML Netherlands B.V.
Duan-Fu Stephen Hsu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Methods of determining scattering of radiation by structures of fin...
Patent number
11,409,203
Issue date
Aug 9, 2022
ASML Netherlands B.V.
Yu Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for determining curvilinear patterns for patterning device
Patent number
11,232,249
Issue date
Jan 25, 2022
ASML Netherlands B.V.
Quan Zhang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Profile aware source-mask optimization
Patent number
11,054,750
Issue date
Jul 6, 2021
ASML Netherlands B.V.
Duan-Fu Stephen Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of determining scattering of radiation by structures of fin...
Patent number
11,016,395
Issue date
May 25, 2021
ASML Netherlands B.V.
Yu Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Binarization method and freeform mask optimization flow
Patent number
10,990,003
Issue date
Apr 27, 2021
ASML Netherlands B.V.
Duan-Fu Stephen Hsu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Discrete source mask optimization
Patent number
10,558,124
Issue date
Feb 11, 2020
ASML Netherlands B.V.
Xiaofeng Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Flows of optimization for lithographic processes
Patent number
10,459,346
Issue date
Oct 29, 2019
ASML Netherlands B.V.
Duan-Fu Stephen Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optimization flows of source, mask and projection optics
Patent number
10,401,732
Issue date
Sep 3, 2019
ASML Netherlands B.V.
Duan-Fu Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Discrete source mask optimization
Patent number
10,191,384
Issue date
Jan 29, 2019
ASML Netherlands B.V.
Xiaofeng Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Flows of optimization for lithographic processes
Patent number
10,025,201
Issue date
Jul 17, 2018
ASML Netherlands B.V.
Duan-Fu Stephen Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optimization flows of source, mask and projection optics
Patent number
9,588,438
Issue date
Mar 7, 2017
ASML Netherlands B.V.
Duan-Fu Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Gradient-based pattern and evaluation point selection
Patent number
8,898,599
Issue date
Nov 25, 2014
ASML Netherlands B.V.
Xiaofeng Liu
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF DETERMINING CHARACTERISTIC OF PATTERNING PROCESS BASED ON...
Publication number
20240419086
Publication date
Dec 19, 2024
ASML NETHERLANDS B.V.
Xingyue PENG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS, SOFTWARE, AND SYSTEMS FOR DETERMINATION OF CONSTANT-WIDTH...
Publication number
20240353749
Publication date
Oct 24, 2024
ASML NETHERLANDS B.V.
Xingyue PENG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DETERMINING MASK RULE CHECK VIOLATIONS AND MASK DESIGN
Publication number
20240241436
Publication date
Jul 18, 2024
ASML NETHERLANDS B.V.
Xingyue PENG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ABERRATION IMPACT SYSTEMS, MODELS, AND MANUFACTURING PROCESSES
Publication number
20230205096
Publication date
Jun 29, 2023
ASML NETHERLANDS B.V.
Xingyue PENG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
WAVEFRONT OPTIMIZATION FOR TUNING SCANNER BASED ON PERFORMANCE MATC...
Publication number
20230161264
Publication date
May 25, 2023
ASML NETHERLANDS B.V.
Duan-Fu Stephen HSU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DETERMINING PATTERNING DEVICE PATTERN BASED ON MANUFACTU...
Publication number
20230141799
Publication date
May 11, 2023
ASML NETHERLANDS B.V.
Roshni BISWAS
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHODS OF DETERMINING SCATTERING OF RADIATION BY STRUCTURES OF FIN...
Publication number
20220373892
Publication date
Nov 24, 2022
ASML NETHERLANDS B.V.
Yu CAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR PHOTOLITHOGRAPHIC IMAGING
Publication number
20220276564
Publication date
Sep 1, 2022
Mir Farrokh SHAYEGAN SALEK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF DETERMINING CHARACTERISTIC OF PATTERNING PROCESS BASED ON...
Publication number
20220229374
Publication date
Jul 21, 2022
ASML NETHERLANS B.V.
Xingyue PENG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DETERMINING CURVILINEAR PATTERNS FOR PATTERNING DEVICE
Publication number
20220121804
Publication date
Apr 21, 2022
ASML Netherland B.V.
Quan Zhang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR DETERMINING PATTERNING DEVICE PATTERN BASED ON MANUFACTU...
Publication number
20220050381
Publication date
Feb 17, 2022
ASML NETHERLANDS B.V.
Roshni BISWAS
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
WAVEFRONT OPTIMIZATION FOR TUNING SCANNER BASED ON PERFORMANCE MATC...
Publication number
20210364929
Publication date
Nov 25, 2021
ASML NETHERLANDS B.V.
Duan-Fu Stephen HSU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS OF DETERMINING SCATTERING OF RADIATION BY STRUCTURES OF FIN...
Publication number
20210271173
Publication date
Sep 2, 2021
ASML NETHERLANDS B.V.
Yu CAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DETERMINING CURVILINEAR PATTERNS FOR PATTERNING DEVICE
Publication number
20210048753
Publication date
Feb 18, 2021
ASML NETHERLANDS B.V.
Quan ZHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS FOR TRAINING MACHINE LEARNING MODEL FOR COMPUTATION LITHOGR...
Publication number
20200380362
Publication date
Dec 3, 2020
ASML NETHERLANDS B.V.
Yu CAO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
BINARIZATION METHOD AND FREEFORM MASK OPTIMIZATION FLOW
Publication number
20200363713
Publication date
Nov 19, 2020
ASML NETHERLANDS B.V.
Duan-Fu Stephen HSU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHODS OF DETERMINING SCATTERING OF RADIATION BY STRUCTURES OF FIN...
Publication number
20200073260
Publication date
Mar 5, 2020
ASML NETHERLANDS B.V.
Yu CAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS OF TUNING PROCESS MODELS
Publication number
20190369498
Publication date
Dec 5, 2019
ASML NETHERLANDS B.V.
Mu FENG
G05 - CONTROLLING REGULATING
Information
Patent Application
DISCRETE SOURCE MASK OPTIMIZATION
Publication number
20190155165
Publication date
May 23, 2019
ASML NETHERLANDS B.V.
Xiaofeng LIU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLOWS OF OPTIMIZATION FOR LITHOGRAPHIC PROCESSES
Publication number
20180341186
Publication date
Nov 29, 2018
ASML NETHERLANDS B.V.
Duan-Fu Stephen HSU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SIMULATION OF LITHOGRAPHY USING MULTIPLE-SAMPLING OF ANGULAR DISTRI...
Publication number
20180120709
Publication date
May 3, 2018
ASML NETHERLANDS B.V.
Duan-Fu Stephen HSU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
OPTIMIZATION FLOWS OF SOURCE, MASK AND PROJECTION OPTICS
Publication number
20170176864
Publication date
Jun 22, 2017
ASML NETHERLANDS B.V.
Duan-Fu HSU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLOWS OF OPTIMIZATION FOR LITHOGRAPHIC PROCESSES
Publication number
20170038692
Publication date
Feb 9, 2017
ASML NETHERLANDS B.V.
Duan-Fu Stephen HSU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROFILE AWARE SOURCE-MASK OPTIMIZATION
Publication number
20160231654
Publication date
Aug 11, 2016
ASML NETHERLANDS B.V.
Duan-Fu Stephen HSU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DISCRETE SOURCE MASK OPTIMIZATION
Publication number
20150378262
Publication date
Dec 31, 2015
Xiaofeng LIU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
GRADIENT-BASED PATTERN AND EVALUATION POINT SELECTION
Publication number
20130326437
Publication date
Dec 5, 2013
ASML NETHERLANDS B.V.
Xiaofeng LIU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Optimization Flows of Source, Mask and Projection Optics
Publication number
20120113404
Publication date
May 10, 2012
ASML NETHERLANDS B.V.
Duan-Fu Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY