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Rahul Jairath
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Integrated pad and belt for chemical mechanical polishing
Patent number
6,656,025
Issue date
Dec 2, 2003
Lam Research Corporation
Anil K. Pant
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for in-situ monitoring of thickness during che...
Patent number
6,621,584
Issue date
Sep 16, 2003
Lam Research Corporation
Jiri Pecen
B24 - GRINDING POLISHING
Information
Patent Grant
Method of transporting a semiconductor wafer in a wafer polishing s...
Patent number
6,517,418
Issue date
Feb 11, 2003
Lam Research Corporation
Erik H. Engdahl
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for polishing semiconductor wafers
Patent number
6,336,845
Issue date
Jan 8, 2002
Lam Research Corporation
Erik H. Engdahl
B24 - GRINDING POLISHING
Information
Patent Grant
Integrated pad and belt for chemical mechanical polishing
Patent number
6,328,642
Issue date
Dec 11, 2001
Lam Research Corporation
Anil K. Pant
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for in-situ end-point detection and optimizati...
Patent number
6,261,155
Issue date
Jul 17, 2001
Lam Research Corporation
Rahul Jairath
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for in-situ end-point detection and optimizati...
Patent number
6,146,248
Issue date
Nov 14, 2000
Lam Research Corporation
Rahul Jairath
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for in-situ monitoring of thickness using a mu...
Patent number
6,111,634
Issue date
Aug 29, 2000
Lam Research Corporation
Jiri Pecen
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for in-situ monitoring of thickness during che...
Patent number
6,108,091
Issue date
Aug 22, 2000
Lam Research Corporation
Jiri Pecen
B24 - GRINDING POLISHING
Information
Patent Grant
Method for dressing a polishing pad during polishing of a semicondu...
Patent number
5,913,714
Issue date
Jun 22, 1999
OnTrak Systems, Inc.
Konstantin Volodarsky
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer polishing head with pad dressing element
Patent number
5,857,899
Issue date
Jan 12, 1999
OnTrak Systems, Inc.
Konstantin Volodarsky
B24 - GRINDING POLISHING
Information
Patent Grant
Sensors for a linear polisher
Patent number
5,762,536
Issue date
Jun 9, 1998
Lam Research Corporation
Anil K. Pant
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
Integrated pad and belt for chemical mechanical polishing
Publication number
20050118936
Publication date
Jun 2, 2005
Lam Research Corporation
Anil K. Pant
B24 - GRINDING POLISHING
Information
Patent Application
Method and apparatus for in-situ monitoring of thickness during che...
Publication number
20020089676
Publication date
Jul 11, 2002
Jiri Pecen
G01 - MEASURING TESTING
Information
Patent Application
System and method for creating and navigating a linear hypermedia r...
Publication number
20020031988
Publication date
Mar 14, 2002
Lam Research Corporation
Anil K. Pant
B24 - GRINDING POLISHING
Information
Patent Application
Method of transporting a semiconductor wafer in a wafer polishing s...
Publication number
20010039168
Publication date
Nov 8, 2001
Lam Research Corporation
Erik H. Engdahl
B24 - GRINDING POLISHING