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Patents Grants
last 30 patents
Information
Patent Grant
Sensor system, substrate handling system and lithographic apparatus
Patent number
10,007,197
Issue date
Jun 26, 2018
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device manufacturing method, orientation determination method and l...
Patent number
8,064,730
Issue date
Nov 22, 2011
ASML Netherlands B.V.
Raimond Visser
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic support structure
Patent number
7,486,384
Issue date
Feb 3, 2009
ASML Netherlands B.V.
Patricius Aloysius Jacobus Tinnemans
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Lithographic apparatus substrate alignment
Patent number
7,408,618
Issue date
Aug 5, 2008
ASML Netherlands B.V.
Raimond Visser
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exchangeable object handling apparatus, lithographic apparatus incl...
Patent number
7,394,525
Issue date
Jul 1, 2008
ASML Netherlands B.V.
Jan Jaap Kuit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Temperature conditioned load lock, lithographic apparatus comprisin...
Patent number
7,394,520
Issue date
Jul 1, 2008
ASML Netherlands B.V.
Albert Jan Hendrik Klomp
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method and device for alignment of a substrate
Patent number
7,307,695
Issue date
Dec 11, 2007
ASML Netherlands B.V.
Johannes Martinus Andreas Hazenberg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Particle detection device, lithographic apparatus and device manufa...
Patent number
7,283,225
Issue date
Oct 16, 2007
ASML Netherlands B.V.
Johannes Onvlee
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,131,999
Issue date
Nov 7, 2006
ASML Netherlands B.V.
Jan Frederik Hoogkamp
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic projection assembly, substrate handling apparatus and...
Patent number
7,123,349
Issue date
Oct 17, 2006
ASML Netherlands B.V.
Pieter Johannes Marius Van Groos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,106,420
Issue date
Sep 12, 2006
ASML Netherlands B.V.
Jan Jaap Kuit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SENSOR SYSTEM, SUBSTRATE HANDLING SYSTEM AND LITHOGRAPHIC APPARATUS
Publication number
20160370716
Publication date
Dec 22, 2016
ASML NETHERLANDS B.V.
Joeri LOF
G01 - MEASURING TESTING
Information
Patent Application
Lithographic Apparatus and Substrate Handling Method
Publication number
20130077078
Publication date
Mar 28, 2013
ASML NETHERLANDS B.V.
Raymond Wilhelmus Louis LAFARRE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate Processing Apparatus and Device Manufacturing Method
Publication number
20090148604
Publication date
Jun 11, 2009
ASML NETHERLANDS B.V.
Raimond VISSER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic support structure
Publication number
20080297758
Publication date
Dec 4, 2008
ASML NETHERLANDS B.V.
Patricius Aloysius Jacobus Tinnemans
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
End effector with integrated illumination system for reticle pre-al...
Publication number
20070035709
Publication date
Feb 15, 2007
ASML NETHERLANDS B.V.
Jan Jaap Kuit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus substrate alignment
Publication number
20070002298
Publication date
Jan 4, 2007
ASML NETHERLANDS B.V.
Raimond Visser
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060087636
Publication date
Apr 27, 2006
ASML NETHERLANDS B.V.
Jan Jaap Kuit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Particle detection device, lithographic apparatus and device manufa...
Publication number
20060072108
Publication date
Apr 6, 2006
ASML Nethderlands B.V.
Johannes Onvlee
G01 - MEASURING TESTING
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060066832
Publication date
Mar 30, 2006
ASML NETHERLANDS B.V.
Jan Frederik Hoogkamp
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060066833
Publication date
Mar 30, 2006
ASML NETHERLANDS B.V.
Jan Jaap Kuit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and device for alignment of a substrate
Publication number
20050140960
Publication date
Jun 30, 2005
ASML NETHERLANDS B.V.
Johannes Martinus Andreas Hazenberg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device manufacturing method, orientation determination method and l...
Publication number
20050117794
Publication date
Jun 2, 2005
ASML NETHERLANDS B.V.
Raimond Visser
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Temperature conditioned load lock, lithographic apparatus comprisin...
Publication number
20050054217
Publication date
Mar 10, 2005
ASML NETHERLANDS B.V.
Albert Jan Hendrik Klomp
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic support structure
Publication number
20040246459
Publication date
Dec 9, 2004
ASML NETHERLANDS B.V.
Patricius Aloysius Jacobus Tinnemans
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
Lithographic projection assembly, substrate handling apparatus and...
Publication number
20040218168
Publication date
Nov 4, 2004
ASML NETHERLANDS B.V.
Pieter Johannes Marius Van Groos
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY