Rainer Obweger

Person

Lind/Dr., AT

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 11,195,730
- Issue date Dec 7, 2021
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 10,490,426
- Issue date Nov 26, 2019
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating surfaces of wafer-shaped articles
- Patent number 10,269,615
- Issue date Apr 23, 2019
- Lam Research AG
- Ulrich Tschinderle
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus for treating surfaces of wafer-shaped articles
- Patent number 10,056,287
- Issue date Aug 21, 2018
- Lam Research AG
- Ulrich Tschinderle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating surfaces of wafer-shaped articles
- Patent number 10,043,686
- Issue date Aug 7, 2018
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for measuring the distribution or impulse of a series of dro...
- Patent number 9,960,057
- Issue date May 1, 2018
- Lam Research AG
- Michael Dalmer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for surface treatment using inorganic acid and...
- Patent number 9,653,328
- Issue date May 16, 2017
- Lam Research AG
- Harald Okorn-Schmidt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for treating surfaces of wafer-shaped articles and gripping...
- Patent number 9,633,890
- Issue date Apr 25, 2017
- Lam Research AG
- Ulrich Tschinderle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating surfaces of wafer-shaped articles
- Patent number 9,597,701
- Issue date Mar 21, 2017
- Lam Research AG
- Rainer Obweger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for fluid treating plate-like articles
- Patent number 8,974,631
- Issue date Mar 10, 2015
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for treating disc-like articles
- Patent number 8,833,380
- Issue date Sep 16, 2014
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for treating disc-like article and method for operating same
- Patent number 8,791,614
- Issue date Jul 29, 2014
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for surface treatment using inorganic acid and...
- Patent number 8,709,165
- Issue date Apr 29, 2014
- Lam Research AG
- Harald Okorn-Schmidt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for holding wafer shaped articles
- Patent number 8,646,767
- Issue date Feb 11, 2014
- Lam Research AG
- Franz Kumnig
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for ultrasonic wet treatment of plate-like art...
- Patent number 8,573,236
- Issue date Nov 5, 2013
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for treating disc-like articles
- Patent number 8,490,634
- Issue date Jul 23, 2013
- Lam Research AG
- Rainer Obweger
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Closed chamber with fluid separation feature
- Patent number 8,485,204
- Issue date Jul 16, 2013
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for wet treating disc-like substrates
- Patent number 8,435,356
- Issue date May 7, 2013
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for wet treating disc-like substrates
- Patent number 8,261,757
- Issue date Sep 11, 2012
- Lam Research AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Annular receptacle for a rotating carrier
- Patent number 7,052,577
- Issue date May 30, 2006
- Sez AG
- Rainer Harald Obweger
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DEVICE FOR MEASURING THE DISTRIBUTION OR IMPULSE OF A SERIES OF DRO...
- Publication number 20160181129
- Publication date Jun 23, 2016
- LAM RESEARCH AG
- Michael DALMER
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20160064242
- Publication date Mar 3, 2016
- LAM RESEARCH AG
- Rainer OBWEGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES
- Publication number 20160027680
- Publication date Jan 28, 2016
- LAM RESEARCH AG
- Ulrich TSCHINDERLE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES
- Publication number 20150187612
- Publication date Jul 2, 2015
- LAM RESEARCH AG
- Rainer OBWEGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES
- Publication number 20150187629
- Publication date Jul 2, 2015
- LAM RESEARCH AG
- Rainer OBWEGER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD AND APPARATUS FOR SURFACE TREATMENT USING INORGANIC ACID AND...
- Publication number 20140209129
- Publication date Jul 31, 2014
- LAM RESEARCH AB
- Harald OKORN-SCHMIDT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS AND APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES
- Publication number 20130233356
- Publication date Sep 12, 2013
- LAM RESEARCH AG
- Rainer OBWEGER
- B08 - CLEANING
Information Patent Application
DEVICE FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES AND GRIPPING...
- Publication number 20130154203
- Publication date Jun 20, 2013
- LAM RESEARCH AG
- Ulrich TSCHINDERLE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20130101372
- Publication date Apr 25, 2013
- LAM RESEARCH AG
- Ulrich TSCHINDERLE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES
- Publication number 20130062839
- Publication date Mar 14, 2013
- LAM RESEARCH AG
- Ulrich TSCHINDERLE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR WET TREATING DISC-LIKE SUBSTRATES
- Publication number 20120167914
- Publication date Jul 5, 2012
- LAM RESEARCH AG
- Rainer OBWEGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SURFACE TREATMENT USING INORGANIC ACID AND...
- Publication number 20120138097
- Publication date Jun 7, 2012
- LAM RESEARCH AG
- Harald OKORN-SCHMIDT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE FOR HOLDING WAFER SHAPED ARTICLES
- Publication number 20120018940
- Publication date Jan 26, 2012
- LAM RESEARCH AG
- FRANZ KUMNIG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR TREATING DISC-LIKE ARTICLES
- Publication number 20110304107
- Publication date Dec 15, 2011
- LAM RESEARCH AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLOSED CHAMBER WITH FLUID SEPARATION FEATURE
- Publication number 20110290283
- Publication date Dec 1, 2011
- LAM RESEARCH AG
- Rainer OBWEGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR TREATING DISC-LIKE ARTICLES
- Publication number 20110253181
- Publication date Oct 20, 2011
- LAM RESEARCH AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR TREATING DISC-LIKE ARTICLE AND METHOD FOR OPERATING SAME
- Publication number 20110250044
- Publication date Oct 13, 2011
- LAM RESEARCH AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR ULTRASONIC WET TREATMENT OF PLATE-LIKE ART...
- Publication number 20100147336
- Publication date Jun 17, 2010
- SEZ AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR FLUID TREATING PLATE-LIKE ARTICLES
- Publication number 20090079122
- Publication date Mar 26, 2009
- SEZ AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device and method for wet treating disc-like substrates
- Publication number 20060151014
- Publication date Jul 13, 2006
- SEZ AG
- Rainer Obweger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Annular receptacle for a rotating carrier
- Publication number 20030056898
- Publication date Mar 27, 2003
- SEZ AG
- Rainer Harald Obweger
- H01 - BASIC ELECTRIC ELEMENTS

Rainer Obweger

Person

Patents Grantslast 30 patents

Method and apparatus for processing wafer-shaped articles

Method and apparatus for processing wafer-shaped articles

Apparatus for treating surfaces of wafer-shaped articles

Apparatus for treating surfaces of wafer-shaped articles

Apparatus for treating surfaces of wafer-shaped articles

Device for measuring the distribution or impulse of a series of dro...

Method and apparatus for surface treatment using inorganic acid and...

Device for treating surfaces of wafer-shaped articles and gripping...

Apparatus for treating surfaces of wafer-shaped articles

Device for fluid treating plate-like articles

Device for treating disc-like articles

Device for treating disc-like article and method for operating same

Method and apparatus for surface treatment using inorganic acid and...

Device for holding wafer shaped articles

Apparatus and method for ultrasonic wet treatment of plate-like art...

Device for treating disc-like articles

Closed chamber with fluid separation feature

Device and method for wet treating disc-like substrates

Device and method for wet treating disc-like substrates

Annular receptacle for a rotating carrier

Patents Applicationslast 30 patents

DEVICE FOR MEASURING THE DISTRIBUTION OR IMPULSE OF A SERIES OF DRO...

METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES

APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES

APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES

METHOD AND APPARATUS FOR SURFACE TREATMENT USING INORGANIC ACID AND...

PROCESS AND APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES

DEVICE FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES AND GRIPPING...

METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES

DEVICE AND METHOD FOR WET TREATING DISC-LIKE SUBSTRATES

METHOD AND APPARATUS FOR SURFACE TREATMENT USING INORGANIC ACID AND...

DEVICE FOR HOLDING WAFER SHAPED ARTICLES

DEVICE FOR TREATING DISC-LIKE ARTICLES

CLOSED CHAMBER WITH FLUID SEPARATION FEATURE

DEVICE FOR TREATING DISC-LIKE ARTICLES

DEVICE FOR TREATING DISC-LIKE ARTICLE AND METHOD FOR OPERATING SAME

APPARATUS AND METHOD FOR ULTRASONIC WET TREATMENT OF PLATE-LIKE ART...

DEVICE FOR FLUID TREATING PLATE-LIKE ARTICLES

Device and method for wet treating disc-like substrates

Annular receptacle for a rotating carrier