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Ralph Kim
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Beverly, MA, US
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last 30 patents
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Patent Grant
Method and system for introduction of an active material to a chemi...
Patent number
8,580,075
Issue date
Nov 12, 2013
Tokyo Electron Limited
John A. Hughes
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Patent Grant
Method and apparatus for bilayer photoresist dry development
Patent number
7,465,673
Issue date
Dec 16, 2008
Tokyo Electron Limited
Yoshiki Igarashi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD AND SYSTEM FOR INTRODUCTION OF AN ACTIVE MATERIAL TO A CHEMI...
Publication number
20120199288
Publication date
Aug 9, 2012
TOKYO ELECTRON LIMITED
John A. HUGHES
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Method and system for introduction of an active material to a chemi...
Publication number
20050067098
Publication date
Mar 31, 2005
TOKYO ELECTRON LIMITED
John A. Hughes
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for bilayer photoresist dry development
Publication number
20040185380
Publication date
Sep 23, 2004
TOKYO ELECTRON LIMITED
Yoshiki Igarashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY