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Ralph Wadensweiler
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for electrochemical mechanical processing
Patent number
7,678,245
Issue date
Mar 16, 2010
Applied Materials, Inc.
Yan Wang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Conductive pad
Patent number
7,427,340
Issue date
Sep 23, 2008
Applied Materials, Inc.
Rashid A. Mavliev
B24 - GRINDING POLISHING
Information
Patent Grant
Conductive polishing article for electrochemical mechanical polishing
Patent number
7,422,516
Issue date
Sep 9, 2008
Applied Materials, Inc.
Paul D. Butterfield
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Conductive polishing article for electrochemical mechanical polishing
Patent number
7,374,644
Issue date
May 20, 2008
Applied Materials, Inc.
Paul D. Butterfield
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Conductive pad with ion exchange membrane for electrochemical mecha...
Patent number
7,344,432
Issue date
Mar 18, 2008
Applied Materials, Inc.
Liang-Yun Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Conductive polishing article for electrochemical mechanical polishing
Patent number
7,311,592
Issue date
Dec 25, 2007
Applied Materials, Inc.
Liang-Yuh Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Semiconductor substrate processing apparatus with a passive substra...
Patent number
7,290,976
Issue date
Nov 6, 2007
Applied Materials, Inc.
Ralph M. Wadensweiler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pad assembly for electrochemical mechanical polishing
Patent number
7,285,036
Issue date
Oct 23, 2007
Applied Materials, Inc.
Shou-Sung Chang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Conductive polishing article for electrochemical mechanical polishing
Patent number
7,278,911
Issue date
Oct 9, 2007
Applied Materials, Inc.
Paul D. Butterfield
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Pad assembly for electrochemical mechanical processing
Patent number
7,137,868
Issue date
Nov 21, 2006
Applied Materials, Inc.
Shou-Sung Chang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Conductive polishing article for electrochemical mechanical polishing
Patent number
7,137,879
Issue date
Nov 21, 2006
Applied Materials, Inc.
Liang-Yuh Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Magnetically secured retaining ring
Patent number
7,134,948
Issue date
Nov 14, 2006
Applied Materials, Inc.
Ming-Kuei Tseng
B24 - GRINDING POLISHING
Information
Patent Grant
Conductive polishing article for electrochemical mechanical polishing
Patent number
7,066,800
Issue date
Jun 27, 2006
Applied Materials Inc.
Liang-Yuh Chen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Pad assembly for electrochemical mechanical processing
Patent number
7,029,365
Issue date
Apr 18, 2006
Applied Materials Inc.
Shou-Sung Chang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Conductive polishing article for electrochemical mechanical polishing
Patent number
6,988,942
Issue date
Jan 24, 2006
Applied Materials Inc.
Liang-Yuh Chen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for substrate polishing
Patent number
6,977,036
Issue date
Dec 20, 2005
Applied Materials, Inc.
Ralph Wadensweiler
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Conductive polishing article for electrochemical mechanical polishing
Patent number
6,962,524
Issue date
Nov 8, 2005
Applied Materials, Inc.
Paul D. Butterfield
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for substrate polishing
Patent number
6,841,057
Issue date
Jan 11, 2005
Applied Materials Inc.
Ralph Wadensweiler
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Over clamp sensor
Patent number
6,459,382
Issue date
Oct 1, 2002
Applied Materials, Inc.
Ralph M. Wadensweiler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck having a thermal transfer regulator pad
Patent number
5,978,202
Issue date
Nov 2, 1999
Applied Materials, Inc.
Ralph M. Wadensweiler
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CONDUCTIVE POLISHING ARTICLE FOR ELECTROCHEMICAL MECHANICAL POLISHING
Publication number
20080156657
Publication date
Jul 3, 2008
Paul D. Butterfield
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
CONDUCTIVE POLISHING ARTICLE FOR ELECTROCHEMICAL MECHANICAL POLISHING
Publication number
20080026681
Publication date
Jan 31, 2008
PAUL D. BUTTERFIELD
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PAD ASSEMBLY FOR ELECTROCHEMICAL MECHANICAL POLISHING
Publication number
20070111638
Publication date
May 17, 2007
APPLIED MATERIALS, INC.
Shou-Sung Chang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
CONDUCTIVE PAD WITH ION EXCHANGE MEMBRANE FOR ELECTROCHEMICAL MECHA...
Publication number
20070099552
Publication date
May 3, 2007
APPLIED MATERIALS, INC.
Liang-Yuh Chen
B24 - GRINDING POLISHING
Information
Patent Application
CONDUCTIVE POLISHING ARTICLE FOR ELECTROCHEMICAL MECHANICAL POLISHING
Publication number
20070066201
Publication date
Mar 22, 2007
APPLIED MATERIALS, INC.
Liang-Yuh Chen
B24 - GRINDING POLISHING
Information
Patent Application
Semiconductor substrate processing apparatus with a passive substra...
Publication number
20060291990
Publication date
Dec 28, 2006
APPLIED MATERIALS, INC.
Ralph M. Wadensweiler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Conductive pad
Publication number
20060229007
Publication date
Oct 12, 2006
APPLIED MATERIALS, INC.
Rashid A. Mavliev
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Sliding flexible electrical contact for electrochemical processing
Publication number
20060180465
Publication date
Aug 17, 2006
Applied Materials Inc.
Rashid A. Mavliev
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Conductive polishing article for electrochemical mechanical polishing
Publication number
20060172671
Publication date
Aug 3, 2006
APPLIED MATERIALS, INC.
Liang-Yuh Chen
B24 - GRINDING POLISHING
Information
Patent Application
Magnetically secured retaining ring
Publication number
20060160474
Publication date
Jul 20, 2006
Ming-Kuei Tseng
B24 - GRINDING POLISHING
Information
Patent Application
Pad assembly for electrochemical mechanical processing
Publication number
20060148381
Publication date
Jul 6, 2006
APPLIED MATERIALS, INC.
Shou-Sung Chang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Abrasive conductive polishing article for electrochemical mechanica...
Publication number
20060030156
Publication date
Feb 9, 2006
APPLIED MATERIALS, INC.
Paul D. Butterfield
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Conductive polishing article for electrochemical mechanical polishing
Publication number
20050284770
Publication date
Dec 29, 2005
APPLIED MATERIALS, INC.
Paul D. Butterfield
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Composite pad assembly for electrochemical mechanical processing (E...
Publication number
20050092621
Publication date
May 5, 2005
Yongqi Hu
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and apparatus for electrochemical mechanical processing
Publication number
20050000801
Publication date
Jan 6, 2005
Yan Wang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Conductive polishing article for electrochemical mechanical polishing
Publication number
20040266327
Publication date
Dec 30, 2004
Liang-Yuh Chen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and apparatus for substrate polishing
Publication number
20040200733
Publication date
Oct 14, 2004
APPLIED MATERIALS, INC.
Ralph Wadensweiler
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Pad assembly for electrochemical mechanical processing
Publication number
20040163946
Publication date
Aug 26, 2004
APPLIED MATERIALS, INC.
Shou-Sung Chang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Conductive polishing article for electrochemical mechanical polishing
Publication number
20040134792
Publication date
Jul 15, 2004
APPLIED MATERIALS, INC.
Paul D. Butterfield
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Conductive polishing article for electrochemical mechanical polishing
Publication number
20040082289
Publication date
Apr 29, 2004
Paul D. Butterfield
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and apparatus for substrate polishing
Publication number
20030213703
Publication date
Nov 20, 2003
APPLIED MATERIALS, INC.
Yan Wang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and apparatus for substrate polishing
Publication number
20030173230
Publication date
Sep 18, 2003
APPLIED MATERIALS, INC.
Ralph Wadensweiler
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Conductive polishing article for electrochemical mechanical polishing
Publication number
20020119286
Publication date
Aug 29, 2002
Liang-Yuh Chen
B82 - NANO-TECHNOLOGY