Ravi Mullapudi

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Physical vapor deposition method using backside gas cooling of work...
- Patent number 10,550,464
- Issue date Feb 4, 2020
- Tango Systems, Inc.
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition system with target magnets controlled to...
- Patent number 10,053,771
- Issue date Aug 21, 2018
- Tango Systems Inc.
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition system using rotating pallet with X and Y...
- Patent number 9,957,606
- Issue date May 1, 2018
- Tango Systems Inc.
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition system using backside gas cooling of work...
- Patent number 9,932,668
- Issue date Apr 3, 2018
- Tango Systems Inc.
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Biased pulse DC reactive sputtering of oxide films
- Patent number 8,105,466
- Issue date Jan 31, 2012
- SpringWorks, LLC
- Hongmei Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-station sputtering and cleaning system
- Patent number 8,092,659
- Issue date Jan 10, 2012
- Tango Systems, Inc.
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target backing plate for sputtering system
- Patent number 7,799,190
- Issue date Sep 21, 2010
- Tango Systems, Inc.
- Ravi Mullapudi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Top shield for sputtering system
- Patent number 7,794,574
- Issue date Sep 14, 2010
- Tango Systems, Inc.
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cross-contaminant shield in sputtering system
- Patent number 7,785,455
- Issue date Aug 31, 2010
- Tango Systems, Inc.
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotating pallet in sputtering system
- Patent number 7,744,730
- Issue date Jun 29, 2010
- Tango Systems, Inc.
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oscillating magnet in sputtering system
- Patent number 7,682,495
- Issue date Mar 23, 2010
- Tango Systems, Inc.
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Biased pulse DC reactive sputtering of oxide films
- Patent number 7,544,276
- Issue date Jun 9, 2009
- SpringWorks, LLC
- Hongmei Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control of pallet in sputtering system
- Patent number 7,479,210
- Issue date Jan 20, 2009
- Tango Systems, Inc.
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
As-deposited planar optical waveguides with low scattering loss and...
- Patent number 7,469,558
- Issue date Dec 30, 2008
- SpringWorks, LLC
- Richard E. Demaray
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Biased pulse DC reactive sputtering of oxide films
- Patent number 7,413,998
- Issue date Aug 19, 2008
- SpringWorks, LLC
- Hongmei Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Biased pulse DC reactive sputtering of oxide films
- Patent number 7,381,657
- Issue date Jun 3, 2008
- SpringWorks, LLC
- Hongmei Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Biased pulse DC reactive sputtering of oxide films
- Patent number 7,378,356
- Issue date May 27, 2008
- SpringWorks, LLC
- Hongmei Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Planar optical devices and methods for their manufacture
- Patent number 6,827,826
- Issue date Dec 7, 2004
- Symmorphix, Inc.
- Richard E. Demaray
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of producing amorphous silicon for hard mask and waveguide a...
- Patent number 6,533,907
- Issue date Mar 18, 2003
- Symmorphix, Inc.
- Richard E. Demaray
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Planar optical devices and methods for their manufacture
- Patent number 6,506,289
- Issue date Jan 14, 2003
- Symmorphix, Inc.
- Richard E. Demaray
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Automated substrate processing systems and methods
- Patent number 6,257,045
- Issue date Jul 10, 2001
- Applied Komatsu Technology, Inc.
- Akihiro Hosokawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Automated substrate processing systems and methods
- Patent number 6,205,870
- Issue date Mar 27, 2001
- Applied Komatsu Technology, Inc.
- Akihiro Hosokawa
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
PHYSICAL VAPOR DEPOSITION METHOD USING BACKSIDE GAS COOLING OF WORK...
- Publication number 20180202040
- Publication date Jul 19, 2018
- TANGO SYSTEMS, INC.
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION SYSTEM USING ROTATING PALLET WITH X AND Y...
- Publication number 20170114449
- Publication date Apr 27, 2017
- TANGO SYSTEMS, INC.
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION SYSTEM USING BACKSIDE GAS COOLING OF WORK...
- Publication number 20170114448
- Publication date Apr 27, 2017
- TANGO SYSTEMS, INC.
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION SYSTEM WITH TARGET MAGNETS CONTROLLED TO...
- Publication number 20170114447
- Publication date Apr 27, 2017
- TANGO SYSTEMS, INC.
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-Station Sputtering and Cleaning System
- Publication number 20120085638
- Publication date Apr 12, 2012
- TANGO SYSTEMS, INC.
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Triangular Scanning Magnet in Sputtering Tool Moving Over Larger Tr...
- Publication number 20120024694
- Publication date Feb 2, 2012
- TANGO SYSTEMS, INC.
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering Chamber Having ICP Coil and Targets on Top Wall
- Publication number 20100078312
- Publication date Apr 1, 2010
- TANGO SYSTEMS, INC.
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Confining Magnets In Sputtering Chamber
- Publication number 20100080928
- Publication date Apr 1, 2010
- TANGO SYSTEMS, INC.
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-Station Sputtering and Cleaning System
- Publication number 20090127099
- Publication date May 21, 2009
- TANGO SYSTEMS, INC.
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Top shield for sputtering system
- Publication number 20060231391
- Publication date Oct 19, 2006
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Insulated pallet in cleaning chamber
- Publication number 20060231389
- Publication date Oct 19, 2006
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cross-contaminant shield in sputtering system
- Publication number 20060231392
- Publication date Oct 19, 2006
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-station sputtering and cleaning system
- Publication number 20060231388
- Publication date Oct 19, 2006
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Temperature control of pallet in sputtering system
- Publication number 20060231390
- Publication date Oct 19, 2006
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Rotating pallet in sputtering system
- Publication number 20060231382
- Publication date Oct 19, 2006
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Oscillating magnet in sputtering system
- Publication number 20060231383
- Publication date Oct 19, 2006
- Ravi Mullapudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Target backing plate for sputtering system
- Publication number 20060231393
- Publication date Oct 19, 2006
- Ravi Mullapudi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Biased pulse DC reactive sputtering of oxide films
- Publication number 20060054496
- Publication date Mar 16, 2006
- Symmorphix, Inc.
- Hongmei Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Biased pulse DC reactive sputtering of oxide films
- Publication number 20060057304
- Publication date Mar 16, 2006
- Symmorphix, Inc.
- Hongmei Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Biased pulse DC reactive sputtering of oxide films
- Publication number 20060057283
- Publication date Mar 16, 2006
- Symmorphix, Inc.
- Hongmei Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Biased pulse DC reactive sputtering of oxide films
- Publication number 20050048802
- Publication date Mar 3, 2005
- Symmorphix, Inc.
- Hongmei Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Biased pulse DC reactive sputtering of oxide films
- Publication number 20030173207
- Publication date Sep 18, 2003
- Symmorphix, Inc.
- Hongmei Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Rare-earth pre-alloyed PVD targets for dielectric planar applications
- Publication number 20030175142
- Publication date Sep 18, 2003
- Vassiliki Milonopoulou
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Planar optical devices and methods for their manufacture
- Publication number 20030127319
- Publication date Jul 10, 2003
- Richard E. Demaray
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
As-deposited planar optical waveguides with low scattering loss and...
- Publication number 20030063883
- Publication date Apr 3, 2003
- Richard E. Demaray
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Method of producing amorphous silicon for hard mask and waveguide a...
- Publication number 20020134671
- Publication date Sep 26, 2002
- Richard E. Demaray
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High performance magnetron for DC sputtering systems
- Publication number 20020046945
- Publication date Apr 25, 2002
- APPLIED MATERIALS, INC.
- Akihiro Hosokawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Planar optical devices and methods for their manufacture
- Publication number 20020033330
- Publication date Mar 21, 2002
- Richard E. Demaray
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Ravi Mullapudi

Person

Patents Grantslast 30 patents

Physical vapor deposition method using backside gas cooling of work...

Physical vapor deposition system with target magnets controlled to...

Physical vapor deposition system using rotating pallet with X and Y...

Physical vapor deposition system using backside gas cooling of work...

Biased pulse DC reactive sputtering of oxide films

Multi-station sputtering and cleaning system

Target backing plate for sputtering system

Top shield for sputtering system

Cross-contaminant shield in sputtering system

Rotating pallet in sputtering system

Oscillating magnet in sputtering system

Biased pulse DC reactive sputtering of oxide films

Temperature control of pallet in sputtering system

As-deposited planar optical waveguides with low scattering loss and...

Biased pulse DC reactive sputtering of oxide films

Biased pulse DC reactive sputtering of oxide films

Biased pulse DC reactive sputtering of oxide films

Planar optical devices and methods for their manufacture

Method of producing amorphous silicon for hard mask and waveguide a...

Planar optical devices and methods for their manufacture

Automated substrate processing systems and methods

Automated substrate processing systems and methods

Patents Applicationslast 30 patents

PHYSICAL VAPOR DEPOSITION METHOD USING BACKSIDE GAS COOLING OF WORK...

PHYSICAL VAPOR DEPOSITION SYSTEM USING ROTATING PALLET WITH X AND Y...

PHYSICAL VAPOR DEPOSITION SYSTEM USING BACKSIDE GAS COOLING OF WORK...

PHYSICAL VAPOR DEPOSITION SYSTEM WITH TARGET MAGNETS CONTROLLED TO...

Multi-Station Sputtering and Cleaning System

Triangular Scanning Magnet in Sputtering Tool Moving Over Larger Tr...

Sputtering Chamber Having ICP Coil and Targets on Top Wall

Confining Magnets In Sputtering Chamber

Multi-Station Sputtering and Cleaning System

Top shield for sputtering system

Insulated pallet in cleaning chamber

Cross-contaminant shield in sputtering system

Multi-station sputtering and cleaning system

Temperature control of pallet in sputtering system

Rotating pallet in sputtering system

Oscillating magnet in sputtering system

Target backing plate for sputtering system

Biased pulse DC reactive sputtering of oxide films

Biased pulse DC reactive sputtering of oxide films

Biased pulse DC reactive sputtering of oxide films

Biased pulse DC reactive sputtering of oxide films

Biased pulse DC reactive sputtering of oxide films

Rare-earth pre-alloyed PVD targets for dielectric planar applications

Planar optical devices and methods for their manufacture

As-deposited planar optical waveguides with low scattering loss and...

Method of producing amorphous silicon for hard mask and waveguide a...

High performance magnetron for DC sputtering systems

Planar optical devices and methods for their manufacture