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Renren He
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Sunnyvale, CA, US
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last 30 patents
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Patent Grant
ECP gap fill by modulating the voltate on the seed layer to increas...
Patent number
6,746,591
Issue date
Jun 8, 2004
Applied Materials Inc.
Bo Zheng
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
MULTIPLE-STEP ELECTRODEPOSITION PROCESS FOR DIRECT COPPER PLATING O...
Publication number
20090120799
Publication date
May 14, 2009
Zhi-Wen Sun
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method of direct plating of copper on a substrate structure
Publication number
20070125657
Publication date
Jun 7, 2007
Zhi-Wen Sun
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Plating chemistry and method of single-step electroplating of coppe...
Publication number
20050274622
Publication date
Dec 15, 2005
Zhi-Wen Sun
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method of barrier layer surface treatment to enable direct copper p...
Publication number
20050274621
Publication date
Dec 15, 2005
Zhi-Wen Sun
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Multiple-step electrodeposition process for direct copper plating o...
Publication number
20050006245
Publication date
Jan 13, 2005
APPLIED MATERIALS, INC.
Zhi-Wen Sun
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
ECP GAP FILL BY MODULATING THE VOLTAGE ON THE SEED LAYER TO INCREAS...
Publication number
20040045831
Publication date
Mar 11, 2004
APPLIED MATERIALS, INC.
Bo Zheng
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR