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DIFFUSION RESISTANT ELECTROSTATIC CLAMP
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Entegris, Inc.
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Richard A. Cooke
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DIFFUSION RESISTANT ELECTROSTATIC CLAMP
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Varian Semiconductor Equipment Associates, Inc.
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Publication date Jun 20, 2013
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David Suuronen
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Publication date Mar 21, 2013
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Varian Semiconductor Equipment Associates, Inc.
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Richard A. Cooke
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Electrostatic chuck
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Publication number 20090284894
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Publication date Nov 19, 2009
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Entegris, Inc.
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Richard A. Cooke
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H01 - BASIC ELECTRIC ELEMENTS