Richard E. Remington

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Closed-loop dome thermal control apparatus for a semiconductor wafe...
- Patent number 6,367,410
- Issue date Apr 9, 2002
- Applied Materials, Inc.
- Patrick Leahey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma reactor with internal inductive antenna capable of generatin...
- Patent number 6,178,920
- Issue date Jan 30, 2001
- Applied Materials, Inc.
- Yan Ye
- H01 - BASIC ELECTRIC ELEMENTS