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MEMS RF switch integrated process
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Patent number 7,381,583
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Issue date Jun 3, 2008
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The United States of America as represented by the Secretary of the Air Force
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John L. Ebel
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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MEMS RF switch integrated process
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Patent number 7,145,213
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Issue date Dec 5, 2006
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The United States of America as represented by the Secretary of the Air Force
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John L. Ebel
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H01 - BASIC ELECTRIC ELEMENTS
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Shunted multiple throw MEMS RF switch
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Patent number 6,570,750
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Issue date May 27, 2003
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The United States of America as represented by the Secretary of the Air Force
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Mark C. Calcatera
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H01 - BASIC ELECTRIC ELEMENTS
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Series and shunt mems RF switch
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Patent number 6,373,007
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Issue date Apr 16, 2002
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The United States of America as represented by the Secretary of the Air Force
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Mark C. Calcatera
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H01 - BASIC ELECTRIC ELEMENTS