Richard Novak

Person

Plymouth, MN, US

People

Patents Grantslast 30 patents

Information Patent Grant
Composite transducer apparatus and system for processing a substrat...
- Patent number 9,987,666
- Issue date Jun 5, 2018
- NAURA AKRION INC.
- John A. Korbler
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Systems and methods for conditioning a filter assembly
- Patent number 9,656,197
- Issue date May 23, 2017
- Pall Corporation
- Michael Joseph Mesawich
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Composite transducer apparatus and system for processing a substrat...
- Patent number 9,049,520
- Issue date Jun 2, 2015
- Akrion Systems LLC
- John A. Korbler
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Method for cleaning substrates utilizing surface passivation and/or...
- Patent number 8,741,066
- Issue date Jun 3, 2014
- Akrion Systems, LLC
- Ismail Kashkoush
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composite transducer apparatus and system for processing a substrat...
- Patent number 8,279,712
- Issue date Oct 2, 2012
- Akrion Systems LLC
- John A. Korbler
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
System and method for selective etching of silicon nitride during s...
- Patent number 7,976,718
- Issue date Jul 12, 2011
- Akrion Systems LLC
- Ismail Kashkoush
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process sequence for photoresist stripping and/or cleaning of photo...
- Patent number 7,169,253
- Issue date Jan 30, 2007
- Akrion Technologies, Inc.
- Gim-Syang Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Membrane dryer
- Patent number 6,928,750
- Issue date Aug 16, 2005
- Akrion, LLC
- Ismail Kashkoush
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method for removal of photoresist using sparger
- Patent number 6,863,836
- Issue date Mar 8, 2005
- Akrion, LLC
- Richard Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Membrane dryer
- Patent number 6,842,998
- Issue date Jan 18, 2005
- Akrion LLC
- Ismail Kashkoush
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Nextgen wet process tank
- Patent number 6,840,250
- Issue date Jan 11, 2005
- Akrion LLC
- Ismail Kashkoush
- B08 - CLEANING
Information Patent Grant
Cleaning and drying method and apparatus
- Patent number 6,837,944
- Issue date Jan 4, 2005
- Akrion LLC
- Ismail Kashkoush
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process and apparatus for removal of photoresist from semiconductor...
- Patent number 6,818,563
- Issue date Nov 16, 2004
- Akrion LLC
- Richard Novak
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Chemical concentration control device
- Patent number 6,766,818
- Issue date Jul 27, 2004
- Akrion, LLC
- Ismail Kashkoush
- G05 - CONTROLLING REGULATING
Information Patent Grant
System for removal of photoresist using sparger
- Patent number 6,649,018
- Issue date Nov 18, 2003
- Akrion, LLC
- Richard Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of processing substrates using pressurized mist generation
- Patent number 6,626,189
- Issue date Sep 30, 2003
- Akrion, LLC
- Ismail Kashkoush
- B08 - CLEANING
Information Patent Grant
Process tank with pressurized mist generation
- Patent number 6,532,974
- Issue date Mar 18, 2003
- Akrion LLC
- Ismail Kashkoush
- B08 - CLEANING
Information Patent Grant
Etch chamber with gas dispersing membrane
- Patent number 5,458,724
- Issue date Oct 17, 1995
- FSI International, Inc.
- Daniel J. Syverson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High temperature ceramic nut
- Patent number 5,454,677
- Issue date Oct 3, 1995
- SubMicron Systems, Inc.
- Robert H. Grant
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Chemical processing system for maintaining concentration of semicon...
- Patent number 5,437,710
- Issue date Aug 1, 1995
- Submicron Systems Inc.
- Robert W. Grant
- C30 - CRYSTAL GROWTH
Information Patent Grant
High temperature ceramic nut
- Patent number 5,332,271
- Issue date Jul 26, 1994
- Robert W. Grant
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Megasonic cleaning system
- Patent number 5,247,954
- Issue date Sep 28, 1993
- SubMicron Systems, Inc.
- Robert W. Grant
- B08 - CLEANING
Information Patent Grant
Process for etching oxide films in a sealed photochemical reactor
- Patent number 5,234,540
- Issue date Aug 10, 1993
- SubMicron Systems, Inc.
- Robert W. Grant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster tool dry cleaning system
- Patent number 5,228,206
- Issue date Jul 20, 1993
- SubMicron Systems, Inc.
- Robert W. Grant
- F26 - DRYING
Information Patent Grant
HF gas etching of wafers in an acid processor
- Patent number 4,900,395
- Issue date Feb 13, 1990
- FSI International, Inc.
- Daniel J. Syverson
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COMPOSITE TRANSDUCER APPARATUS AND SYSTEM FOR PROCESSING A SUBSTRAT...
- Publication number 20150258583
- Publication date Sep 17, 2015
- Akrion Systems, LLC
- John A. Korbler
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
COMPOSITE TRANSDUCER APPARATUS AND SYSTEM FOR PROCESSING A SUBSTRAT...
- Publication number 20140254325
- Publication date Sep 11, 2014
- Akrion Systems LLC
- John A. Korbler
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
SYSTEMS AND METHODS FOR CONDITIONING A FILTER ASSEMBLY
- Publication number 20140131293
- Publication date May 15, 2014
- PALL CORPORATION
- Michael Joseph Mesawich
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
COMPOSITE TRANSDUCER APPARATUS AND SYSTEM FOR PROCESSING A SUBSTRAT...
- Publication number 20130167881
- Publication date Jul 4, 2013
- John A. Korbler
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
Method for cleaning substrates utilizing surface passivation and/or...
- Publication number 20110306210
- Publication date Dec 15, 2011
- Ismail Kashkoush
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITE TRANSDUCER APPARATUS AND SYSTEM FOR PROCESSING A SUBSTRAT...
- Publication number 20090231959
- Publication date Sep 17, 2009
- John A. Korbler
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
System And Method for Selective Etching Of Silicon Nitride During S...
- Publication number 20080035609
- Publication date Feb 14, 2008
- Ismail Kashkoush
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process sequence for photoresist stripping and cleaning of photomas...
- Publication number 20070123052
- Publication date May 31, 2007
- Ismail Kashkoush
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for creating ozonated process solutions having...
- Publication number 20060021634
- Publication date Feb 2, 2006
- Zhi (Lewis) Liu
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Reduced pressure irradiation processing method and apparatus
- Publication number 20060016458
- Publication date Jan 26, 2006
- Richard Novak
- B08 - CLEANING
Information Patent Application
System and method for pre-gate cleaning of substrates
- Publication number 20060011214
- Publication date Jan 19, 2006
- Zhi (Lewis) Liu
- B08 - CLEANING
Information Patent Application
Membrane dryer
- Publication number 20050087303
- Publication date Apr 28, 2005
- Ismail Kashkoush
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Process sequence for photoresist stripping and/or cleaning of photo...
- Publication number 20050026435
- Publication date Feb 3, 2005
- Gim-Syang Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for removal of photoresist using sparger
- Publication number 20040035442
- Publication date Feb 26, 2004
- Richard Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Membrane dryer
- Publication number 20030183338
- Publication date Oct 2, 2003
- Ismail Kashkoush
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Process and apparatus for removal of photoresist from semiconductor...
- Publication number 20030136334
- Publication date Jul 24, 2003
- Richard Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Process and apparatus for removal of photoresist from semiconductor...
- Publication number 20030139057
- Publication date Jul 24, 2003
- Richard Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System for removal of photoresist using sparger
- Publication number 20030134518
- Publication date Jul 17, 2003
- Richard Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of processing substrates using pressurized mist generation
- Publication number 20030111092
- Publication date Jun 19, 2003
- Ismail Kashkoush
- B08 - CLEANING
Information Patent Application
Cleaning and drying method and apparatus
- Publication number 20030019507
- Publication date Jan 30, 2003
- Ismail Kashkoush
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Nextgen wet process tank
- Publication number 20020144709
- Publication date Oct 10, 2002
- Ismail Kashkoush
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical concentration control device
- Publication number 20020144727
- Publication date Oct 10, 2002
- Ismail Kashkoush
- G05 - CONTROLLING REGULATING
Information Patent Application
Megazone system
- Publication number 20020144708
- Publication date Oct 10, 2002
- Ismail Kashkoush
- H01 - BASIC ELECTRIC ELEMENTS

Richard Novak

Person

Patents Grantslast 30 patents

Composite transducer apparatus and system for processing a substrat...

Systems and methods for conditioning a filter assembly

Composite transducer apparatus and system for processing a substrat...

Method for cleaning substrates utilizing surface passivation and/or...

Composite transducer apparatus and system for processing a substrat...

System and method for selective etching of silicon nitride during s...

Process sequence for photoresist stripping and/or cleaning of photo...

Membrane dryer

Method for removal of photoresist using sparger

Membrane dryer

Nextgen wet process tank

Cleaning and drying method and apparatus

Process and apparatus for removal of photoresist from semiconductor...

Chemical concentration control device

System for removal of photoresist using sparger

Method of processing substrates using pressurized mist generation

Process tank with pressurized mist generation

Etch chamber with gas dispersing membrane

High temperature ceramic nut

Chemical processing system for maintaining concentration of semicon...

High temperature ceramic nut

Megasonic cleaning system

Process for etching oxide films in a sealed photochemical reactor

Cluster tool dry cleaning system

HF gas etching of wafers in an acid processor

Patents Applicationslast 30 patents

COMPOSITE TRANSDUCER APPARATUS AND SYSTEM FOR PROCESSING A SUBSTRAT...

COMPOSITE TRANSDUCER APPARATUS AND SYSTEM FOR PROCESSING A SUBSTRAT...

SYSTEMS AND METHODS FOR CONDITIONING A FILTER ASSEMBLY

COMPOSITE TRANSDUCER APPARATUS AND SYSTEM FOR PROCESSING A SUBSTRAT...

Method for cleaning substrates utilizing surface passivation and/or...

COMPOSITE TRANSDUCER APPARATUS AND SYSTEM FOR PROCESSING A SUBSTRAT...

System And Method for Selective Etching Of Silicon Nitride During S...

Process sequence for photoresist stripping and cleaning of photomas...

Method and apparatus for creating ozonated process solutions having...

Reduced pressure irradiation processing method and apparatus

System and method for pre-gate cleaning of substrates

Membrane dryer

Process sequence for photoresist stripping and/or cleaning of photo...

Method for removal of photoresist using sparger

Membrane dryer

Process and apparatus for removal of photoresist from semiconductor...

Process and apparatus for removal of photoresist from semiconductor...

System for removal of photoresist using sparger

Method of processing substrates using pressurized mist generation

Cleaning and drying method and apparatus

Nextgen wet process tank

Chemical concentration control device

Megazone system