Richard S. Muka

Person

Topsfield, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for gas leak control in a substrate holder
- Patent number 8,669,540
- Issue date Mar 11, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Timothy J. Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for lifting a horizontally-oriented substrate...
- Patent number 8,585,115
- Issue date Nov 19, 2013
- Varian Semiconductor Equipment Associates, Inc.
- John Robert Fairhurst
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for temperature-controlled ion implantation
- Patent number 8,450,193
- Issue date May 28, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan Gerald England
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for low-temperature ion implantation
- Patent number 8,319,196
- Issue date Nov 27, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan G. England
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for temperature controlled ion implantation
- Patent number 7,993,698
- Issue date Aug 9, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Julian Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for low-temperature ion implantation
- Patent number 7,935,942
- Issue date May 3, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan England
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for temperature-controlled ion implantation
- Patent number 7,655,933
- Issue date Feb 2, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan Gerald England
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clamp for use in processing semiconductor workpieces
- Patent number 7,595,972
- Issue date Sep 29, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Richard Muka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for low-temperature ion implantation
- Patent number 7,528,392
- Issue date May 5, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan Gerald England
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shaft cooling mechanisms
- Patent number 6,863,736
- Issue date Mar 8, 2005
- Ibis Technology Corporation
- William Leavitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transport apparatus with double substrate holders
- Patent number 6,299,404
- Issue date Oct 9, 2001
- Brooks Automation Inc.
- Richard S. Muka
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Multi-level substrate processing apparatus
- Patent number 6,261,048
- Issue date Jul 17, 2001
- Brooks Automation, Inc.
- Richard S. Muka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for batch thermal conditioning of substrates
- Patent number 6,193,506
- Issue date Feb 27, 2001
- Brooks Automation, Inc.
- Richard S. Muka
- C30 - CRYSTAL GROWTH
Information Patent Grant
Substrate transport apparatus with double substrate holders
- Patent number 6,158,941
- Issue date Dec 12, 2000
- Brooks Automation, Inc.
- Richard S. Muka
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Automated wafer buffer for use with wafer processing equipment
- Patent number 6,079,927
- Issue date Jun 27, 2000
- Varian Semiconductor Equipment Associates, Inc.
- Richard S. Muka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-level substrate processing apparatus
- Patent number 6,062,798
- Issue date May 16, 2000
- Brooks Automation, Inc.
- Richard S. Muka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate heating apparatus with cantilevered lifting arm
- Patent number 5,854,468
- Issue date Dec 29, 1998
- Brooks Automation, Inc.
- Richard S. Muka
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for heating or cooling wafers
- Patent number 5,778,968
- Issue date Jul 14, 1998
- Brooks Automation Inc.
- Ruth Ann Hendrickson
- C30 - CRYSTAL GROWTH
Information Patent Grant
Vacuum integrated SMIF system
- Patent number 5,752,796
- Issue date May 19, 1998
- Richard S. Muka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Batchloader for load lock
- Patent number 5,664,925
- Issue date Sep 9, 1997
- Brooks Automation, Inc.
- Richard S. Muka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster tool batchloader of substrate carrier
- Patent number 5,613,821
- Issue date Mar 25, 1997
- Brooks Automation, Inc.
- Richard S. Muka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Door drive mechanisms for substrate carrier and load lock
- Patent number 5,609,459
- Issue date Mar 11, 1997
- Brooks Automation, Inc.
- Richard S. Muka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Batchloader for substrate carrier on load lock
- Patent number 5,607,276
- Issue date Mar 4, 1997
- Brooks Automation, Inc.
- Richard S. Muka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load arm for load lock
- Patent number 5,588,789
- Issue date Dec 31, 1996
- Brooks Automation
- Richard S. Muka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Passive gas substrate thermal conditioning apparatus and method
- Patent number 5,588,827
- Issue date Dec 31, 1996
- Brooks Automation Inc.
- Richard S. Muka
- C30 - CRYSTAL GROWTH
Information Patent Grant
Low-gas temperature stabilization system
- Patent number 5,520,538
- Issue date May 28, 1996
- Brooks Automation, Inc.
- Richard S. Muka
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Low-gas temperature stabilization system
- Patent number 5,447,431
- Issue date Sep 5, 1995
- Brooks Automation, Inc.
- Richard S. Muka
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Sputtering system
- Patent number 5,019,233
- Issue date May 28, 1991
- Eaton Corporation
- Julian G. Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer handling apparatus
- Patent number 4,952,299
- Issue date Aug 28, 1990
- Eaton Corporation
- John M. Chrisos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sealing apparatus for a vacuum processing system
- Patent number 4,923,584
- Issue date May 8, 1990
- Eaton Corporation
- Robert B. Bramhall
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR LIFTING A HORIZONTALLY-ORIENTED SUBSTRATE...
- Publication number 20130088028
- Publication date Apr 11, 2013
- Varian Semiconductor Equipment Associates, Inc.
- John Robert Fairhurst
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR GAS LEAK CONTROL IN A SUBSTRATE HOLDER
- Publication number 20120168640
- Publication date Jul 5, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Timothy J. Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUE FOR LOW-TEMPERATURE ION IMPLANTATION
- Publication number 20110207308
- Publication date Aug 25, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan G. ENGLAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR LOW-TEMPERATURE ION IMPLANTATION
- Publication number 20090140166
- Publication date Jun 4, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Richard S. MUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing System Platen having a Variable Thermal Conductivity Pro...
- Publication number 20090017229
- Publication date Jan 15, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Vikram Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR LOW-TEMPERATURE ION IMPLANTATION
- Publication number 20080124903
- Publication date May 29, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan Gerald ENGLAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR LOW-TEMPERATURE ION IMPLANTATION
- Publication number 20080121821
- Publication date May 29, 2008
- Varian Semiconductor Equipment Associates Inc.
- Richard Stephen Muka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Techniques for temperature controlled ion implantation
- Publication number 20080076194
- Publication date Mar 27, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Julian Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Technique for low-temperature ion implantation
- Publication number 20080044938
- Publication date Feb 21, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan England
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR TEMPERATURE-CONTROLLED ION IMPLANTATION
- Publication number 20080044257
- Publication date Feb 21, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan Gerald ENGLAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR TEMPERATURE-CONTROLLED ION IMPLANTATION
- Publication number 20080042078
- Publication date Feb 21, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan Gerald ENGLAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Johnsen-Rahbek electrostatic chuck driven with AC voltage
- Publication number 20070195482
- Publication date Aug 23, 2007
- Varian Semiconductor Equipment Associates, Inc.
- Richard Muka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Clamp for use in processing semiconductor workpieces
- Publication number 20060171094
- Publication date Aug 3, 2006
- Richard Muka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shaft cooling mechanisms
- Publication number 20030221626
- Publication date Dec 4, 2003
- IBIS TECHNOLOGY
- William Leavitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Richard S. Muka

Person

Patents Grantslast 30 patents

System and method for gas leak control in a substrate holder

Method and apparatus for lifting a horizontally-oriented substrate...

Techniques for temperature-controlled ion implantation

Technique for low-temperature ion implantation

Techniques for temperature controlled ion implantation

Technique for low-temperature ion implantation

Techniques for temperature-controlled ion implantation

Clamp for use in processing semiconductor workpieces

Techniques for low-temperature ion implantation

Shaft cooling mechanisms

Substrate transport apparatus with double substrate holders

Multi-level substrate processing apparatus

Apparatus and method for batch thermal conditioning of substrates

Substrate transport apparatus with double substrate holders

Automated wafer buffer for use with wafer processing equipment

Multi-level substrate processing apparatus

Substrate heating apparatus with cantilevered lifting arm

Method for heating or cooling wafers

Vacuum integrated SMIF system

Batchloader for load lock

Cluster tool batchloader of substrate carrier

Door drive mechanisms for substrate carrier and load lock

Batchloader for substrate carrier on load lock

Load arm for load lock

Passive gas substrate thermal conditioning apparatus and method

Low-gas temperature stabilization system

Low-gas temperature stabilization system

Sputtering system

Wafer handling apparatus

Sealing apparatus for a vacuum processing system

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR LIFTING A HORIZONTALLY-ORIENTED SUBSTRATE...

SYSTEM AND METHOD FOR GAS LEAK CONTROL IN A SUBSTRATE HOLDER

TECHNIQUE FOR LOW-TEMPERATURE ION IMPLANTATION

TECHNIQUES FOR LOW-TEMPERATURE ION IMPLANTATION

Processing System Platen having a Variable Thermal Conductivity Pro...

TECHNIQUES FOR LOW-TEMPERATURE ION IMPLANTATION

TECHNIQUES FOR LOW-TEMPERATURE ION IMPLANTATION

Techniques for temperature controlled ion implantation

Technique for low-temperature ion implantation

TECHNIQUES FOR TEMPERATURE-CONTROLLED ION IMPLANTATION

TECHNIQUES FOR TEMPERATURE-CONTROLLED ION IMPLANTATION

Johnsen-Rahbek electrostatic chuck driven with AC voltage

Clamp for use in processing semiconductor workpieces

Shaft cooling mechanisms