Richard Solarz

Person

Danville, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for x-ray imaging and classification of volume de...
- Patent number 11,035,804
- Issue date Jun 15, 2021
- KLA Corporation
- Richard W. Solarz
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for inhibiting VUV radiative emission of a laser-...
- Patent number 9,899,205
- Issue date Feb 20, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sub 200nm laser pumped homonuclear excimer lasers
- Patent number 9,735,534
- Issue date Aug 15, 2017
- KLA-Tencor Corporation
- Richard W. Solarz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for transverse pumping of laser-sustained plasma
- Patent number 9,723,703
- Issue date Aug 1, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for inhibiting radiative emission of a laser-sust...
- Patent number 9,615,439
- Issue date Apr 4, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High throughput hot testing method and system for high-brightness l...
- Patent number 9,519,033
- Issue date Dec 13, 2016
- KLA-Tencor Corporation
- Richard W. Solarz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EUV high throughput inspection system for defect detection on patte...
- Patent number 9,377,414
- Issue date Jun 28, 2016
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G01 - MEASURING TESTING
Information Patent Grant
High throughput hot testing method and system for high-brightness l...
- Patent number 8,927,944
- Issue date Jan 6, 2015
- KLA-Tencor Corporation
- Richard W. Solarz
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Multi-wavelength pumping to sustain hot plasma
- Patent number 8,698,399
- Issue date Apr 15, 2014
- KLA-Tencor Corporation
- Ilya V. Bezel
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
EUV high throughput inspection system for defect detection on patte...
- Patent number 8,692,986
- Issue date Apr 8, 2014
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G01 - MEASURING TESTING
Information Patent Grant
Coherent DUV illumination for semiconductor wafer inspection
- Patent number 8,649,646
- Issue date Feb 11, 2014
- KLA-Tencor Corporation
- Richard William Solarz
- G01 - MEASURING TESTING
Information Patent Grant
Optical imaging system with laser droplet plasma illuminator
- Patent number 8,575,576
- Issue date Nov 5, 2013
- KLA-Tencor Corporation
- Richard W. Solarz
- G01 - MEASURING TESTING
Information Patent Grant
EUV high throughput inspection system for defect detection on patte...
- Patent number 8,553,217
- Issue date Oct 8, 2013
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G01 - MEASURING TESTING
Information Patent Grant
Indium rich InGaN LED line monitor
- Patent number 8,218,221
- Issue date Jul 10, 2012
- KLA-Tencor Corporation
- Richard W. Solarz
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for providing illumination of a specimen for in...
- Patent number 8,148,900
- Issue date Apr 3, 2012
- KLA-Tencor Technologies Corp.
- Greg Kirk
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for providing illumination of a specimen for a...
- Patent number 7,705,331
- Issue date Apr 27, 2010
- KLA-Tencor Technologies Corp.
- Greg Kirk
- G01 - MEASURING TESTING
Information Patent Grant
Coherent DUV illumination for semiconductor wafer inspection
- Patent number 7,295,739
- Issue date Nov 13, 2007
- KLA-Tencor Technologies Corporation
- Richard William Solarz
- G01 - MEASURING TESTING
Information Patent Grant
Microchannel cooled edge cladding to establish an adiabatic boundar...
- Patent number 6,738,399
- Issue date May 18, 2004
- The United States of America as represented by the United States Department o...
- Georg F. Albrecht
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High transmission optical inspection tools
- Patent number 6,661,580
- Issue date Dec 9, 2003
- KLA-Tencor Technologies Corporation
- Richard William Solarz
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
System and Method for X-Ray Imaging and Classification of Volume De...
- Publication number 20190003988
- Publication date Jan 3, 2019
- KLA-Tencor Corporation
- Richard W. Solarz
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and Method for Inhibiting VUV Radiative Emission of a Laser-...
- Publication number 20170345639
- Publication date Nov 30, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Inhibiting Radiative Emission of a Laser-Sust...
- Publication number 20160205758
- Publication date Jul 14, 2016
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
System and Method for Transverse Pumping of Laser-Sustained Plasma
- Publication number 20150282288
- Publication date Oct 1, 2015
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Solid State Light Production Using Flexible Grouping Of LEDs
- Publication number 20150194565
- Publication date Jul 9, 2015
- KLA-Tencor Corporation
- Richard W. Solarz
- B07 - SEPARATING SOLIDS FROM SOLIDS SORTING
Information Patent Application
SUB 200NM LASER PUMPED HOMONUCLEAR EXCIMER LASERS
- Publication number 20150168847
- Publication date Jun 18, 2015
- KLA-Tencor Corporation
- Richard W. Solarz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Throughput Hot Testing Method And System For High-Brightness L...
- Publication number 20150123667
- Publication date May 7, 2015
- KLA-Tencor Corporation
- Richard W. Solarz
- G01 - MEASURING TESTING
Information Patent Application
EUV High Throughput Inspection System For Defect Detection On Patte...
- Publication number 20140217299
- Publication date Aug 7, 2014
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G01 - MEASURING TESTING
Information Patent Application
EUV High Throughput Inspection System For Defect Detection On Patte...
- Publication number 20140001370
- Publication date Jan 2, 2014
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G01 - MEASURING TESTING
Information Patent Application
High Throughput Hot Testing Method And System For High-Brightness L...
- Publication number 20130119275
- Publication date May 16, 2013
- KLA-Tencor Corporation
- Richard W. Solarz
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL IMAGING SYSTEM WITH LASER DROPLET PLASMA ILLUMINATOR
- Publication number 20120205546
- Publication date Aug 16, 2012
- KLA-Tencor Corporation
- Richard W. Solarz
- G01 - MEASURING TESTING
Information Patent Application
Multi-Wavelength Pumping to Sustain Hot Plasma
- Publication number 20110291566
- Publication date Dec 1, 2011
- KLA-Tencor Corporation
- Ilya V. Bezel
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EUV High Throughput Inspection System For Defect Detection On Patte...
- Publication number 20110116077
- Publication date May 19, 2011
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G01 - MEASURING TESTING
Information Patent Application
Coherent DUV illumination for semiconductor wafer inspection
- Publication number 20080105835
- Publication date May 8, 2008
- KLA-Tencor Technologies Corporation
- Richard William Solarz
- G02 - OPTICS
Information Patent Application
Coherent DUV illumination for semiconductor wafer inspection
- Publication number 20060083470
- Publication date Apr 20, 2006
- KLA-Tencor Technologies Corporation
- Richard William Solarz
- G02 - OPTICS

Richard Solarz

Person

Patents Grantslast 30 patents

System and method for x-ray imaging and classification of volume de...

System and method for inhibiting VUV radiative emission of a laser-...

Sub 200nm laser pumped homonuclear excimer lasers

System and method for transverse pumping of laser-sustained plasma

System and method for inhibiting radiative emission of a laser-sust...

High throughput hot testing method and system for high-brightness l...

EUV high throughput inspection system for defect detection on patte...

High throughput hot testing method and system for high-brightness l...

Multi-wavelength pumping to sustain hot plasma

EUV high throughput inspection system for defect detection on patte...

Coherent DUV illumination for semiconductor wafer inspection

Optical imaging system with laser droplet plasma illuminator

EUV high throughput inspection system for defect detection on patte...

Indium rich InGaN LED line monitor

Methods and systems for providing illumination of a specimen for in...

Methods and systems for providing illumination of a specimen for a...

Coherent DUV illumination for semiconductor wafer inspection

Microchannel cooled edge cladding to establish an adiabatic boundar...

High transmission optical inspection tools

Patents Applicationslast 30 patents

System and Method for X-Ray Imaging and Classification of Volume De...

System and Method for Inhibiting VUV Radiative Emission of a Laser-...

System and Method for Inhibiting Radiative Emission of a Laser-Sust...

System and Method for Transverse Pumping of Laser-Sustained Plasma

Solid State Light Production Using Flexible Grouping Of LEDs

SUB 200NM LASER PUMPED HOMONUCLEAR EXCIMER LASERS

High Throughput Hot Testing Method And System For High-Brightness L...

EUV High Throughput Inspection System For Defect Detection On Patte...

EUV High Throughput Inspection System For Defect Detection On Patte...

High Throughput Hot Testing Method And System For High-Brightness L...

OPTICAL IMAGING SYSTEM WITH LASER DROPLET PLASMA ILLUMINATOR

Multi-Wavelength Pumping to Sustain Hot Plasma

EUV High Throughput Inspection System For Defect Detection On Patte...

Coherent DUV illumination for semiconductor wafer inspection

Coherent DUV illumination for semiconductor wafer inspection