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Rick J. Roberts
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for heating substrates
Patent number
7,431,585
Issue date
Oct 7, 2008
Applied Materials, Inc.
Jun Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for heating substrates
Patent number
7,381,052
Issue date
Jun 3, 2008
Applied Materials, Inc.
Jun Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for e-beam treatment used to fabricate integr...
Patent number
7,256,139
Issue date
Aug 14, 2007
Applied Materials, Inc.
Farhad Moghadam
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gapfill process using a combination of spin-on-glass deposition and...
Patent number
6,992,024
Issue date
Jan 31, 2006
Applied Materials, Inc.
Zhenjiang Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for E-beam treatment used to fabricate integr...
Patent number
6,936,551
Issue date
Aug 30, 2005
Applied Materials Inc.
Farhad Moghadam
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Anti-stratification-solution delivery system for spin-on dielectrics
Patent number
6,895,776
Issue date
May 24, 2005
Applied Materials, Inc.
Jun Zhao
B24 - GRINDING POLISHING
Information
Patent Grant
Multistep cure technique for spin-on-glass films
Patent number
6,878,644
Issue date
Apr 12, 2005
Applied Materials, Inc.
Zhenjiang Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gapfill process using a combination of spin-on-glass deposition and...
Patent number
6,693,050
Issue date
Feb 17, 2004
Applied Materials Inc.
Zhenjiang Cui
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHODS AND APPARATUS FOR E-BEAM TREATMENT USED TO FABRICATE INTEGR...
Publication number
20070275569
Publication date
Nov 29, 2007
Farhad Moghadam
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
Apparatus and method for heating substrates
Publication number
20060223233
Publication date
Oct 5, 2006
Applied Materials, Inc.
Jun Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and apparatus for e-beam treatment used to fabricate integr...
Publication number
20050130404
Publication date
Jun 16, 2005
APPLIED MATERIALS, INC.
Farhad Moghadam
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
ANTI-STRATIFICATION-SOLUTION DELIVERY SYSTEM FOR SPIN-ON DIELECTRICS
Publication number
20050005629
Publication date
Jan 13, 2005
Applied Materials, Inc.
Jun Zhao
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Electron beam treatment of SixNy films
Publication number
20040266123
Publication date
Dec 30, 2004
APPLIED MATERIALS, INC.
Zhenjiang Cui
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Multistep cure technique for spin-on-glass films
Publication number
20040224479
Publication date
Nov 11, 2004
Applied Materials, Inc.
Zhenjiang Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Gapfill process using a combination of spin-on-glass deposition and...
Publication number
20040224496
Publication date
Nov 11, 2004
Applied Materials, Inc.
Zhenjiang Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Cluster tool for E-beam treated films
Publication number
20040069410
Publication date
Apr 15, 2004
Farhad Moghadam
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
Process and an integrated tool for low k dielectric deposition incl...
Publication number
20040020601
Publication date
Feb 5, 2004
Applied Materials, Inc.
Jun Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and apparatus for E-beam treatment used to fabricate integr...
Publication number
20030232495
Publication date
Dec 18, 2003
Farhad Moghadam
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
Apparatus and method for heating substrates
Publication number
20030138560
Publication date
Jul 24, 2003
Applied Materials, Inc.
Jun Zhao
H01 - BASIC ELECTRIC ELEMENTS