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Ricky Ruffin
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Gaithersburg, MD, US
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Patents Grants
last 30 patents
Information
Patent Grant
Oxygen free plasma stripping process
Patent number
6,638,875
Issue date
Oct 28, 2003
Axcelis Technologies, Inc.
Qingyan Han
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for detecting an endpoint for an oxygen free plasma process
Patent number
6,492,186
Issue date
Dec 10, 2002
Eaton Corporation
Qingyan Han
G01 - MEASURING TESTING
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Patent Grant
Oxygen free plasma stripping process
Patent number
6,281,135
Issue date
Aug 28, 2001
Axcelis Technologies, Inc.
Qingyuan Han
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Oxygen free plasma stripping process
Publication number
20010027016
Publication date
Oct 4, 2001
Axcelis Technologies, Inc.
Qingyan Han
H01 - BASIC ELECTRIC ELEMENTS