Risa Nakase

Person

  • Kanagawa, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Method for forming film by plasma

    • Patent number 6,770,332
    • Issue date Aug 3, 2004
    • Tokyo Electron Limited
    • Risa Nakase
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma thin-film deposition method

    • Patent number 6,544,901
    • Issue date Apr 8, 2003
    • Tokyo Electron Limited
    • Risa Nakase
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method for cleaning plasma treatment device and plasma treatment sy...

    • Patent number 6,443,165
    • Issue date Sep 3, 2002
    • Tokyo Electron Limited
    • Takashi Akahori
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma film forming method and plasma film forming apparatus

    • Patent number 6,355,902
    • Issue date Mar 12, 2002
    • Tokyo Electron Limited
    • Takashi Akahori
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing method

    • Patent number 6,320,154
    • Issue date Nov 20, 2001
    • Tokyo Electron Limited
    • Takashi Akahori
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma film forming method and plasma film forming apparatus

    • Patent number 6,215,087
    • Issue date Apr 10, 2001
    • Tokyo Electron Limited
    • Takashi Akahori
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma treating device

    • Patent number 6,087,614
    • Issue date Jul 11, 2000
    • Tokyo Electron Limited
    • Shuichi Ishizuka
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents