Number | Date | Country | Kind |
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9-343998 | Nov 1997 | JP | |
10-048882 | Feb 1998 | JP |
This application is a continuation of International Application No. PCT/JP98/05219, filed Nov. 19,1998, the content of which is incorporated herein by reference.
Number | Name | Date | Kind |
---|---|---|---|
5462784 | Grill et al. | Oct 1995 | A |
5942328 | Grill et al. | Aug 1999 | A |
5989998 | Sugahara et al. | Nov 1999 | A |
6057226 | Wong | May 2000 | A |
6159862 | Yamada et al. | Dec 2000 | A |
6215087 | Akahori et al. | Apr 2001 | B1 |
Number | Date | Country |
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63-192867 | Aug 1988 | JP |
63-235463 | Sep 1988 | JP |
9-246263 | Sep 1997 | JP |
9-246264 | Sep 1997 | JP |
Entry |
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H. Yasuda et al., “Some Aspects of Plasma Polymerization of Fluorine-Containing Organic Compounds,” Journal of Polymer Science, vol. 15, 2411-2425 (1977). |
R.E. Sah et al., “Amorphous Carbon Coatings Prepared by High Rate RF Plasma Deposition from Fluorinated Benzenes”, Applied Physics Letter 46, Apr. 1985. |
R.E. Sah, “Mass Spectrometric Study of Gas Evolution from Plasma-Deposited Fluorohydrogenated Amorphous Carbon Films on Heating”, Thin Solid Films, vol. 167, pp. 255-260, (1988). |
A. Grill et al., “Wear Resistant Fluroniated Diamondlike Carbon Films”, Diamond Films and Technology, vol. 6, No. 1, pp. 13-21, (1996). |
Number | Date | Country | |
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Parent | PCT/JP98/05219 | Nov 1998 | US |
Child | 09/578726 | US |