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Robert A. Bergstedt

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  • Carlsbad, CA, US
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    CALIBRATION OF PHOTOELECTROMAGNETIC SENSOR IN A LASER SOURCE
    • Publication number 20160011056
    • Publication date Jan 14, 2016
    • ASML NETHERLANDS B.V.
    • Rong Liu
    • G01 - MEASURING TESTING
  • Information Patent Application

    CALIBRATION OF PHOTOELECTROMAGNETIC SENSOR IN A LASER SOURCE
    • Publication number 20160011057
    • Publication date Jan 14, 2016
    • ASML NETHERLANDS B.V.
    • Rong Liu
    • G01 - MEASURING TESTING
  • Information Patent Application

    FINAL FOCUS ASSEMBLY FOR EXTREME ULTRAVIOLET LIGHT SOURCE
    • Publication number 20150173164
    • Publication date Jun 18, 2015
    • ASML NETHERLANDS B.V.
    • Paul A. McKenzie
    • G02 - OPTICS
  • Information Patent Application

    System and Method for Return Beam Metrology with Optical Switch
    • Publication number 20150041659
    • Publication date Feb 12, 2015
    • CYMER, LLC
    • Matthew Graham
    • G01 - MEASURING TESTING
  • Information Patent Application

    ALIGNMENT OF LIGHT SOURCE FOCUS
    • Publication number 20140151583
    • Publication date Jun 5, 2014
    • Matthew R. Graham
    • G01 - MEASURING TESTING
  • Information Patent Application

    System and Method for Separating a Main Pulse and a Pre-Pulse Beam...
    • Publication number 20130321926
    • Publication date Dec 5, 2013
    • Cymer, Inc.
    • Robert A. Bergstedt
    • G02 - OPTICS
  • Information Patent Application

    VERY HIGH POWER LASER CHAMBER OPTICAL IMPROVEMENTS
    • Publication number 20120307858
    • Publication date Dec 6, 2012
    • Hong Ye
    • G02 - OPTICS
  • Information Patent Application

    ALIGNMENT OF LIGHT SOURCE FOCUS
    • Publication number 20120019826
    • Publication date Jan 26, 2012
    • Cymer, Inc.
    • Matthew R. Graham
    • G01 - MEASURING TESTING
  • Information Patent Application

    Line Narrowing Module
    • Publication number 20110194580
    • Publication date Aug 11, 2011
    • Cymer, Inc.
    • J. Martin Algots
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Metrology for Extreme Ultraviolet Light Source
    • Publication number 20110141865
    • Publication date Jun 16, 2011
    • CYMER INC.
    • Vahan Senekerimyan
    • G01 - MEASURING TESTING
  • Information Patent Application

    Beam Transport System for Extreme Ultraviolet Light Source
    • Publication number 20110140008
    • Publication date Jun 16, 2011
    • CYMER INC.
    • Robert A. Bergstedt
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Laser System
    • Publication number 20110102759
    • Publication date May 5, 2011
    • Cymer, Inc.
    • Alexander I. Ershov
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Laser system
    • Publication number 20100108913
    • Publication date May 6, 2010
    • Cymer, Inc.
    • Alexander I. Ershov
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VERY HIGH POWER LASER CHAMBER OPTICAL IMPROVEMENTS
    • Publication number 20100098120
    • Publication date Apr 22, 2010
    • Hong Ye
    • G02 - OPTICS
  • Information Patent Application

    Line narrowing module
    • Publication number 20100097704
    • Publication date Apr 22, 2010
    • Cymer, Inc.
    • J. Martin Algots
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Immersion lithography laser light source with pulse stretcher
    • Publication number 20100074295
    • Publication date Mar 25, 2010
    • Cymer, Inc.
    • William N. Partlo
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Laser system
    • Publication number 20090122825
    • Publication date May 14, 2009
    • Cymer, Inc.
    • Alexander I. Ershov
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Immersion lithography laser light source with pulse stretcher
    • Publication number 20090080476
    • Publication date Mar 26, 2009
    • Cymer, Inc.
    • William N. Partlo
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Laser system
    • Publication number 20080225908
    • Publication date Sep 18, 2008
    • Cymer, Inc.
    • Alexander I. Ershov
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Laser system
    • Publication number 20080165337
    • Publication date Jul 10, 2008
    • Cymer, Inc.
    • Alexander I. Ershov
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Line narrowing module
    • Publication number 20080151944
    • Publication date Jun 26, 2008
    • Cymer, Inc.
    • J. Martin Algots
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Laser system
    • Publication number 20080144671
    • Publication date Jun 19, 2008
    • Cymer, Inc.
    • Alexander I. Ershov
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Active bandwidth control for a laser
    • Publication number 20070001127
    • Publication date Jan 4, 2007
    • Cymer, Inc.
    • Daniel J. Reiley
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Gas discharge laser line narrowing module
    • Publication number 20070002919
    • Publication date Jan 4, 2007
    • Cymer, Inc.
    • Raymond F. Cybulski
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Line narrowing module
    • Publication number 20060114957
    • Publication date Jun 1, 2006
    • J. Martin Algots
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY