Robert A. Eaton

Person

Scottsdale, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multiprobe detection system for chemical-mechanical planarization tool
- Patent number 6,960,115
- Issue date Nov 1, 2005
- SpeedFam-IPEC Corporation
- Matthew Weldon
- B24 - GRINDING POLISHING
Information Patent Grant
Multiprobe detection system for chemical-mechanical planarization tool
- Patent number 6,805,613
- Issue date Oct 19, 2004
- SpeedFam-IPEC Corporation
- Matthew Weldon
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for distributing fluid to a polishing surface...
- Patent number 6,641,462
- Issue date Nov 4, 2003
- SpeedFam-IPEC Corporation
- Robert A. Eaton
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for optical endpoint calibration in CMP
- Patent number 6,549,279
- Issue date Apr 15, 2003
- SpeedFam-IPEC Corporation
- John A. Adams
- G01 - MEASURING TESTING
Information Patent Grant
Hydrophobic optical endpoint light pipes for chemical mechanical po...
- Patent number 6,395,130
- Issue date May 28, 2002
- SpeedFam-IPEC Corporation
- John A. Adams
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for endpoint detection for chemical mechanical...
- Patent number 6,361,646
- Issue date Mar 26, 2002
- SpeedFam-IPEC Corporation
- Thomas Frederick Allen Bibby
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for endpoint detection for chemical mechanical...
- Patent number 6,106,662
- Issue date Aug 22, 2000
- SpeedFam-IPEC Corporation
- Thomas Frederick Allen Bibby
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Multiprobe detection system for chemical-mechanical planarization tool
- Publication number 20040038624
- Publication date Feb 26, 2004
- Matthew Weldon
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for optical endpoint calibration in CMP
- Publication number 20030020909
- Publication date Jan 30, 2003
- SpeedFam-IPEC Corporation
- John A. Adams
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for distributing fluid to a polishing surface...
- Publication number 20030003850
- Publication date Jan 2, 2003
- Robert A. Eaton
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for a spectrally stable light source using whi...
- Publication number 20020145728
- Publication date Oct 10, 2002
- SpeedFam-IPEC Corporation
- John A. Adams
- G01 - MEASURING TESTING

Robert A. Eaton

Person

Patents Grantslast 30 patents

Multiprobe detection system for chemical-mechanical planarization tool

Multiprobe detection system for chemical-mechanical planarization tool

Method and apparatus for distributing fluid to a polishing surface...

Method and apparatus for optical endpoint calibration in CMP

Hydrophobic optical endpoint light pipes for chemical mechanical po...

Method and apparatus for endpoint detection for chemical mechanical...

Method and apparatus for endpoint detection for chemical mechanical...

Patents Applicationslast 30 patents

Multiprobe detection system for chemical-mechanical planarization tool

Method and apparatus for optical endpoint calibration in CMP

Method and apparatus for distributing fluid to a polishing surface...

Method and apparatus for a spectrally stable light source using whi...