Claims
- 1. An apparatus for optical detection of endpoint in a chemical mechanical process, the apparatus comprising:(a) a platen; (b) a polishing pad mounted to a surface of the platen; (c) a hydrophobic light pipe extending through a canal which may be used for the delivery of slurry wherein one end of the pipe is located substantially co-planar with a polishing surface of the polishing pad such that the end of the pipe is exposed for optical communication with a workpiece during polishing; and (d) a light detector in optical communication with the light pipe.
- 2. The apparatus of claim 1, wherein the end of the light pipe is a plug of hydrophobic optically transparent polymer.
- 3. The apparatus of claim 1, wherein the light pipe has a substantially transparent body coated with a hydrophobic composition.
- 4. The apparatus of 1, wherein the end of the light pipe is formed in-situ by curing of a substantially optically transparent liquid comprising a hydrophobic polymer.
- 5. The apparatus of claim 1, wherein the end of the light pipe is a substantially cylindrical plug of hydrophobic polymer adhered to a bore in the polishing pad.
- 6. The apparatus of claim 1, wherein the end of the light pipe is in contact with a workpiece during polishing of the workpiece.
STATEMENT OF RELATED APPLICATIONS
This application is a continuation-in-part of U.S. Ser. No. 09/093,467, U.S. Pat. No. 6,106,662 filed Jun. 8, 1998; U.S. Ser. No.09/277,452 filed Mar. 26, 1999; and U.S. Ser. No. 09/307,995 filed May 10, 1999.
US Referenced Citations (13)
Continuation in Parts (3)
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Number |
Date |
Country |
Parent |
09/307995 |
May 1999 |
US |
Child |
09/441436 |
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US |
Parent |
09/277452 |
Mar 1999 |
US |
Child |
09/307995 |
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US |
Parent |
09/093467 |
Jun 1998 |
US |
Child |
09/277452 |
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US |