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Robert A. Ewald
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Aptos, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Extended pad life for ECMP and barrier removal
Patent number
8,012,000
Issue date
Sep 6, 2011
Applied Materials, Inc.
Yuchun Wang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Conductive pad with ion exchange membrane for electrochemical mecha...
Patent number
7,344,432
Issue date
Mar 18, 2008
Applied Materials, Inc.
Liang-Yun Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer processing reactor having a gas flow control system and method
Patent number
6,143,080
Issue date
Nov 7, 2000
Silicon Valley Group Thermal Systems LLC
Lawrence D. Bartholomew
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
APPARATUS AND METHODS FOR USING A POLISHING TAPE CASSETTE
Publication number
20090264053
Publication date
Oct 22, 2009
Applied Materials, Inc.
Antoine P. Manens
B24 - GRINDING POLISHING
Information
Patent Application
EXTENDED PAD LIFE FOR ECMP AND BARRIER REMOVAL
Publication number
20080242202
Publication date
Oct 2, 2008
Yuchun Wang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Conductive Polishing Article for Electrochemical Mechanical Polishing
Publication number
20080108288
Publication date
May 8, 2008
Yongqi Hu
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SOFT CONDUCTIVE POLYMER PROCESSING PAD AND METHOD FOR FABRICATING T...
Publication number
20070218587
Publication date
Sep 20, 2007
APPLIED MATERIALS, INC.
Yuchun Wang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PROCESS AND COMPOSITION FOR PASSIVATING A SUBSTRATE DURING ELECTROC...
Publication number
20070144915
Publication date
Jun 28, 2007
APPLIED MATERIALS, INC.
Yuan A. Tian
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
CONDUCTIVE PAD WITH ION EXCHANGE MEMBRANE FOR ELECTROCHEMICAL MECHA...
Publication number
20070099552
Publication date
May 3, 2007
APPLIED MATERIALS, INC.
Liang-Yuh Chen
B24 - GRINDING POLISHING
Information
Patent Application
Conditioning element for electrochemical mechanical processing
Publication number
20060276111
Publication date
Dec 7, 2006
APPLIED MATERIALS, INC.
Yuan A. Tian
B24 - GRINDING POLISHING
Information
Patent Application
Process and composition for electrochemical mechanical polishing
Publication number
20060249395
Publication date
Nov 9, 2006
Applied Material, Inc.
You Wang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and composition for polishing a substrate
Publication number
20060169597
Publication date
Aug 3, 2006
APPLIED MATERIALS, INC.
Feng Q. Liu
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Information
Patent Application
Conductive polishing article for electrochemical mechanical polishing
Publication number
20040020789
Publication date
Feb 5, 2004
APPLIED MATERIALS, INC.
Yongqi Hu
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